Demonstration of spatially coherent light in the water window using a compact source for the first time [M. Chen, submitted (2010)]

3D structural determination from a single view [K. Raines et al., Nature 463 ,
214 (2010)]

Table-top EUV Zone Plate microscopy with 38 nm spatial resolution using a newly developed high repetition rate 13.2 nm laser and zone plate optics (collaboration between CSU and UC – Berkeley). The wavelength of operation falls within the bandwidth of Mo/Si mirrors for EUV lithography, opening up a pathway to table-top at-wavelength metrologies for defect inspection. [F. Brizuela et al., Optics Express 30 , 2095, (2005)]

Table-top lensless coherent imaging using small-scale coherent EUV sources was demonstrated for the first time , achieving a record resolution of 70 nm. This advance used both high harmonic EUV sources and a compact EUV laser. (Collaboration between CU, CSU, UCLA and UC – Berkeley). This result may be of interest for defect inspection) [R. Sandberg et al., Proc. Of the National Academy of Science 105 , 24, (2008); R. Sandberg et al., Physical Review Letters 99 , 098103, (2007)]

A compact EUV microscope capable of operation in the reflection mode for the inspection of surfaces and nanostructures was also developed using the combination of a 46.9 nm capillary discharge laser, reflective optics and diffractive optics (collaboration between CSU, UC - Berkeley and the Lebedev Physical Institute). In the last year the resolution of this microscope was improved to 54 nm. [G. Vaschenko et al., Optics Letters 30 , 2095, (2005), F. Brizuela et al., Optics Express 30 , 2095, (2005)]

Demonstration of ultrafast EUV holographic imaging for the first time (collaboration with MIT). [R.I. Tobey et al., Optics Express 32 , 286, (2007)]

Demonstration of a table-top 13.2 nm reflection microscope for actinic mask characterization using EUV laser illumination with a resolution of 55nm (Collaboration between CSU and UC – Berkeley). [F. Brizuela et al., Optics Letters 34 , 271, (2009)]

First demonstration of phase contrast imaging with a spiral zone plate confirming formation of x-ray optical vortices using diffractive optics. [A. Sakdinawat and Y. Liu, Optics Letters 32, 2635 (2007)]

X-ray Zernike phase contrast imaging using the Zernike zone plate , a single diffractive optical element. [A. Sakdinawat and Y. Liu, Optics Express (2008)]

Extended depth of field imaging using wavefront coded zone plates demonstrated for 40 nm features. [A. Sakdinawat, et. al., in preparation ]

Massively parallel x-ray holography using uniformly redundant arrays increases resolution capability for holographic imaging (collaboration with ALS). [S. Marchesini, et. al. Nature Photonics (2008)]

EUV holograms with 50 nm resolution using a table-top 46.9 nm EUV laser. [P Wachulak et al., Optics Express 14, 9636, (2006)]

Synchrotron radiation based EUV interferometry was advanced to the wave front analysis of a 0.3 NA multilayer coated optics , a factor of three increases in NA with respect to previous experiments. EUV static exposures were printed with 25 nm features for the first time. [K. Goldberg et al., SPIE 5374, 64, (2004)]

Patterning of gratings with periods as small as 55 nm using a 46.9 nm EUV laser. Printing arrays of nanostructures with features as small as 56 nm. [P. Wachulak et al., Journal of the Optical Society of America B 25 , B20, (2008); P. Wachulak et al., Journal of the Optical Society of America B 25 , B104, (2008); P. Wachulak et al., Opto-Electronics Review 16 , 144, (2008); P. Wachulak et al., Optical Society of America B 25 , 1811, (2008); P. Wachulak et al., Optics Express 15 , 10622, (2007); P. Wachulak et al., Optics Express 15 , 3465, (2007); M. Capeluto et al., Microelectronic Engineering 84 , 721, (2007); P. Wachulak et al., Optics Express 14 , 9636, (2006); M. Capeluto et al., IEEE Transactions on Nanotechnology 5 , 3, (2006)]

Printing of arrays of arbitrarily shaped nano-patterns by Talbot imaging using a table-top laser illumination [ F. Cerrina et al., submitted (2009)]

Demonstration of lensless imaging using 30 nm wavelength high harmonic sources with resolutions of 50 nm. This improved the image resolution achieved using HHG by a factor or 2. [R. Sandberg et al., Optics Letters 34 , 1618 (2009 ); Murnane and Miao, Nature 460 , 1088 (2009)]

Zone plate microscopy using synchrotron radiation was advanced from a spatial resolution of 15 nm in 2005 to a record resolution of 12 nm. [W. Chao et al., Journal of Vacuum Science Technology B 21 , (2003); W. Chao et al., Nature 435 , 1210, (2005); W. Chao et al., (manuscript in preparation)]

Demonstration of lensless imaging using 13 nm wavelength high harmonic sources for the first time , with resolutions of 90 nm. [D. Raymondson et al. submitted (2010)]

22 nm printed lines and spaces (dense) for EUV lithography at 13.5 nm wavelength. EUV chemically amplified photoresist is now probing the 20 nm barrier with doses of 15 mJ/cm 2 [P. Naulleau, C. Anderson, SPIE Advanced Lithography 2009]

Direct x-ray imaging of vortex dynamics in magnetic nanostructures at the Fe L3 edge. Gyrotropic resonant motion of the magnetic vortex core has been observed with 300ps time steps. [B.L. Mesler, M.-Y. Im, P. Fischer, MRS Spring Meeting Poster, San Francisco , (2009)]

Demonstration of nano-machining with a focus EUL laser (200 nm grooves) (Collaboration between CSU and UC – Berkeley). [H. Bravo, CLEO, (2009)]

Demonstration of dense plasma interferometry using a table-top laser (Collaboration between CSU and Lawrence Livermore National Laboratory). [J. Filevich et al., Applied Optics 43, 3938, (2004); J. Filevich et al., Physical Review Letters 94, 035005, (2005); J. Filevich et al., J. Quant. Spec. and Rad. Trans. 99, 165, (2006); J. Filevich et al., Physical Review E 74, 016404, (2006); J. Filevich et al., Laser Particle Beams 25, 47, (2007)]