NSF EUV ERC

NSF Engineering Research Center
for Extreme Ultraviolet (EUV) Science and Technology

Welcome to the Center for Extreme Ultraviolet Science and Technology – an Engineering Research Center (ERC) exploring the development of compact coherent extreme ultraviolet (EUV) sources and their applications in challenging scientific and technological problems.

Light in the extreme ultraviolet region of the electromagnetic spectrum covers the 5-50 nm range. Because its wavelength is 100-10 times shorter than visible light it can ‘see’ and ‘write’ smaller patterns in applications such as microscopy and lithography. Furthermore, these wavelengths are well matched to the primary atomic resonances of most elements, making possible many element- and chemically- specific spectroscopies and spectromicroscopies.


Our goal is to make EUV light, now mostly limited to a handful of large national facilities, available routinely in a broad variety of laboratory settings, for applications such as high-resolution imaging, spectroscopy, elemental- and bio-microscopy, and nano-fabrication. This picture shows all the different applications the EUV ERC has demonstrated in the last 3 years by combining unique coherent EUV sources with state of the art EUV optics. Through these efforts the EUV ERC is educating a diverse group of students and young scientists in EUV optical technologies who will then go on to play a critical role in maintaining U.S. technological competitiveness.

The Center for Extreme Ultraviolet Science and Technology, created by the National Science Foundation in 2003, among four core partner institutions:

Other Center Outreach Partners in research and education include:
Spelman College, Morehouse College, Agnes Scott College, CSU Pueblo, the University of the South Sewanee, Brywn Mawr, Brigham Young University, Hamline University, UC–Davis, Massachusetts Institute of Technology, University of Buenos Aires, Sofia University, The Pueblo School of Arts and Sciences, Lebedev Physical Institute, Lawrence Livermore National Laboratory, Drexel University, KTH (University of Stockhom), and State University of New York at Albany.

The Center also has an Industry Outreach Program.

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This work is supported primarily by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310717. Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not reflect those of the National Science Foundation.
Last updated: 03/07/14