We welcome XEI Scientific, Inc. as our newest member of the Industrial Advisory Board!
XEI, Scientific offers products for cleaning electron microscope optics and high vacuum systems. Please view their website for products and capabilities.
XRadia joined last month as a member of the Industrial Advisory Board.
Xradia (www.Xradia.com) designs and manufactures a suite of ultra high resolution 3D x-ray microscopes and fluorescence imaging systems for non-destructive imaging of embedded internal structures. Please see their website for more information.
Industry Outreach
EUV radiation has played an important role for decades in scientific pursuits including surface science, atomic and molecular science, solar physics and others. A major acceleration, however, is presently underway. The widespread pursuit of nanoscience and nanoengineering benefits from the availability of radiation with comparable wavelengths for metrology and characterization, and in some cases for direct pattern formation. As a consequence many new scientific and technological opportunities are emerging that require compact, widely available tools. A particular case, and a strong driver of the current expansion of activities, is that of EUV lithography for the high volume manufacture of future computer chips. Current industry timelines call for this new technology to be used for the manufacture of 19 GHz microprocessors in the year 2010-2012. To meet these ambitious goals a substantial new infrastructure is required, including component vendors, instrument suppliers small and large, all requiring a well-trained staff.
To help meet the needs of the emerging industry
we have formed a broadly based Industrial Advisory Board (IAB),
to help guide our EUV Engineering Research Center. Our goal
is to have a broad impact on science and technology, from
small scale university research to large scale manufacturing.
Towards that end we organized an IAB with members from small,
medium and large corporations, with as wide as possible scientific
and technical interests. We receive their individual and collective
advice, work closely with them on special projects, and serve
as an intellectual center where they can come for EUV related
expertise, interact with each other and, through our teaching
and research, meet and hire well trained future employees.
- The first EUV ERC industry meeting was
held in Berkeley Nov. 21 2003. Eleven industry representatives
attended. Several other companies could not attend but contributed. Since that time, IAB meetings have been held each year with the sites chosen as convenient to member participation. The last meeting was February 25, 2008 in San Jose, CA.
- Corporate Membership Agreements and Center
Bylaws were prepared with inputs from all parties and finalized
May 4, 2004. These are available by request from Hugh Grinolds at grinolds.engr.colostate.edu
- Currently, there are 18 industry members to the EUV ERC.
