Thrust I:  Engineered EUV Source

Lasing wavelength of the coherent EUV sources recently demonstrated at the EUV ERC

Desktop Laser
at 10Hz

Coherent HHG Light Near 13nm

Quasi-phase matching at 4nm and Harmonics from Ions (200-300 eV)

100nm

10nm

1nm

10eV

100eV

1keV

Lasing with 10Hz Table-top Pump

Essential to the success of the EUV ERC strategic plan is the development of compact and cost effective sources of coherent EUV light with significantly improved capabilities.  Two complimentary approaches are being pursued: High Order Harmonic Generation and EUV Lasers.

During the first year of the EUV ERC significant progress was made in decreasing the size of the coherent EUV light source testbeds, and in extending their operation to shorter wavelengths.

Breakthroughs in HHG sources

• Demonstrated enhancement of the conversion efficiency of laser light to high harmonic radiation at very short wavelengths around 4nm.
• Demonstrated that could generate very high harmonics from ions.
• Demonstrated the generation of fully spatially coherent beams using high harmonics generation at wavelengths around 13 nm.
• High harmonics generation EUV emission in entire water window.
• Full spatial coherence high harmonics generation from 13-30 nm.
• Partial phase matching in fully ionized Ar gas, 200-250 eV.high harmonics generation from ions in capillary discharge plasma.

Breakthroughs in EUV lasers

• Succeeded in scaling down the size of high repetition rate discharge pumped EUV lasers from table-top to desk-top, and demonstrated unprecedented high repetition rate operation for EUV lasers.
• Demonstrated EUV lasers with output wavelength between 12.8 and 22.6 nm in Ni-like Cd, Ag, Ru, Mo.
• Saturated lasers down to 13.2 nm (>1 m W)
• Lasing down to 10.9 nm
• Desktop size 46.9 nm laser demonstrated
• Successful integration to imaging, nanoablation, and spectroscopy testbeds

Projects

1. EUV lasers at wavelengths down to 10.9 nm
2. Development of a desktop 46.9 nm capillary discharge pumped laser
3. High Repetition Rate EUV lasers
4. Phase-matched Frequency Conversion at Extreme Wavelengths
5. Phase Matching and Quasi Phase Matching at High Photon Energies
6. Generation of High Harmonics from Hybrid Discharge Plasmas

Associated Projects

Lasing wavelength of the coherent EUV sources recently demonstrated at the EUV ERC

Publications

For additional information see: University of Colorado at Boulder and Jorge Rocca's homepage