EUV ERC

Engineering Research Center
for Extreme Ultraviolet (EUV) Science and Technology

Publications

 

Publications that result from Center Support
In Peer-Reviewed Technical Journals:

  1. W. Chao, E.H. Anderson, G. Denbeaux, B. Harteneck, J.A. Liddle, D. Olynick, A.L. Pearson, F. Salmassi, C. Song, and D. Attwood, “20-nm resolution soft x-ray microscopy demonstrated using multilayer test structures,” Optics Letters 28 , 2019 (2003).
  2. G. Denbeaux, P. Fischer, G. Schneider, J.A. Liddle, E. Anderson, A. Pearson, C. Weilun, C. Larabell, M. Legros and D. Attwood, “Full-field soft x-ray microscopy at the Advanced Light Source,” Synch. Rad. News. 16 , 16 (2003).
  3. F. Eriksson, G.A. Johansson, H.M. Hertz, E.M. Gullikson, U. Kreissig and J. Birch, “14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window,” Optics Letters 28 , 2494 (2003).
  4. M. Grisham, G. Vaschenko, C.S. Menoni, J.J. Rocca, Yu.P. Pershyn, E.N. Zubarev, D.L. Voronov, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinigradov, and I.A. Artioukov, “Damage of Extreme Ultraviolet Sc/Si Multilayer Mirrors Exposed to Intense 46.9 nm Laser Pulses ,” Optics Letters 29, 620 (2004).
  5. S. Kohli, P.R. McCurdy, C.D. Rithner, P.K. Dorhout, A.M. Dummer, F. Brizuela, and C.S. Menoni , “X-ray characterization of oriented beta-tantalum films ,” Thin Solid Films 469-70: 404-409 Sp. Iss. SI, (2004).
  6. M.A. Larotonda, B.M. Luther, Y. Wang. Y. Liu, D.Alessi, M.Berrill, A. Dummer, F. Brizuela, C.S. Menoni, M.C. Marconi, V.N. Shlyaptsev, J. Dunn, and J.J. Rocca, “Characteristics of a Saturated 18.9 nm Tabletop Laser Operating at 5 Hz Repetition Rate ,” IEEE Journal of selected topics in Quantum Electronics 10 , 1363 (2004).
  7. B.M. Luther, Y. Wang, M.C. Marconi, J.L.A. Chilla, M.A. Larotonda, J.J. Rocca, “Guiding of intense laser beams in highly ionized plasma columns ,” Physical Review Letters 92 , 235002 (2004).
  8. A.L. Lytle, D. Müller, E. Gershgoren, R.I. Tobey, M.M. Murnane, H.C. Kapteyn, “Use of a simple cavity geometry for low and high repetition rate of modelocked Ti:sapphire lasers ,” Optics Express 12 , 1409 (2004).
  9. D.M. Gaudiosi, A. Lytle, P. Kohl, M.M. Murnane, H.C. Kapteyn, S. Backus, “11-W Average Power Ti:sapphire Amplification System using Downchirped Pulse Amplification ,” Optics Letters 29 , 2665 (2004).
  10. N. Wagner, E. Gibson, T. Popmintchev, I. Christov, M.M. Murnane, H.C. Kapteyn, “Self-compression of ultrashort pulses through ionization-induced spatio-temporal reshaping ,” Physical Review Letters 93 , 173902 (2004).
  11. I. Thomann, E. Gagnon, R. Jason Jones, A.S. Sandhu, A. Lytle, R. Anderson, M.M. Murnane, H. Kapteyn, “Investigation of a grating-based stretcher/compressor for carrier-envelope phase stabilized fs pulses ,” Optics Express 12 , 3493 (2004).
  12. K.M. Rosfjord, Y. Liu, D.T. Attwood, “Tunable Coherent Soft X-Ray ,” IEEE Journal of selected topics in Quantum Electronics 10 , 1405 (2004).
  13. E.A. Gibson, X. Zhang, T. Popmintchev, A. Paul, N. Wagner, A. Lytle, I.P. Christov, M.M. Murnane, H.C. Kapteyn, “Extreme nonlinear optics: attosecond photonics at short wavelength ,” IEEE Journal of Selected Topics in Quantum Electronics 10 , 1339 (2004).
  14. B.M. Luther, Y. Wang, M.A. Larotonda, D. Alessi, M. Berrill, M. Marconi, V.N. Shlyaptsev, and J.J. Rocca, “Saturated 18.9 nm laser in a Ni-like Mo plasma excited by a high repetition rate table-top laser ,” Optics Letters 30 , 165 (2005).
  15. D.Alessi, B.M.Luther, Y.Wang, M.A.Larotonda, M.Berrill, and J.J.Rocca, “High repetition rate operation of saturated tabletop soft x-ray lasers in transitions of neon-like ions near 30 nm ,” Optics Express 13 , 2093 (2005).
  16. L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A.R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J.B. Pelka, A. Wawro, M.E. Grisham, G. Vaschenko, C.S. Menoni, and J.J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation ,” Applied Physics Letters 86 , 034109 (2005).
  17. S. Kohli, C.D. Rithner, P.K. Dorhout, A.M. Dummer, and C.S. Menoni, “Comparison of nanometer-thick films by x-ray reflectivity and spectroscopic ellipsometry ,” Review of Scientific Instruments 76, 023906 (2005).
  18. E. A. Gibson, I. P. Christov, M. M. Murnane, and H. C. Kapteyn, "Quantum Control of High Harmonic Generation: Applied Attosecond Science," Femtosecond Optical Frequency Comb: Principle, Operation, and Applications, J. Ye, Ed.: Kluwer Publishing Company, (2005). (Book)
  19. Y. Wang, M.A. Larotonda, B.M. Luther, D. Alessi, M. Berrill, V.N. Shlyaptsev, and J.J. Rocca , “Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelength down to 13.9 nm ,” Physical ReviewA 72 , 053807 (2005).
  20. W. Chao, B.H. Harteneck, J.A. Liddle, E.H. Anderson, D.T. Attwood, “Soft x-ray microscopy at a spatial resolution better than 15 nm,” Nature , 435 , 1210 (2005).
  21. J.J. Rocca, Y. Wang, M.A. Larotonda, B.M. Luther, M. Berrill, D. Alessi, “Saturated 13.2 nm high repetition rate laser in Nickel-like Cd ,” Optics Letters 30 , 2581 (2005).
  22. H.C. Kapteyn, M.M. Murnane, I.P. Christov, “Extreme nonlinear optics: A coherent X rays from lasers ,” Physics Today 58 , 39 (2005).
  23. X. Zhang, A. Lytle, T. Popmintchev, A. Paul, N. Wagner, M. Murnane, H. Kapteyn, I.P. Christov, “Phase matching, quasi-phase matching, and pulse compression in a single waveguide for enhanced high-harmonic generation ,” Optics Letters 30 , 1971 (2005).
  24. Y. Wang, B.M. Luther, M. Berrill, M. Marconi, F. Pedacci, J.J. Rocca, “Capillary discharge-driven metal vapor plasma waveguides ,” Physical Review E 72 , 026413 (2005).
  25. L. Juha, M. Bittner, D. Chvostova, J. Krasa, M. Kozlova, J. Polan, A.R. Prag, B. Rus, M. Stupka, J. Feldhaus, V. Letal, Z. Otcenasek, J. Krzywinski, J.B. Pelka, A. Andrejczuk, R. Sobieraiski, L. Ryc, F.P. Boody, H. Fiedorovicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pina, M. Horvath, M.E. Grisham, G.O. Vaschenko, C.S. Menoni, and J.J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects ,” Journal of Microlithography, Microfabrication, and Microsystems 4, 033007 (2005).
  26. G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C.S. Menoni, M. Marconi, J.J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn and V.V. Kondratenko, “Nano-imaging with a compact extreme ultraviolet laser ,” Optics Letters 30 , 2095 (2005).
  27. S. Heinbuch, M. Grisham, D. Martz, and J.J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser ,” Optics Express 13 , 4050 (2005).
  28. F. Brizuela, G. Vaschenko, C. Brewer, M. Grisham, C.S. Menoni, M. Marconi, and J.J. Rocca , W. Chao, A. Liddle, E. Anderson, and D. Attwood , A.V. Vinogradov and I.A. Artioukov , Y.P. Pershyn and V.V. Kondratenko, “Reflection mode microscope using a compact extreme ultraviolet laser light source ,” Optics Express 13 , 3983 (2005).
  29. L. Juha, M. Bittner, D. Chvostova, V. Letal, J. Krasa, Z. Otcenasek, M. Kozlova, J. Polan, A.R. Prag, B. Rus, M. Stupka, J. Krzywinski, A. Andrejczuk, J.B. Pelka, R. Sobierajski, L. Ryc, J. Feldhaus, F.P. Boody, M.E. Grisham, G.O. Vaschenko, C.S. Menoni, J.J. Rocca, “XUV-laser induced ablation of PMMA with nano-, pico-, and femtosecond pulses ,” Journal of Electron Spectroscopy and Related Phenomena 144-147 , 929 (2005).
  30. B.M. Luther, Y. Wang, M. Berrill, D. Alessi, M.C. Marconi, M.A. Larotonda, and J.J. Rocca, “Highly ionized Ar plasma wavequides generated by a fast capillary discharge ,” IEEE Transactions on Plasma Science 33 , 582,(2005).
  31. Y. Wang, B.M. Luther, F. Pedacci, M. Berrill, F. Brizuela, M. Marconi, M.A. Larotonda, V.N. Shlyaptsev, and J.J. Rocca, “Dense Capillary Discharge Plasma Waveguide Containing Ag Ions ,” IEEE Transactions on Plasma Science 33 , 584 (2005).
  32. L. Misoguti, I.P. Christov, S. Backus, M.M. Murnane, H.C. Kapteyn, “Nonlinear wave-mixing processes in the extreme ultraviolet ,” Physical Review A 72 , 063803 (2005).
  33. L. Muntean, R. Planques, A.L.D. Kilcoyne, S.R. Leone, M.K. Gilles, W.D. Hinsberg, “ Chemical Maping of polymer photoresists by scanning transmission x-ray microscopy ,” Journal of Vacuum Science and Technology B 23 , 1630 (2005).
  34. M.G. Capeluto, G. Vaschenko, M. Grisham, M.C. Marconi, S. Luduena, L. Pietrasanta, Y. Lu, B. Parkinson, C.S. Menoni, and J.J. Rocca, “Nanopatterning with interferometric lithography using a compact ?=46.9 nm laser ,” IEEE Transactions on Nanotechnology 5 , 3 (2006).
  35. B.M. Luther, Y. Wang, M.A. Larotonda, D. Alessi, M. Berrill, J.J. Rocca, J. Dunn, R. Keenan, V.N. Shlyaptsev, “High repetition rate collisional soft x-ray lasers based on grazing incidence pumpimg ,” IEEE Journal of Quantum Electronics 42 , 4 (2006).
  36. A. Paul, E.A. Gibson, X. Zhang, A. Little, T. Popmintchev, X. Zhou, and M.M. Murnane, “Phase-matching techniques for coherent soft x-ray generation ,” IEEE Journal of Quantum Electronics 42 , 14 (2006).
  37. J.D. Koralek, J.F. Douglas, N.C. Plumb, Z. Sun, A. Fedorov, M. Murnane, H. Kapteyn, S. Cundiff, Y. Aiura, K. Oka, H. Eisaki, and D.S. Dessau, “Laser based ARPES, the sudden approximation and quasiparticles in Bi2.1Sr1.9CaCu2O8+ ,” Physical Review Letters 96 , 017005 (2006).
  38. O. Cohen, M. Murnane, H. Kapteyn and M. Segev, “Cross-Phase-Modulation Nonlinearities and Holographic Solitons in Periodically-Poled Photovoltaic Photorefractives ,” Optics Letters, web published, web ID 65438, (2006).
  39. P. Fischer, D.H. Kim, W. Chao, J.A. Liddle, E.H. Anderson, D.T. Attwood, “Microscopy of nanomagnetism,” Materials Today 9 , 26 (2006).
  40. Y. Wang, E. Granados, M.A. Larotonda, M. Berrill, B.M. Luther, D. Patel, C.S. Menoni, and J.J. Rocca, “High-Brightness Injection-Seeded Soft-X-Ray-Laser Amplifier Using a Solid Target ,” Physical Review Letters 97 , 123901 (2006).
  41. D.M. Gaudiosi, B. Reagan, T. Popmintchev, M. Grisham, M. Berrill, O. Cohen, B.C. Walker, M.M. Murnane, H.C. Kapteyn, and J.J. Rocca, “High-Order Harmonic Generation from Ions in a Capillary Discharge ,” Physical Review Letters 96, 203001 (2006).
  42. M.A. Larotonda, Y. Wang, M. Berrill, B.M. Luther, J.J. Rocca, M.M. Shakya, S. Gilbertson, and Z. Chang, “Pulse duration measurements of grazing incidence pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers ,” Optics Letters 31 , 3043 (2006).
  43. G. Vaschenko, A. Garcia Etxarri, C.S. Menoni, J.J. Rocca, O. Hemberg, S. Bloom, W. Chao, E.H. Anderson, D.T. Attwood, Y. Lu, and B. Parkinson, “Nanometer scale ablation with a table-top soft x-ray laser ,” Optics Letters 31 , 3615 (2006).
  44. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M.A. Larotonda , B.M. Luther, M.C. Marconi, J.J. Rocca, C.S. Menoni, E.H. Anderson, W. Chao, B.D. Harteneck, J.A. Liddle, Y. Liu, and D.T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light ,” Optics Letters 31 , 1214 (2006).
  45. A. Weith, M.A. Larotonda, Y. Wang, B.M. Luther, D. Alessi, M.C. Marconi, J.J. Rocca, and J. Dunn, “Continuous high repetition rate operation of collisional soft x-ray lasers using solid targets ,” Optics Letters 31 , 1994 (2006).
  46. Y. Liu, Y. Wang, M.A. Larotonda, B. Luther, J.J. Rocca, and D.T. Attwood, “Spatial Coherence Measurements of a 13.2 nm Transient Nickel-like Cadmium Soft X-ray Laser Pumped at Grazing Incidence ,” Optics Express 14 , 12872 (2006).
  47. P.W. Wachulak, R.A. Bartels, M.C. Marconi, C.S. Menoni, J.J. Rocca, Y. Lu, and B. Parkinson, “Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser ,” Optics Express 13 , 9636 (2006).
  48. F. Dong, S. Heinbuch, S.G. He, Y. Xie, J.J. Rocca, and E.R. Bernstein, “Formation and Distribution of Neutral Vanadium, Niobium, and Tantalum Oxide Clusters: Single Photon Ionization at 26.5 eV ,” Journal of Chemical Physics 125 , 164318 (2006).
  49. S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein, “Single photon ionization of van der Waals clusters with a soft x-ray laser: (CO2)n and (CO2)n(H2O)m ,” Journal of Chemical Physics 125 , 154316 (2006).
  50. F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Single Photon Ionization of van der waals clusters with a soft x-ray laser: (SO2)n and (SO2)n(H2)m ,” Journal of Chemical Physics 125 , 154317 (2006).
  51. F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Dynamics and fragmentation of van der Waals clusters: (H 2 O))n, (CH3OH)n, and (NH3)n upon ionization by a 26.5 eV soft x-ray laser ,” Journal of Chemical Physics 124 , 224319 (2006).
  52. D. Attwood, “Nanotomography comes of Age ,” Nature 442 , 642 (2006).
  53. P. Fischer, “Studies of Magnetic Microstructures with Soft X-ray Transmission Microscopy ,” IEEE JQE 42 , 36 (2006).
  54. C. Chang, A. Sakdinawat, P. Fischer, E. Anderson, and D. Attwood, “Single-element Objective Lens for Soft-X-Ray Differential Interference Contrast Microscopy ,” Optics Letters 31 , 1564 (2006).
  55. K. Rosfjord, C. Chang, R. Miyakawa, H. Barth, and D. Attwood, “Direct index of refraction measurements at extreme-ultraviolet and soft-x-ray wavelength ,” Applied Optics 45 , 1730 (2006).
  56. D. Attwood, W. Chao, E. Anderson, J.A. Liddle, B. Harteneck, P. Fischer, G. Schneider, M.L. Gros, and C. Larabell, “Imaging at High Spatial Resolution: Soft X-Ray Microscopy to 15 nm ,” J. Biomed. Nanotech. 2 , 75 (2006).
  57. P. Fischer, D.-H. Kim, B. Kang, W. Chao, and E.H. Anderson, “Magnetic microstructures and their dynamics studied by X-ray microscopy ,” Micron 37 , 296 (2006).
  58. A. L. Aquila, F. Salmassi, F. Dollar, Y. Liu, E.M. Gullikson, “Developments in realistic design for aperiodic Mo/Si multilayer mirrors ,” Optics Express 14 , 10073 (2006).
  59. P. Fischer, D.-H. Kim, W. Chao, J.A. Liddle, E.H. Anderson, and D.T. Attwood, “Soft x-ray microscopy of nanomagnetism ,” Materials Today 9 , 26 (2006).
  60. D. Kim, P. Fischer, W. Chao, E. Anderson, S. Choe, M. Im, and S. Shin, “Magnetic Soft X-Ray Microscopy at 15nm Resolution Probing Nanoscale Local Magnetic Hysteresis ,” Optics Express 14 , 10073 (2006)
  61. N.L. Wagner, A. Wüest, I.P. Christov, T. Popmintchev, X. Zhou, M.M. Murnane, and H.C. Kapteyn, “Inaugural Article: Monitoring molecular dynamics using coherent electrons from high harmonic generation ,” Proceedings of the National Academy of Sciences, Inaugural Article 103 , 13279 (2006).
  62. L. Miaja, G. Saathoff, T. Lei, M. Murnane, H. Kapteyn, M. Aeschlimann, and J. Gland, “Laser-Assisted Photoelectric Effect from Surfaces ,” Physical Review Letters 97 , 113604 (2006).
  63. R.I. Tobey, M.E. Siemens, M.M. Murnane, H.C. Kapteyn, D.H. Torchinsky, and K.A. Nelson, “Transient grating measurement of surface acoustic waves in thin metal films with extreme ultraviolet radiation ,” Applied Physics Letters 89 , 091108 (2006).
  64. D.M. Gaudiosi, E. Gagnon, A.L. Lytle, J.L. Fiore, E.A. Gibson, S. Kane, J.Squier, M.M. Murnane, H.C. Kapteyn, R. Jimenez, and S. Backus, “Multi-kilohertz repetition rate Ti : sapphire amplifier based on down-chirped pulse amplification ,” Optics Express 14 , 9277 (2006).
  65. E.A. Gibson, D.M. Gaudiosi, H.C. Kapteyn, R. Jimenez, S. Kane, R. Huff, C. Durfee, and J. Squier, “Efficient reflection grisms for pulse compression and dispersion compensation of femtosecond pulses ,” Optics Letters 31 , 3363 (2006).
  66. X.B. Zhou, H. Kapteyn, and M. Murnane, “Positive-dispersion cavity-dumped Ti: sapphire laser oscillator and its application to white light generation ,” Optics Express 14 , 9750 (2006).
  67. A. Sandhu, E. Gagnon, A. Paul, I. Thomann, A. Lytle, T. Keep, M. Murnane, and H. Kapteyn, “Generation of Isolated, Carrier-Envelope-Phase Insensitive, EUV pulses via Nonlinear Stabilization in a Waveguide ,” Physical Review A Rapid Communications 74 , 061803(R) (2006).
  68. E. Gagnon, I. Thomann, A. Paul, A.L. Lytle, S. Backus, M.M. Murnane, H.C. Kapteyn, and A.S. Sandhu, “Long term passive carrier-envelope phase stability from an ultrafast laser amplifier employing grating-based chirped-pulse amplification and cryogenic cooling ,” Optics Letters 31 , 1866 (2006).
  69. L. Miaja, G. Saathoff, T. Lei, M. Murnane, H. Kapteyn, M. Aeschlimann, and J. Gland, “Observation of the Laser-Assisted Photoelectric Effect on Pt (111) ,” Physical Review Letters 97 , 113604 (2006).
  70. J.J. Rocca, H.C. Kapteyn, D.T. Attwood, M.M. Murnane, C.S. Menoni, and E.H. Anderson, “Table-top lasers in the Extreme Ultraviolet bring new light to science and nanotechnology ,” Optics and Photonics News 24, (2006).
  71. P.W. Wachulak, M.G. Capeluto, M.C. Marconi, C.S. Menoni, and J.J. Rocca, “Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography ,” Optics Express 15 , 6, 3465 (2007).
  72. X. Zhang, A.L. Lytle, T. Popmintchev, X. Zhou, H.C. Kapteyn, M.M. Murnane, and O. Cohen, “Quasi-phase-matching and quantum-path control of high-harmonic generation using counterpropagating light ,” Nature Physics 3 , 3, doi:10.1038/nphys541 Published online: (2007).
  73. O. Cohen, T. Popmintchev, D.M. Gaudiosi, M.M. Murnane, and H.C. Kapteyn, “Unified Microscopic-Macroscopic Formulation of High-Order Difference-Frequency Mixing in Plasmas ,” Physical Review Letters 98 , 043903 (2007).
  74. R.I. Tobey, M.E. Siemens, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “Ultrafast Extreme Ultraviolet Holography: Dynamic Monitoring of Surface Deformation ,” Optics Letters 32 , 286 (2007).
  75. O. Cohen, T. Popmintchev, D.M. Gaudiosi, M.M. Murnane, and H.C. Kapteyn, “Longitudinal and temporal gating in phase-matching of high-order difference-frequency mixing in plasma ,” Physical Review Letters 98 , 043903 (2007).
  76. T. Liang, E. Ultanir, P. Zhang, S.-H. Guojing, E. Anderson, E. Gullikson, P. Naulleau, F. Salmassi, P. Mirkarimi, E. Spiller, S. Baker, “ Growth and Printability of Multilayer Phase Defects on EUV Mask Blanks,” J. Vac. Sci. Technol. B 25 , 2098 (2007).
  77. F. Salmassi, E.M. Gullikson, E.H. Anderson, P.P. Naulleau, “Multilayer Phase-Only Diffraction Gratings: Fabrication and Application to EUV Optics,” J. Vac. Sci. Technol B 25 , 2055 (2007).
  78. B.L. Mesler, P. Fischer, W. Chao, E.H. Anderson, “Soft x-ray imaging of spin dynamics at high spatial and temporal resolution,” J. Vac. Sci. Technol. B 25, 2598 (2007).
  79. E. Gullikson, D. Attwood, “Reference Data for the Extreme Ultraviolet Spectral Region,” SPIE Press, Bellingham WA, Extreme Ultraviolet Lithography by V. Bakshi, ed. (Nov 2007).
  80. C. Anderson, P. Naulleau, “Dual-Domain Scanning Illuminator for the Berkeley Micro Exposure Tool,” J. Vac. Sci. Technol B (2007).
  81. C.W. Blackledge, J.M. Szarko, A. Dupont, G.H. Chan, E.L. Read, and S.R. Leone, “Zinc oxide nanorod growth on gold islands prepared by microsphere lithography on silicon and quartz,” J. Nanosci. Nanotechnol. 7 , 3336 (2007).
  82. L. Gallmann, T. Pfeifer, M.J. Abel, P.M. Nagel, D.M. Neumark, and S.R. Leone, “Direct comparison of the hollow-core fiber and filamentation techniques for few-cycle pulse generation,” Ultrafast Phenomena XV, Springer Series in Chemical Physics 88 , 92 (2007).
  83. T. Pfeifer, L. Gallmann, M.J. Abel, P.M. Nagel, D.M. Neumark, and S.R. Leone, “Multi-cycle driven isolated attosecond pulse generation,” Ultrafast Phenomena XV, Springer Series in Chemical Physics 88 , 54 (2007).
  84. T. Pfeifer, L. Gallmann, M.J. Abel, D.M. Neumark, and S.R. Leone, “Phase-mask control and stabilization of optical filamentation,” Ultrafast Phenomena XV, Springer Series in Chemical Physics 88 , 65 (2007).
  85. L. Gallmann, T. Pfeifer, P.M. Nagel, M.J. Abel, D.M. Neumark, and S.R. Leone, “Comparison of the filamentation and the hollow-core fiber characteristics for pulse compression into the few-cycle regime,” Appl. Phys. B 86 , 561 (2007).
  86. F. Goulay, D.L. Osborn, C.A. Taatjes, P. Zou, G. Meloni, and S.R. Leone, “Direct detection of polyynes formation from the reaction of ethynyl radical (C 2 H) with propyne (CH 3 -CCH) and allene (CH 2 =C=CH 2 ),” Phys. Chem. Chem. Phys. 9 , 4291 (2007).
  87. D. Strasser, F. Goulay, M.S. Kelkar, E.J. Maginn, and S.R. Leone, “Photoelectron spectrum of isolated ion-pairs in ionic liquid vapor,” J. Phys. Chem. A 111 , 3191 (2007).
  88. C. Howle, A.N. Arrowsmith, V. Chikan, and S.R. Leone, “State-resolved dynamics of the CN(B 2 S + ) and CH(A 2 D ) excited products resulting from the VUV photodissociation of CH 3 CN,” J. Phys. Chem. A 111 , 6637 (2007).
  89. S.H. Lim, A.G. Caster, and S.R. Leone, “Fourier transform spectral interferometric coherent anti-Stokes Raman scattering (FTSI-CARS) spectroscopy,” Opt. Lett. 32 , 1332 (2007).
  90. E.A. Torres, E.W. Lerch, X. Dai, S. Gilb, and S.R. Leone, “N-level Li 2 multiphoton rotational wave packets: alignment effects in resonant multiphoton coherent excitation,” J. Chem. Phys. 126 , 044310 (2007).
  91. L. Belau, K.R. Wilson, S.R. Leone, and M. Ahmed, “Vacuum-ultraviolet photoionization studies of the microhydration of DNA bases (Guanine, Cytosine, Adenine, and Thymine),” J. Phys. Chem. A 111 , 7562 (2007).
  92. Z. Loh, M. Khalil, R.E. Correa, R. Santra, C. Buth, and S.R. Leone, “Quantum state-resolved probing of strong-field-ionized xenon atoms using femtosecond high-order harmonic transient absorption spectroscopy,” Phys. Rev. Lett. 98 , 143601 (2007).
  93. Y.E. Romanyuk, R.G. Dengel, L.V. Stebounova, and S.R. Leone, “Molecular beam epitaxy of InN dots on nitrided sapphire,” J. Crystal Growth 304 , 346, (2007).
  94. X. Dai, and S.R. Leone, “Control of wave packets in Li 2 by shaping the pump and probe pulses for a state-selected pump-probe analysis of the ionization continuum,” J. Chem. Phys. 127 , 014312 (2007).
  95. S.H. Lim, A.G. Caster, and S.R. Leone, “Single pulse interferometric coherent anti-Stokes Raman scattering (CARS),” SPIE Proceedings 6442 , 644205 (2007).
  96. R.I. Kaiser, L. Belau, S.R. Leone, M. Ahmed, Y. Wang, B.J. Braams, and J.M. Bowman, “A combined experimental and computational study on the ionization energies of the cyclic and linear C 3 H isomers,” Chem. Phys. Chem. 8 , 1236 (2007).
  97. Z.H. Kim, S.H. Ahn, B. Liu, and S.R. Leone, “Nanometer-scale dielectric imaging of semiconductor nanoparticles: size-dependent dipolar coupling and contrast reversal,” Nano Lett. 7 , 2258 (2007).
  98. L.V. Stebounova, Y.E. Romanyuk, D.X. Chen, and S.R. Leone, “Imaging of InGaN inhomogeneities using visible apertureless near-field scanning optical microscope,” J. Appl. Phys. 101 , 124306 (2007).
  99. K.R. Wilson, S. Zou, J. Shu, E. Rühl, S.R. Leone, G.C. Schatz, and M. Ahmed, “Size-dependent angular distributions of low energy photoelectrons emitted from NaCl nanoparticles,” Nano Lett. 7 , 2014 (2007).
  100. L.V. Stebounova, Y.E. Romanyuk, R.G. Dengel, and S.R. Leone, “Size-dependent near-field coupling observed from InN nanodots grown on nitrided sapphire,” Chem. Phys. Lett. 443 , 333 (2007).
  101. L. Belau, S.E. Wheeler, B.W. Ticknor, M. Ahmed, S.R. Leone, W.D. Allen, H.F. Schaefer III, and M.A. Duncan, “Ionization thresholds of small carbon clusters: tunable VUV experiments and theory,” J. Am. Chem. Soc. 129 , 10229 (2007).
  102. L. Belau, K.R. Wilson, S.R. Leone, and M. Ahmed, “Vacuum Ultraviolet (VUV) photoionization of small water clusters,” J. Phys. Chem. A 111 , 10075 (2007).
  103. K.L. Knappenberger, D.B. Wong, Y.E. Romanyuk, and S.R. Leone, “Excitation wavelength-dependence of fluorescence intermittency in CdSe/ZnS core shell quantum dots,” Nano Lett. 7 , 3869 (2007).
  104. K.L. Knappenberger, Jr., E.W. Lerch, P. Wen, and S.R. Leone, “Stark-assisted population control of coherent CS 2 4f and 5p Rydberg wavepacket dynamics studied by femtosecond time-resolved photoelectron spectroscopy,” J. Chem. Phys. 127 , 124318 (2007).
  105. T. Pfeifer, A. Jullien, M.J. Abel, P.M. Nagel, D.M. Neumark, and S.R. Leone, “Generating coherent broadband continuum soft-X-ray radiation by attosecond ionization gating,” Opt. Express 15 , 17120 (2007).
  106. G. Meloni, T.M. Selby, F. Goulay, S.R. Leone, D.L. Osborn, and C.A. Taatjes, “Photoionization of 1-alkenylperoxy and alkylperoxy radicals and a general rule for the stability of their cations,” J. Am. Chem. Soc. 129 , 14019 (2007).
  107. D. Strasser, F. Goulay, and S.R. Leone, “Transient photoelectron Spectroscopy of the dissociative Br 2 ( 1 P u ) state,” J. Chem. Phys. 127 , 84305 (2007).
  108. H. Merdji, T. Auguste, W. Boutu, J.P. Caumes, B. Carré, T. Pfeifer, A. Jullien, D.M. Neumark, and S.R. Leone, “Isolated attosecond pulses using a detuned second harmonic field,” Opt. Lett. 32 , 3134 (2007).
  109. P.W. Wachulak, M.G. Capeluto, M.C. Marconi, D. Patel, C.S. Menoni, and J.J. Rocca, “ Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with table top EUV lasers,” Journal of Vacuum Science and Technology 25 , 2094 (2007).
  110. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning,” Optics Express, 15 , 10622, (2007).
  111. M. Berrill, Y. Wang, M.A. Larotonda, B.M. Luther, V.N. Shlyaptsev, and J.J. Rocca, “Pump pulsewidth of grazing incidence pumped transient collisional soft x-ray lasers,” Physical Review A 75 , 063821 (2007).
  112. S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein, “Single Photon Ionization of Hydrogen Bonded Clusters with a Soft X-Ray Laser: (HCOOH) x and (HCOOH) y (H 2 o) z ,” Journal of Chemical Physics 126 , 244301 (2007).
  113. B.A. Reagan, T. Popmintchev, M.E. Grisham, D.M. Gaudiosi, M. Berrill, O. Cohen, B.C. Walker, M.M. Murnane, J.J. Rocca, and H.C. Kapteyn, “Enhanced High Harmonic Generation from Xe, Kr, and Ar in a Capillary Discharge,” Physical Review A 76 , 013816 (2007).
  114. M.G. Capeluto, P. Wachulak, M.C. Marconi, D. Patel, C.S. Menoni, J.J. Rocca, C. Iemmi, E.H. Anderson, W. Chao, and D.T. Attwood, “Table-top nanopatterning with extreme ultraviolet laser illumination,” Microelectronic Engineering 84 , 721 (2007).
  115. O. Cohen, A.L. Lytle, X. Zhang, M.M. Murnane, and H.C. Kapteyn, “Optimizing quasi-phase matching of high harmonic generation using counterpropagating pulse trains,” Optics Letters 32 , 2975 (2007).
  116. O. Cohen, X.S. Zhang, A.L. Lytle, T. Popmintchev, M.M. Murnane, and H.C. Kapteyn, “Grating-assisted phase matching in extreme nonlinear optics,” Physical Review Letters 99 , 053902 (2007).
  117. E. Gagnon, P. Ranitovic, X.M. Tong, C.L. Cocke, M.M. Murnane, H.C. Kapteyn, and A.S. Sandhu, “Soft X-ray-driven femtosecond molecular dynamics,” Science 317 , 1374 (2007).
  118. H. Kapteyn, O. Cohen, I. Christov, and M. Murnane, “Harnessing attosecond science in the quest for coherent X-rays,” Science 317 , 775 (2007).
  119. J.D. Koralek, J.F. Douglas, N.C. Plumb, J.D. Griffith, S.T. Cundiff, H.C. Kapteyn, M.M. Murnane, and D.S. Dessau, “Experimental setup for low-energy laser-based angle resolved photoemission spectroscopy,” Review of Scientific Instruments 78 , 053905 (2007).
  120. A.L. Lytle, X. Zhang, J. Peatross, M.M. Murnane, H.C. Kapteyn, and O. Cohen, “Probe of high-order harmonic generation in a hollow waveguide geometry using counterpropagating light,” Physical Review Letters 98 , 123904 (2007).
  121. S. Mathias, L. Miaja-Avila, M.M. Murnane, H. Kapteyn, M. Aeschlimann, and M. Bauer, “Angle-resolved photoemission spectroscopy with a femtosecond high harmonic light source using a two-dimensional imaging electron analyzer,” Review of Scientific Instruments 78 , 083105 (2007).
  122. R.L. Sandberg, A. Paul, D.A. Raymondson, S. Hadrich, D.M. Gaudiosi, J. Holtsnider, R.I. Tobey, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “Lensless diffractive imaging using tabletop coherent high-harmonic soft-x-ray beams,” Physical Review Letters 99 , 098103 (2007).
  123. P.W. Wachulak, C.A. Brewer, F. Brizuela, C.S. Menoni, W. Chao, E.H. Anderson, R.A. Bartels, J.J. Rocca, and M.C. Marconi, “Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method,” Journal of the Optical Society of America B (Online Feb. 7, 2008).
  124. F. Pedaci, Y. Wang, M. Berrill, B. Luther, E. Granados, and J.J. Rocca, “Highly coherent injection-seeded 13.2 nm table-top soft x-ray laser,” Optics Letters, doc. ID 90055 (Online 28 January 2008).
  125. M. Berrill, F. Brizuela, B. Langdon, H. Bravo, C.S. Menoni, and J.J. Rocca, “ Warm Photoionized Plasmas Created by Soft X-Ray Laser Irradiation of Solid Targets,” Journal of the Optical Society of America B (Online Feb. 25, 2008).
  126. Z. H. Kim, and S.R. Leone, “Polarization-selective mapping of near-field intensity and phase around gold nanoparticles using apertureless near-field microscopy,” Opt. Express 16 , 1733 (2008).
  127. C.A. Brewer, F. Brizuela, P. Wachulak, D.H. Martz, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artyukov, A.G. Ponomareko, V.V. Kondratenko, M.C. Marconi, J.J. Rocca, and C.S. Menoni, “Single shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Optics Letters, doc. ID 90919, (posted 4 February 2008).
  128. C.N. Anderson, P. Naulleau, “Sensitivity study of reliable, high-through-put resolution metrics for photoresists,” Appl. Opt., Feb. (2008).
  129. R.L. Sandberg, C. Song, P.W. Wachulak, D.A. Raymondson, A. Paul, B. Amirbekian, E. Lee, A.E. Sakdinawat, C. La-O-Vorakiat, M.C. Marconi, C.S. Menoni, M.M. Murnane, J.J. Rocca, H.C. Kapteyn, and J. Miao , “High Numerical Aperture Table Top Soft X Ray Diffraction Microscopy with 70 nm Resolution,” Proceedings of the National Academy of Science 105 , 24 (2008).
  130. F.G. Tomasel, V.N. Shlyaptsev, and J.J. Rocca, “Spectroscopically pure metal vapor source for highly charged ion spectroscopy and capillary discharged soft x-ray lasers,” Review of Scientific Instruments 79 , 013503 (2008).
  131. F. Dong, S. Heinbuch, Y. Xie, J.J. Rocca, E.R. Bernstein, Zhe-Chen Wang, K. Deng, and S.-G. He, “Experimental and Theoretical Study of the reactions between neutral vanadium oxide clusters and ethane, ethylene, and acetylene,” Journal of the American Chemical Society 130 , 1932 (2008).
  132. Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J.J. Rocca, “ Phase coherent table top soft x-ray lasers at 18.9 nm and 13.9 nm by saturated amplification of high harmonic pulses in Nickel-like ions,” Nature Photonics 2 , 94 (2008).
  133. J.K. Song, U. Willer, J.M. Szarko, S.R. Leone, S. Li, and Y. Zhao, “Ultrafast upconversion probing of lasing dynamics in single ZnO nanowire lasers,” J. Phys. Chem. C 112 , 1679 (2008).
  134. S.-G. He, Y. Xie, F. Dong, S. Heinbuch, E. Jakubikova, J.J. Rocca, and E.R. Bernstein, “Reactions of Sulfur Dioxide with Neutral Vanadium Oxide Clusters in the Gas Phase. I. Experimental Study Employing Single Photon Ionization,” Journal of Physical Chemistry A 112 , 11067 (2008).
  135. Z.-C. Wang, W. Xue, Y.-P. Ma, X.-L. Ding, S.-G. He, F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Partial Oxidation of Propylene Catalyzed by VO 3 Clusters: A Density Functional Theory Study,” J. Phys. Chem. A 112 , 5984 (2008).
  136. S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein, “Gas phase study of the reactivity of optical coating materials with hydrocarbons bye use of a desk-top size extreme ultra-violet laser,” Journal of the Optical Society of America B 25 , B85 (2008).
  137. P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J.J Rocca, C.S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” Journal of the Optical Society of America B, 25 , B104 (2008).
  138. P.W. Wachulak, M.G. Capeluto, C.S. Menoni, J.J. Rocca, and M.C. Marconi, “Nanopatterning in a compact setup using table top extreme ultraviolet lasers,” Opto-Electronics Review 16 , 444 (2008).
  139. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “Soft x-ray laser holography with wavelength resolution,” Journal of the Optical Society of America B 25 , 1811 (2008).
  140. T. Popmintchev, M.-C. Chen, O. Cohen, M.E. Grisham, J.J. Rocca, M.M. Murnane, and H.C. Kapteyn, “Extended phase matching of high harmonics driven by mid-infrared light,” Optics Letters 33 , 2128 (2008).
  141. Y. Wang, F. Pedaci, M. Berrill, D. Alessi, E. Granados, B.M. Luther, and J.J. Rocca, “Phase-Coherent Injection-Seeded Soft X-Ray Lasers at Wavelengths Down to 13.2 nm,” Optics and Photonics News, “Optics in 2008,” 19 , 29 (2008).
  142. A. Bahabad, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “Quasi-phase-matching and dispersion characterization of harmonic generation in the perturbative regime using counter propagating beams,” Optics Express 16 , 15923 (2008).
  143. A. Bahabad, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “Quasi-periodic and random quasi-phase matching of high harmonic generation,” Optics Letters 33 , 1936 (2008).
  144. O. Cohen, L. F. Chong, T. Schwartz, T. Popmintchev, M.M. Murnane, and H.C. Kapteyn, “Talbot solutions,” Optics Letters 33 , 830 (2008).
  145. W. Li, X. B. Zhou, R. Lock, S. Patchkovskii, A. Stolow, H.C. Kapteyn, and M.M. Murnane, “Time-Resolved Dynamics in N2O4 Probed Using High Harmonic Generation,” Science 322 , 1207 (2008).
  146. A.L. Lytle, X.S. Zhang, R.L. Sandberg, O. Cohen, H.C. Kapteyn, and M.M. Murnane, “Quasi-phase matching and characterization of high-order harmonic generation in hollow waveguides using counter propagating light,” invited paper, Optics Express, 16 , 6544 (2008).
  147. L. Miaja-Avila, G. Saathoff, S. Mathias, J. Yin, C. La-o-vorakiat, M. Bauer, M. Aeschlimann, M.M. Murnane, and H.C. Kapteyn, “Direct measurement of core-level relaxation dynamics on a surface-adsorbate system,” Physical Review Letters 101 , 046101 (2008).
  148. A.S. Sandhu, E. Gagnon, R. Santra, V. Sharma, W. Li, P. Ho, P. Ranitovic, C.L. Cocke, M.M. Murnane, and H.C. Kapteyn, “Observing the Creation of Electronic Feshbach Resonances in Soft X-ray-Induced O-2 Dissociation,” Science 322 , 1081 (2008).
  149. I. Thomann, E. Gregonis, X. Liu, R. Trebino, A.S. Sandhu, M.M. Murnane, and H.C. Kapteyn, “Temporal characterization of attosecond wave forms in the sub-optical-cycle regime,” Physical Review A 78 , 011806 (2008).
  150. I. Thomann, R. Lock, V. Sharma, E. Gagnon, S.T. Pratt, H.C. Kapteyn, M.M. Murnane, and W. Li, “Direct measurement of the angular dependence of the single-photon ionization of aligned N-2 and CO2,” Journal of Physical Chemistry A 112 , 9382 (2008).
  151. I. Thomann, E. Gregonis, A.S. Sandhu, M.M. Murnane, and H.C. Kapteyn, “Temporal characterization of tunable EUV pulses in the sub-optical-cycle regime with FROGCRAB,” Physical Review A 78 , 011806 (2008).
  152. E. Gagnon, A. Paul, A. Czasch, T. Jahnke, K. Hagen, B. Walker, P. Ranitovic, C.L. Cocke, M.M. Murnane, H.C. Kapteyn, and A.S. Sandhu, “Time-resolved momentum imaging system for molecular dynamics studies using a tabletop ultrafast extreme-ultraviolet light source,” Review of Scientific Instruments 79 , 063102 (2008).
  153. G. Saathoff, L. Miaja, M. Murnane, H. Kapteyn, and M. Aeschlimann, “Observation of the Laser-Assisted Photoelectric Effect on Pt(111) ,” Physical Review A 77 , 022903 (2008).
  154. S. Mangin, T. Hauet, P. Fischer, D.H. Kim, J.B. Kortright, K. Chesnel, E. Arenholz and E.E. Fullerton, “ Influence of interface exchange coupling in perpendicular anisotropy [Pt /Co]50/TbFe bilayers,” Physical Review B 78 , 024424 (2008).
  155. M.T. Bryan, P. W. Fry, P.J. Fischer, and D. Attwood, “Observation of field-induced do main wall propagation in magnetic nanowires by magnetic transmission x-ray m icroscopy,” Journal of Applied Physics, 103 , 07D909 (2008).
  156. M.-Y. Im, S.-H. Lee, D.-H. Kim, P. Fischer, and S.-C. Shin, “Scaling Behavior of the First Arrival Time of a Random-Walking Magnetic Domain,” Physical Review Letters 100 , 167204 (2008).
  157. T. Hauet, C. Gunther, O. Hovorka, A. Berger, M.-Y. Im, P. Fischer, and O. Hellwig, “Field driven ferromagnetic phase nucleation and propagation from the domain boundaries in antiferromagnetically coupled perpendicular anisotropy films,” Applied Physics Letters 93 , 042505 (2008).
  158. S. Kasai, P. Fischer, M.-Y. Im, K. Yamada, Y. Nakatani, K. Kobayashi, H. Kohno, and T. Ono, “Probing the spin polarization of current by soft X-ray imaging of current-induced magnetic vortex dynamics,” Physical Review Letters 101 , 237203 (2008).
  159. F. Kronast, R. Ovsyannikov, A. Kaiser, C. Wiemann, S.-H. Yang, A. Locatelli, D.E. Burgler, R. Schreiber, F. Salmassi, P. Fischer, H.A. Burr, C.M. Schneier, W. Eberhardt, and C.S. Fadley, “Dept-resolved soft x-ray photoelectron emission microscopy in nanostructures via standing-wave excited photoemission,” Applied Physics Letters 93 , 243116 (2008).
  160. L. Bocklage, B. Kruger, R. Eiselt, M. Bolte, P. Fischer, and G. Meier, “Time-resolved imaging of current-induced domain-wall oscillations,” Physical Review B 78 , 180405 (2008).
  161. K.A. Goldberg, P. Naulleau, I. Mochi, E.H. Anderson, S.B. Rekawa, C.D. Kemp, R.F. Gunion, H.-S. Han, and S. Huh, “Actinic EUV mask inspection beyond 0.25 NA,” Journal of Vacuum Science and Technology B 25 , 2220 (2008).
  162. K.-S. Lee, S.-K. Kim, Y.-S. Yu, Y.-S. Choi, K.-Y. Guslienko, H. Jung, and P. Fischer, “The universal criterion for switching a magnetic vortex core in soft magnetic nanodots,” Physical Review Letters 101 , 267206 (2008).
  163. S. Marchesini, S. Boutet, A. Sakdinawat, M.J. Bogan, S. Bajt, A. Barty, H.N. Chapman, M. Frank, S. P. Hau-Riege, A. Szoke, C. Cui, D.A. Shapiro, M.R. Howells, J.C.H. Spence, J. W. Shaevitz, J.Y. Lee, J. Hajdu, and M.M. Seibert, “Massively parallel x-ray holography,” Nature Photonics 2 , 560 (2008).
  164. E. Goulielmakis, M. Schultze, M. Hofstetter, V.S. Yakovlev, J. Gagnon, M. Uiberacker, A.L. Aquila, E.M. Gullikson, D.T. Attwood, R. Kienberger, F. Krausz, and U. Kleineberg, “Single-cycle nonlinear optics,” Science 320 , 1614 (2008).
  165. T. Hauet, C.M. Gunther, B. Pfau, M.E. Schabes, J.-U. Thiele, R.L. Rick, P. Fischer, S. Fisebitt, and O. Hellwig, “Direct observation of field and temperature induced domain replication in dipolar coupled perpendicular anisotropy films,” Physical Review B 77, 184421 (2008).
  166. M.-Y. Im, D.-H. Kim, K.-D. Lee, S.-H Lee, P. Fischer, and S.-C. Shin, “Direct real-space observation of nearly stochastic behavior in magnetization reversal process on a nanoscale,” Advanced Materials 20 , 1750 (2008).
  167. A. Aquila, F. Salmassi, and E.M. Gullikson, “Metrologies for the phase characterization of attosecond EUV optics,” Optics Letters 33 , 455 (2008).
  168. A. Sakdinawat, and Y. Liu, “Phase contrast soft x-ray microscopy using Zernike zone plates,” Optics Express 16 , 1559 (2008).
  169. P. Fischer, “Studying nanoscale magnetism and its dynamics with soft X-ray microscopy,” IEEE Transactions on Magnetics 44 , 1900 (2008).
  170. M.E. Siemens, Q. Li, M.M. Murnane, H.C. Kapteyn, R. Yang, E. Anderson, and K. Nelson, “High-Frequency Surface Acoustic Wave Propagation in Nanostructures Characterized by Coherent Extreme Ultraviolet Beams,” Applied Physics Letters 94 , 093103 (2009).
  171. Y. Wang, M. Berrill, F. Pedaci, M.M. Shakya, S. Gilbertson, Z. Chang , E. Granados, B.M. Luther, M.A. Larotonda, and J.J. Rocca, “ Measurement of 1 Picosecond Soft X-Ray Laser Pulses from an Injection-Seeded Plasma Amplifier,” Physical Review A 79 , 023810 (2009).
  172. F. Brizuela, Y. Wang, C.A. Brewer, F. Pedaci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P. Naulleau, P. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, and C.S. Menoni, “ Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination ,” Optics Letters 34 , 271 (2009).
  173. Y. Xie, F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Investigation of the Reactions of Small Neutral Iron Oxide Clusters with Methanol,” J. Chem. Phys. 130 , 114306 (2009).
  174. F. Dong, S. Heinbuch, Y. Xie, E.R. Bernstein, J.J. Rocca, Z. Wang, X. Ding, and S.G. He, “C=C bond cleavage on neutral VO 3 (V 2 O 5 ) n Clusters,” Journal of the American Chemical Society 131 , 1057 ( 2009) .
  175. I. Thomann, A. Bahabad, R. Trebino, M.M. Murnane and H.C. Kapteyn, “Characterizing isolated attosecond pulses from hollow-core waveguides using multi-cycle driving pulses,” Optics Express 17 , 4611 (2009).
  176. P. Naulleau, C.N. Anderson, J. Chiu, K. Dean, P. Denham, K.A. Goldberg, B. Hoef, G. Jones, B. La Fontaine, D. Niakoula, and T. Wallow, “Latest results from the SEMATECH Berkeley extreme ultraviolet microfield exposure tool,” J. Vac. Sci. Technol. B 27 , 66 (2009).
  177. L. Miaja-Avila, J. Yin, S. Backus, G. Saathoff, M. Aeschlimann, M.M. Murnane, and H.C. Kapteyn, “Ultrafast studies of electronic processes at surfaces using the laser-assisted photoelectric effect with long-wavelength dressing light,” Phys. Rev. A 79 , 030901 (2009).
  178. V.S. Harutyunyan, A.P. Kirchheim, P.J.M. Monteiro, A.P. Aivazyan, and P. Fischer, “Investigation of early growth of calcium hydroxide crystals in cement solution by soft x-ray transmission microscopy,” Journal of Material Science 44 , 962 (2009).
  179. C.N. Anderson, and P. Naulleau, “Deprotection blur in extreme ultraviolet photoresists: Influence of base loading and post-exposure bake temperature,” Journal of Vacuum Science and Technology B 27 , 6 (2009).
  180. W. Chao, J. Kim, S. Rekawa, P. Fischer, E.H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Exp. 17 , 17669 (2009).
  181. W. Chao, J. Kim, S. Rekawa, P. Fischer, E.H. Anderson, “HSQ double patterning process for 12 nm resolution x-ray zone plates,” J. Vac. Sci. Technol. B 27 , 2606 (2009).
  182. A. Aquila, F. Salmassi, Y. Liu, E.M. Gullikson, “Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light,” Opt. Exp. 17 , 22102 (2009).
  183. D.H. Martz, H.T. Nguyen, D. Patel, J.A. Britten, D. Alessi, E. Krous, Y. Wang, M.A. Larotonda, J. George, B. Knollenberg, B.M. Luther, J.J. Rocca, and C.S. Menoni, “Large area high efficiency broad bandwidth 800 nm dielectric gratings for high energy laser pulse compression,” Optics Express 17 , 23809 (2009).
  184. F. Furch, B. Reagan, B. Luther, A. Curtis, S. Meehan, and J. Rocca, “Demonstration of an all-diode-pumped soft x-ray laser,” Optics Letters 34 , 3352 (2009).
  185. A. Isoyan, F. Jiang, Y.C. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot Lithography: Self-Imaging of Complex Structures,” J. Vac. Sci. Technology B 27 , 2931 (2009).
  186. Y.P. Pershyn, E.N. Zubarev, D.L. Voronov, V.A. Sevryukova, V.V. Kondratenko, G. Vaschenko, M. Grisham, C.S. Menoni, J.J. Rocca, I.A. Artioukov, Y.A Uspenskii , and A.V. Vinogradov , “ Mechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiation,” J. Phys. D: Appl. Phys. 42 , 125407 (2009).
  187. P.W. Wachulak, L. Urbanski, M.G. Capeluto, D. Hill, W.S. Rockward, C. Iemmi, E.H. Anderson, C.S. Menoni, J.J. Rocca, and M.C. Marconi, “New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers,” J. Micro/Nanolith. MEMS MOEMS 8 , 021206 (2009).
  188. C. La-O-Vorakiat, M. Siemens, M.M. Murnane, H.C. Kapteyn, S. Mathias, M. Aeschlimann, P. Grychtol, R. Adam, C.M. Schneider, J.M. Shaw, H. Nembach, and T.J. Silva, “Ultrafast Demagnetization Dynamics at the M Edges of Magnetic Elements Observed Using a Tabletop High-Harmonic Soft X-Ray Source,” Physical Review Letters 103 , 257402/1-4 (2009).
  189. R.M. Lock, X.B. Zhou, W. Li, M.M. Murnane, and H.C. Kapteyn, “Measuring the intensity and phase of high-order harmonic emission from aligned molecules,” Chemical Physics 366 , 22 (2009).
  190. P. Arpin, T. Popmintchev, N.L. Wagner, A.L. Lytle, O. Cohen, H.C. Kapteyn, and M.M. Murnane, “Enhanced High Harmonic Generation from Multiply Ionized Argon above 500 eV through Laser Pulse Self-Compression,” Physical Review Letters 103 , 143901/1-4 (2009).
  191. M.C. Chen, M.R. Gerrity, S. Backus, T. Popmintchev, X. Zhou, P. Arpin, X. Zhang, H.C. Kapteyn, and M.M. Murnane, “Spatially coherent, phase matched, high-order harmonic EUV beams at 50 kHz,” Optics Express 17 , 17376 (2009).
  192. R.L. Sandberg, D.A. Raymondson, C. La-o-Vorakiat, A. Paul, K.S. Raines, J. Miao, M.M. Murnane, H C. Kapteyn, and W.F. Schlotter, “Tabletop soft-x-ray Fourier transform holography with 50 nm resolution,” Optics Letters 34 , 1618 (2009).
  193. T. Popmintchev, M.C. Chen, A. Bahabad, M. Gerrity, P. Sidorenko, O. Cohen, I.P. Christov, M.M. Murnane, and H.C. Kapteyn, “Phase matching of high harmonic generation in the soft and hard X-ray regions of the spectrum,” Proceedings Of The National Academy Of Sciences 106 , 10516 (2009).
  194. X.B. Zhou, R. Lock, N. Wagner, W. Li, H.C. Kapteyn, and M.M. Murnane, “Elliptically Polarized High-Order Harmonic Emission from Molecules in Linearly Polarized Laser Fields,” Physical Review Letters 102 , 073902 (2009).
  195. A.J. Trevitt, F. Goulay, G. Meloni, D.L. Osborn, C.A. Taatjes, and S.R. Leone, “Isomer-specific product detection of CN radical reactions with ethane and propene by tunable VUV photoionization mass spectrometry,” Int. J. Mass. Spectrom. 280 , 113 (2009).
  196. F. Goulay, A.J. Trevitt, G. Meloni, T.M. Selby, D.L. Osborn, C.A. Taatjes, L. Vereecken, and S.R. Leone, “Cyclic versus linear isomers produced by reaction of the methylidyne radical (CH) with small unsaturated hydrocarbons,” J. Am. Chem. Soc. 131 , 993 (2009).
  197. L.H. Haber, B. Doughty, and S.R. Leone, “Continuum phase shifts and partial cross sections for photoionization from excited states of atomic helium measured by high-order harmonic optical pump-probe velocity map imaging,” Phys. Rev. A 79 , 031401 (2009).
  198. Y.E. Romanyuk, D. Krier, Y. Cui, K.M. Yu, J.W. Ager III, S.R. Leone, “Molecular beam epitaxy of InGaN thin films on Si (111): effect of substrate nitridation,” Thin Solid Films 517 , 6512 (2009).
  199. J.W. Ager III, L.A. Reichertz, Y. Cui, Y.E. Romanyuk, D. Kreier, S.R. Leone, K.M. Yu, W.J. Schaff, and W. Walukiewicz, “Electrical properties of InGaN- Si heterojunctions,” Phys. Status Solidi C 6 , S413 (2009).
  200. M.J. Abel, T. Pfeifer, A. Jullien, P.M. Nagel, M.J. Bell, D.M. Neumark, and S.R. Leone, “Carrier-envelope phase-dependent quantum interferences in multiphoton ionization,” J. Phys. B: At. Mol. Opt. Phys. 42 , 075601 (2009).
  201. A.G. Caster, S. Kowarik, A.M. Schwartzberg, O. Nicolet, S.H. Lim, and S.R. Leone, “Observing hydrogen silsesquioxane cross-linking with broadband CARS,” J. Raman Spectrosc. 40 , 770 (2009).
  202. L.K. Takahashi, J. Zhou, K.R. Wilson, S.R. Leone, and M. Ahmed, “Imaging with mass spectrometry: a secondary ion and VUV-photoionization study of ion-sputtered atoms and clusters from GaAs and Au,” J. Phys. Chem. A 113 , 4035 (2009).
  203. J.D. Smith, J.H. Kroll, C.D. Cappa, D.L. Che, C.L. Liu, M. Ahmed, S.R. Leone, D.R. Worsnop, and K.R. Wilson, “The heterogeneous reaction of hydroxyl radicals with sub-micron squalane particles: a model system for understanding the oxidative aging of ambient aerosols,” Atmos. Chem. Phys. 9 , 3209 (2009).
  204. Y. Abate, A. Schwartzberg, D. Strasser, and S.R. Leone, “Nanometer-scale size dependent imaging of cetyl trimethyl ammonium bromide (CTAB) capped and uncapped gold nanoparticles by apertureless near-field optical microscopy,” Chem. Phys. Lett. 474 , 146 (2009).
  205. T. Pfeifer, M.J. Abel, P.M. Nagel, W. Boutu, M.J. Bell, Y. Liu, D.M. Neumark, and S.R. Leone, “Measurement and optimization of isolated attosecond pulse contrast,” Opt. Lett. 34 , 1819 (2009).
  206. O. Kostko, S.K. Kim, S.R. Leone, and M. Ahmed, “Mass-analyzed threshold ionization (MATI) spectroscopy of atoms and molecules using VUV synchrotron radiation,” J. Phys. Chem. A 113 , 14206 (2009).
  207. D.L. Che, J.D. Smith, S.R. Leone, M. Ahmed, and K.R. Wilson, “Quantifying the reactive uptake of OH by organic aerosols in a continuous flow stirred tank reactor,” Phys. Chem. Chem. Phys. 11 , 7885 (2009).
  208. L.H. Haber, B. Doughty, S.R. Leone, “Photoelectron angular distributions and cross section ratios of two-color two-photon above threshold ionization of argon,” J. Phys. Chem. A 113 , 13152 (2009).
  209. M.J. Abel, T. Pfeifer, P.M. Nagel, W. Boutu, M.J. Bell, C.P. Steiner, D.M. Neumark, and S.R. Leone, “Isolated attosecond pulses from ionization gating of high-harmonic emission,” Chem. Phys. 366 , 9 (2009).
  210. Y. Ogawa, S. Takahashi, F. Minami, Y. Abate, S.R. Leone, and A.V. Baranov, “Nanometer-scale dielectric constant of Ge quantum dots using apertureless near-field scanning optical microscopy,” Appl. Phys. Lett. 96 , 063107 (2010).
  211. S. Soorkia, A.J. Trevitt, T.M. Selby, D.L. Osborn, C.A. Taatjes, K.R. Wilson, and S.R. Leone, “Reaction of the C 2 H radical with 1-butyne (C 4 H 6 ): low temperature kinetics and isomer-specific product detection,” J. Phys. Chem. A 114 , 3340 (2010).
  212. O. Kornilov, C.C. Wang, A. Healy, M. Leonard, C. Peng, S.R. Leone, D.M. Neumark, and O. Gessner, “Ultrafast dynamics in Helium nanodroplets probed by femtosecond time-resolved EUV photoelectron imaging,” J. Phys. Chem. A 114 , 1437 (2010).
  213. S.D. Chambreau, G.L. Vaghjiani, A. To, C. Koh, D. Strasser, O. Kostko, and S.R. Leone, “Heats of vaporization of room temperature ionic liquids by tunable vacuum ultraviolet photoionization,” J. Phys. Chem. B 114 , 1361 (2010).
  214. A.J. Trevitt, F. Goulay, C.A. Taatjes, D L. Osborn, and S.R. Leone, “Reactions of the CN radical with benzene and toluene: product detection and low temperature kinetics,” J. Phys. Chem. A, 114 , 1749 (2010).
  215. D. Strasser, F. Goulay, L. Belau, O. Kostko, C. Koh, S.D. Chambreau, G. Vaghjiani, M. Ahmed, and S.R. Leone, “Tunable wavelength soft Photoionization of ionic liquid vapors,” J. Phys. Chem. A 114 , 879 (2010).
  216. P. Ranitovic, X.-M. Tong, B. Gramkow, S. De, B. DePaola, K.P. Singh, W. Cao, M. Magrakvelidze, D. Ray, I. Bocharova, H. Mashiko, A. Sandhu, E. Gagnon, M.M. Murnane, H.C. Kapteyn, I. Litvinyuk and C.L. Cocke, “IR-Assisted Ionization of Helium by Attosecond XUV Radiation,” New Journal of Physics 12 , 013008 (2010).
  217. K.S. Raines, S. Salha, R.L. Sandberg, H.D. Jiang, J.A. Rodriguez, B.P. Fahimian, H.C. Kapteyn, J.C. Du, and J.W. Miao, “Three-dimensional structure determination from a single view,” Nature 463 , 214 (2010).
  218. D. Alessi, D.H. Martz, Y. Wang, M. Berrill, B.M. Luther, and J.J. Rocca, “1 Hz Operation of a Gain-Saturated 10.9 nm Table-Top Laser in Nickel-like Te,” Optics Letters 35 , 414 (2010).
  219. M.E. Siemens, Q. Li, R. G. Yang, K.A. Nelson, E.H. Anderson, M.M. Murnane, and H.C. Kapteyn, “Quasi-ballistic thermal transport from nanoscale interfaces observed using ultrafast coherent soft X-ray beams,” Nature Materials 9 , 26 (2010).
  220. Y. Xie, F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Oxidation reactions on neutral cobalt oxide clusters: experimental and theoretical studies,” Phys. Chem. Chem. Phys. 12 , 947 (2010).
  221. B. Mesler, K. Buchanan, Mi-Y. Im, E. H. Anderson, P. Fischer, “Magnetic soft x-ray imaging of vortex core dynamics,” JVST B 28 , 198 (2010).
  222. D. Alessi, D.H. Martz, Y. Wang, M. Berrill, B.M. Luther and J.J. Rocca, "Gain-saturated 10.9 nm tabletop laser operating at 1 hz repetition rate." Opt. Lett. 35 , 414 (2010)
  223. M. Berrill, D. Alessi, Y. Wang, S.R. Domingue, D.H. Martz, B.M. Luther, Y.W. Liu and J.J. Rocca, "Improved beam characteristics of solid-target soft x-ray laser amplifiers by injection seeding with high harmonic pulses." Opt. Lett. 35 , 2317 (2010)
  224. F. Brizuela, S. Carbajo, A. Sakdinawat, D. Alessi, D.H. Martz, Y. Wang, B. Luther, K.A. Goldberg, I. Mochi, D.T. Attwood, B. La Fontaine, J.J. Rocca and C.S. Menoni, "Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks." Opt. Express 18 , 14467 (2010)
  225. F. Dong, S. Heinbuch, Y. Xie, J.J. Rocca and E.R. Bernstein, "Experimental and theoretical study of neutral almcn and almcnhx clusters." Phys. Chem. Chem. Phys. 12 , 2569 (2010)
  226. J. Dunn, R.A. London, K.V. Cone, J.J. Rocca and N. Rohringer, "Design and measurement of a cu l-edge x-ray filter for free electron laser pumped x-ray laser experiments." Review of Scientific Instruments 81 (2010)
  227. S. Heinbuch, F. Dong, J.J. Rocca and E.R. Bernstein, "Experimental and theoretical studies of reactions of neutral vanadium and tantalum oxide clusters with no and nh3." J. Chem. Phys. 133 (2010)
  228. M.C. Marconi and P.W. Wachulak, "Extreme ultraviolet lithography with table top lasers." Progress in Quantum Electronics 34 , 173 (2010)
  229. D.H. Martz, D. Alessi, B.M. Luther, Y. Wang, D. Kemp, M. Berrill and J.J. Rocca, "High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped ti:Sapphire laser." Opt. Lett. 35 , 1632 (2010)
  230. J.J. Rocca, "Compact plasma-based soft x-ray lasers." IEEE Photonics Journal 2 , 217 (2010)
  231. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni and J.J. Rocca, "Holographic imaging with a nanometer resolution using compact table-top EUV laser." Opto-Electron. Rev. 18 , 80 (2010)
  232. P.W. Wachulak, M.C. Marconi, C.S. Menoni, J.J. Rocca, H. Fiedorowicz and A. Bartnik, "Imaging and patterning on nanometer scale using coherent EUV light." Acta Physica Polonica A 117 , 403 (2010)
  233. Y. Xie, F. Dong, S. Heinbuch, J.J. Rocca and E.R. Bernstein, "Oxidation reactions on neutral cobalt oxide clusters: Experimental and theoretical studies." Phys. Chem. Chem. Phys. 12 , 947 (2010)
  234. T. Popmintchev, M.C. Chen, P. Arpin, M.M. Murnane, and H.C. Kapteyn, "The attosecond nonlinear optics of bright coherent X-ray generation," Nature Photonics 4 , 822 (2010). Cover Illustration.
  235. M.C. Chen, P. Arpin, T. Popmintchev, M. Gerrity, B. Zhang, M. Seaberg, D. Popmintchev, M.M. Murnane, and H. C. Kapteyn, "Bright, Coherent, Ultrafast Soft X-Ray Harmonics Spanning the Water Window from a Tabletop Light Source," Physical Review Letters 105 , 173901 (2010). Cover Illustration.
  236. P. Sidorenko, M. Kozlov, A. Bahabad, T. Popmintchev, M. Murnane, H. Kapteyn, and O. Cohen, "Sawtooth grating-assisted phase-matching," Optics Express 18 , 22686 (2010).
  237. A. Bahabad, M. M. Murnane, and H. C. Kapteyn, "Quasi-phase-matching of momentum and energy in nonlinear optical processes," Nature Photonics 4 , 570 (2010).
  238. I. McKinnie, H. Kapteyn, "Ultrafast lasers yield X-rays", Nature Photonics 4 , 149 (2010).
  239. E. Goulielmakis, Z.-H. Loh, A. Wirth, R. Santra, M. Rohringer, V. S. Yakovlev, S. Zherebtsov, T. Pfeifer, A. M. Azzeer, M. F. Kling, S. R. Leone, and F. Krausz, "Real-time observation of valence electron motion," Nature 466 , 739 (2010).
  240. M. J. Abel, D. M. Neumark, S. R. Leone, and T. Pfeifer, "Classical and quantum control of electrons using the carrier-envelope phase of strong laser fields," Laser Photonics Rev. 25 , 1 (2011).
  241. A. G. Caster, S. Kowarik, A. M. Schwartzberg, and S. R. Leone, "Quantifying reaction spread and x-ray exposure sensitivity in hydrogen silsesquioxane latent resist patterns with x-ray spectromicroscopy," J. Vac. Sci. Technol. B. 28 , 1304 (2010).
  242. S. Kowarik, K. Broch, A. Hinderhofer, A. Schwartzberg, J. O. Osso, D. Kilcoyne, F. Schreiber, and S. R. Leone, "Crystal grain orientation in organic homo- and heteroepitaxy of pentacene and perfluoropentacene studied with x-ray spectromicroscopy," J. Phys. Chem. C 114 , 13061 (2010).
  243. A.Sakdinawat and D. Attwood, “Nanoscale X-ray imaging,” Nat. Photonics 4 (12), 840–848 (2010).
  244. S. Hau-Reige, S. Boutet, A. Barty, S. Bajt, M. Bogan, M. Frank, J. Andreasson, B. Iwan, M.M. Seibert, J.Hajdu, A. Sakdinawat, J. Schulz, R.Treusch, and H. Chapman, “Sacrificial Tamper Slows Down Sample Explosion in FLASH Diffraction Experiments,” Phys. Rev. Lett. 104 , 064801 (2010).
  245. T. Rohwer, S. Hellmann, M. Wiesenmayer, C. Sohrt, A. Stange, B. Slomski, A. Carr, Y. Liu, L. Miaja Avila, M. Kalläne, S. Mathias, L. Kipp, K. Rossnagel and M. Bauer, "Collapse of long-range charge order tracked by time-resolved photoemission at high momenta", Nature 471, 7339 490 (2011).
  246. P. Ranitovic, X. M. Tong, C. W. Hogle, X. Zhou, Y. Liu, N. Toshima, M. M. Murnane, and H. C. Kapteyn,  “Laser-Enabled Auger Decay in Rare-Gas Atoms”, Phys. Rev. Lett. 106 , 053002 (2011).
  247. T. K. Allison, T. W. Wright, A. M. Stooke, C. Khurmi, J. van Tilborg, Y. Liu, R. W. Falcone, and A. Belkacem, "Femtosecond spectroscopy with vacuum ultraviolet pulse pairs," Opt. Lett. 35 , 3664-3666 (2010).
  248. B.M. McClinton and P.P. Naulleau, "Mask-roughness-induced line-edge roughness: Rule of thumb." J. Micro-Nanolithogr. MEMS MOEMS 9 (2010)
  249. P. Ranitovic, X. M. Tong, C. W. Hogle, X. Zhou, Y. Liu, N. Toshima, M. M. Murnane, and H. C. Kapteyn, "Laser Enabled Auger Decay in Rare Gas Atoms," Physical Review Letters Volume: 106 Issue: 5 Article Number: 053002
  250. A. Picón, A. Bahabad, H.C. Kapteyn, M.M. Murnane, and A. Becker, “Two-center interferences in photoionization of a dissociating H-2(+) molecule” Physical Review A Volume: 83 Issue: 1 Article Number: 013414
  251. M.-C. Chen, P. Arpin, T. Popmintchev, M. Gerrity, M. Seaberg, B. Zhang, D. Popmintchev, G. Andriukaitis, T. Balciunas, O. D. Mücke, A. Pugzlys, A. Baltuška, M. M. Murnane, and H. C. Kapteyn, "Bright, Coherent, Attosecond Soft X-Ray Harmonics Spanning the Water Window from a Tabletop Source," Physical Review Letters Volume: 105 Issue: 17 Article Number: 173901
  252. C. La-O-Vorakiat, E. Turgut, C. A. Teale, H. C. Kapteyn, M. M. Murnane, S. Mathias, M. Aeschlimann, C. M. Schneider, J. M. Shaw, H. Nembach, T. J. Silva, “Ultrafast Demagnetization Measurements using Extreme Ultraviolet Light: Comparison of Electronic and Magnetic Contributions”, Physical Review X 2 , 011005 (2012). See also associated Physics Viewpoint Highlight “Spin Sensitive Optics” by Jean-Yves Bigot in Physics 5 , 11 (2012)
  253. X. Zhou, P. Ranitovic, C. Hogle, J. H. D. Eland, H.C. Kapteyn and M.M. Murnane, “Probing and Controlling non-Born-Oppenheimer Dynamics in Highly Excited Molecular Ions”, Nature Physics, 232, doi:10.1038/NPHYS2211 (2012)
  254. R. M. Lock, S. Ramakrishna, X. Zhou, H. C. Kapteyn, M. M. Murnane, and T. Seideman, “Extracting continuum electron dynamics from high harmonic emission from molecules,” Physical Review Letters, 108 , 133901 (2012)
  255. L. Urbanski, M.C. Marconi, L.M. Meng, M. Berrill, O. Guilbaud,A. Klisnick, and J.J. Rocca, “Spectral linewidth of a Ne-like AR capillary discharge soft-x-ray laser and its dependence on amplification beyond gain saturation”, Physical Review A, 85 , 033837, (2012)
  256. H. Bravo , B.T. Szapiro , P.W. Wachulak, M.C. Marconi, W. Chao , E.H. Anderson, D.T. Attwood, C.S. Menoni, J.J. Rocca, “ Demonstration of nanomachining with focuses extreme ultraviolet laser beams”, IEEE Journal of Selected Topics in Quantum Electronics, 18 , 443, (2012)
  257. F. Brizuela, I. Howlett, S. Carbajo, A. Sakdinawat, Y. Liu, D. Attwood, M. Marconi, M. Marconi, J.J. Rocca, C.S. Menoni, “ Imaging at the nanoscales with practical EUV laser based full field microscopes”, IEEE Journal of Selected Topics in Quantum Electronics, 18 , 434, (2012)
  258. D. Alessi, Y. Wang, D. Martz, B. Luther, L.Yin, D.H. Martz, M.R. Woolston, Y. Liu, M. Berrill, and J.J. Rocca, “Efficient excitation of gain-saturated sub-9 nm wavelength table-top soft X-ray lasers and lasing down to 7.36 nm”, Physical Review X , 1 , 021023 (2011)
  259. J. -W. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, "Extreme Ultraviolet Photoionization of Aldoses and Ketoses,"  Chemical Physics Letters, 506 , 161 (2011)
  260. A.H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J J. Rocca, “Demonstration of a Compact 100 Hz, 0.1 J, Diode-Pumped Picosecond Laser”, Optics Letters, 36, 2164, (2011)
  261. L.M. Meng, D. Alessi, O. Guilbaud, Y. Wang, M. Berrill, B.M. Luther, S.R. Domingue, D.H. Martz, D. Joyeux, S. De Rossi, J.J. Rocca , and A. Klisnick, “Temporal coherence and spectral linewidth of an injection-seeded transient collisional soft x-ray laser”, Optics Express , 36 , 2164, (2011)
  262. L. Urbanski, M.C. Marconi, A. Isoyan, A. Stein, C.S. Menoni, J.J. Rocca, “Analysis of a scheme for de-magnified Talbot lithography”, Journal of Vacuum Science and Technology B, 29 , 06F504 (2011)
  263. A. Bahabad, M. M. Murnane and H. C. Kapteyn, “Manipulating Nonlinear Optical Processes with Accelerating Light Beams,” Physical Review A 84 , 033819 (2011).
  264. D. Nardi, M. Travagliati, M. E. Siemens, Q. Li, M.M. Murnane, H. C. Kapteyn, G. Ferrini, F. Parmigiani, and F. Banfi, “Probing Thermomechanics at the Nanoscale: Impulsively Excited Pseudosurface Acoustic Waves in Hypersonic Phononic Crystals”, Nano Letters 11 , 4126 (2011)
  265. G. Andriukaitis, T. Balciunas, S. Ališauskas, A. Pugžlys, A. Baltuška, T. Popmintchev, M.-C. Chen, M.M. Murnane, H.C. Kapteyn, “90-GW Peak-Power Few-Cycle Mid-IR Pulses from an Optical Parametric Amplifier”, Optics Letters 36 , 2755 (2011)
  266. X. M. Tong , P. Ranitovic , C. W. Hogle , M. M. Murnane , H. C. Kapteyn , and N. Toshima , Theory and experiment on laser-enabled inner-valence Auger decay of rare-gas atoms”, Physical Review A, 84(1), 013405. (2011)
  267. P. Ranitovic, X. M. Tong, C. W. Hogle, X. Zhou, Y. Liu, N. Toshima, M. M. Murnane, and H. C. Kapteyn, "Controlling the XUV Transparency of Helium using Two Pathway Quantum Interference," Physical Review Letters 106 , 193008 (2011)
  268. H. C. Kapteyn and M. M. Murnane,“Imaging in the Ultrafast Lane”, Photonics Spectra, May (2011)
  269. X. Zhang, E. Schneider, G. Taft, H. Kaptyen, M. Murnane, S. Backus, “Multi-microjoule, MHz repetition rate Ti:Sapphire ultrafast regenerative amplifier system”, Optics Express, 20 , 7015-7021 (2012)
  270. S. Mathias, C. La-O-Vorakiat, P. Grychtol, P. Granitzka, E. Turgut, J. M. Shaw, R. Adam, H. T. Nembach, M. E. Siemens, S. Eich, C. M. Schneider, T. J. Silva, M. Aeschlimann, M. M. Murnane, H. Kapteyn “Probing the timescale of the exchange interaction in a ferromagnetic alloy”, PNAS, doi:10.1073/pnas.1201371109 (2012)
  271. B. Doughty, L. H. Haber, C. Hackett, and S. R. Leone, "Photoelectron angular distributions from autoionizing 4s 1 4p 6 6p 1 states in atomic krypton probed with femtosecond time resolution," J. Chem. Phys. 134 , 094307 (2011)
  272. O. Bünermann, O. Kornilov, S. R. Leone, D. M. Neumark, and O. Gessner, "Femtosecond extreme ultraviolet ion imaging of ultrafast dynamics in electronically excited helium nanodroplets," IEEE J. Sel. Top. Quantum Electron, 18 , 308 (2012)
  273. M. J. Abel, D. M. Neumark, S. R. Leone, and T. Pfeifer, "Classical and quantum control of electrons using the carrier-envelope phase of strong laser fields," Laser Photonics Rev. 5 , 352 (2011)
  274. L. H. Haber, B. Doughty, and S. R. Leone, "Energy-dependent photoelectron angular distributions of two-color two-photon above threshold ionization of atomic helium," Phys. Rev. A 84 , 013416 (2011)
  275. C. J. Koh, C. L. Liu, C. Harmon, D. Strasser, A. Golan, O. Kostko, S. D. Chambreau, G. L. Vaghjiani, and S. R. Leone, "Soft ionization of thermally evaporated hypergolic ionic liquid aerosols," J. Phys. Chem. A 115 , 4630 (2011)
  276. O. Kornilov, O. Bünermann, D. J. Haxton, S. R. Leone, D. M. Neumark, and O. Gessner, "Femtosecond photoelectron imaging of transient electronic states and Rydberg atom emission from electronically excited He droplets," J. Phys. Chem. A 115 , 7891 (2011)
  277. T. G. Habteyes, S. Dhuey, D. Cabrini, P. J. Schuck, and S. R. Leone, "Theta-shaped plasmonic nanostructures: bringing ¢ dark ¢ multipole Plasmon resonances into action via conductive coupling," Nano Lett. 11 , 1819 (2011)
  278. A. A. Cordones, T. J. Bixby, and S. R. Leone, "Direct measurement of off-state trapping rate fluctuations in single quantum dot fluorescence," Nano Lett. 11 , 3366 (2011)
  279. B. Doughty, L. H. Haber, and S. R. Leone, "Pump-probe photoelectron-velocity-map imaging of autoionizing singly excited 4s 1 4p 6 n p 1 ( n =7,8) and doubly excited 4s 1 4p 6 5s 1 6p 1 resonance in atomic krypton," Phys. Rev. A 84 , 043433 (2011)
  280. J. Stiegler, Y. Abate, A. Cvitkovic, Y. E. Romanyuk, A. Huber, S. R. Leone, and R. Hillenbrand, "Nanoscale infrared absorption spectroscopy of single sub-10 nm particles enabled by scattering-type near-field microscopy," ACS Nano. 5 , 6494 (2011)
  281. T. J. Bixby, A. A. Cordones, and S. R. Leone, "CdSe/ZnS quantum dot intermittency in N,N'-diphenyl-N,N'-bis(3-methylphenyl)-(1,1'-biphenyl)-4,4'-diamine (TPD)," Chem. Phys. Lett. 521 , 7 (2011)
  282. A. J. Trevitt, S. Soorkia, J. D. Savee, T. S. Selby, D. L. Osborn, C. A. Taatjes, and S. R. Leone, "Branching fractions of the CN + C 3 H 6 reaction using synchrotron photoionization mass spectrometry: evidence for the 3-cyanopropene product," J. Phys. Chem. A 115 , 13467 (2011)
  283. F. Goulay, S. Soorkia, G. Meloni, D. L. Osborn, C. A. Taatjes, and S. R. Leone, "Detection of pentatetraene by reaction of the ethynyl radical (C 2 H) with allene (CH 2 =C=CH 2 ) at room temperature," Phys. Chem. Chem. Phys. 13 , 20820 (2011)
  284. F. Goulay, A. J. Trevitt, J. D. Savee, J. Bouwman, D. L. Osborn, C. A. Taatjes, K. R. Wilson, and S. R. Leone, "Production detection of the CH radical reaction with acetaldehyde," J. Phys. Chem. A, doi:10.1021/jp2113126 (2012)
  285. S. Soorkia, C-L. Liu, J. D. Savee, S. J. Farrell, S. R. Leone, and K. R. Wilson, "Airfoil sampling of a pulsed Laval beam with tunable vacuum ultraviolet synchrotron ionization quadrupole mass spectrometry: application to low-temperature kinetics and product detection," Rev. Sci. Instrum. 82 , 124102 (2011)
  286. A. Golan, K. B. Bravaya, R. Kudirka, O. Kostko, S. R. Leone, A. I. Krylov, and M. Ahmed, "Ionization of dimethyluracil dimers leads to facile proton transfer in the absence of hydrogen bonds," Nature Chem., 4 , 323, doi:10.1038/nchem.1298 (2012)
  287. S. D. Chambreau, J. A. Boatz, G. L. Vaghjiani, C. Koh, O. Kostko, A. Golan, and S. R. Leone, "Thermal decomposition mechanism of 1-ethyl-3-methylimidazolium bromide ionic liquid," J. Phys. Chem. A, doi:10.1021/jp209389d (2011)
  288. J. Bouwman, F. Goulay, S. R. Leone, and K. R. Wilson, "Bimolecular rate constant and product branching ratio measurements for the reaction of C 2 H with ethane and propene at 79 K," J. Phys. Chem., doi:10.1021/jp30105b (2012)
  289. M. D. Seaberg; D.E. Adams; E.L. Townsend; D.A. Raymondson; W.F. Schlotter; Y.W. Liu; C.S. Menoni; L. Rong; C.C. Chen; J.W. Miao; H.C. Kapteyn; M.M. Murnane, “Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source,” Optics Express, 19 22470-22479, (2011)

 

Publications that result from Center Support
In Peer-Reviewed Conference Proceedings:

  1. J.J. Rocca, M. Grisham, G. Vaschenko, S. Heinbuch, C.S. Menoni, E. Hammarsten, E. Jankowska, J. Filevich, M. Marconi, Y. Wang, B.M. Luther, L. Juha, I. Artioukov, V.V. Kondratenko, A. Vinogradov, V. Shlyaptsev, “Recent results in capillary discharge soft x-ray laser Research ,” In SPIE Conference on Soft X-Ray Lasers and Applications V, San Diego, California, August 6-7 2003, Proceedings of SPIE, Vol.5197,pp174-183
  2. G. Vaschenko, M. Grisham, C.S. Menoni, J.J. Rocca, Yu. P. Pershyn, E.N. Zubarev, D. L. Voronov, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinogradov and I.A. Artioukov, “Damage of Sc/Si multiplayer mirrors exposed to intense nanosecond 46.9 nm laser pulses ,” CLEO Technical Digest, San Francisco, May 16-21, 2004, in press
  3. M.G. Capeluto, M.C. Marconi, S. Luduena, L. Pietrasanta, M. Grisham, B. Reagan, C.S. Menoni, J.J. Rocca, “Nano patterning of PMMA using ?=46.9 nm table-top laser ,” CLEO Technical Digest, San Francisco, May 16-21, 2004, in press
  4. M.G. Capeluto, G. Vaschenko, M. Grisham, M.C. Marconi, S. Luduena, L. Pietrasanta, C.S. Menoni, and J.J. Rocca, “Nano-patterning with a high repetition rate ?=46.9 nm capillary discharge table-top laser ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  5. J.J. Rocca , B.M. Luther, S. Heinbuch, M.A. Larotonda, Y. Wang, M. Grisham, D. Alessi, M. Berrill, M.C. Marconi, V.N. Shlyaptsev, A. Dummer, F. Brizuela, and C.S. Menoni, “Demonstartion of High Repetition Rate Desk-Top and Table-Top Soft X-Ray Lasers ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28. 2004, submitted
  6. V.N. Shlyaptsev, J. Dunn, R. Keenan, S. Moon, R. Smith, P.K. Patel, D.F. Price, J.J. Rocca, J. Filevich, Y. Wang, “Pumping efficiency of transverse, longitudinal, and grazing incidence schemes in laser produced and capillary discharge plasmas ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  7. V.V. Kondratenko, Yu.P. Pershyn, V.A. Sevryukova, D.L. Voronov, E.N. Zubarev, M. Grisham , G, Vaschenko, C.S. Menoni, J.J. Rocca, I.A. Artiokov, Yu.A. Uspenski, and A.V. Vinogradov, “ Transmission electron microscopy study of Sc/Si multiplayer mirrors irradiated by pulses of X-ray laser working at 46.9 nm ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  8. B.M. Luther, Y. Wang, M. Berill, D. Alessi, M. Marconi, M.A. Larotonda, and J.J. Rocca, “ Guiding of intense laser beams in highly ionized Ar plasma columns generated by a fast capillary discharge ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  9. G. Vaschenko, M. Grisham, C.S. Menini, J.J. Rocca, Yu. P. Pershyn, E.N. Zubarev, D. L. Voronov, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinogradov and I.A. Artioukov, “Damage threshold and damage mirrors exposed to intense nanosecond 46.9 nm laser pulses ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  10. Y. Wang, B. Luther, F. Pedacci, M. Berrill, F. Brizuela, M.A. Larotonda, M. Marconi, and J.J. Rocca, “Generation and characterization of a dense capillary discharge plasmas waveguide for a Ni-like Ag soft x-ray laser ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  11. K.A. Goldberg, P. Naulleau, P. Denham, S.B. Rekawa, K. Jackson, E.H. Anderson, J.A. Liddle, J. Bokor “EUV Interferometry of the 0.3-NA MET optic,” Proceedings of SPIE, Vol.5037, 69, in print (2004).
  12. J.J. Rocca, B.M. Luther, S. Heinbuch, Y. Wang, M.A. Larotonda, M. Grisham, D. Alessi, M. Berrill, M.C. Marconi, V.N. Shlyaptsev, A. Dummer, F. Brizuela, C.S. Menoni, “Demonstration of high repetition rate desk-top and table-top soft x-ray lasers ,” The 17 th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS, Puerto Rico, November 7-11, 2004; Conference Proceedings, Vol.2, p.886-887, (2004).
  13. M.G. Capeluto, G. Vaschenko, M.C. Marconi, M. Grisham, C.S. Menoni, J.J. Rocca, “Interferometric lithography at 47nm with a table-top EUV laser ,” The 17 th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS, Puerto Rico, November 7-11, 2004; Conference Proceedings, Vol. 2, p. 888-889, (2004).
  14. G.O. Vaschenko, M. Grisham, C.S. Menoni, J.J. Rocca, Y.P. Pershin, E.N. Zubarev, D.L. Voronov, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinogradov, I.A. Artioukov, “Study of irradiation damage of Sc/Si multiplayer mirrors with a 46.9-nm tabletop laser ,” The International Symposium on Optical Science and Technology, SPIE 49 th Annual Meeting, Denver, Colorado, August 2-6 2004; Fourth Generation X-Ray Sources and Optics II, Proceedings of SPIE, Vol. 5534, p. 53-57, (2004).
  15. A.M. Dummer, F. Brizuela, C. Duskis, J. George, B. Luther, M. Larotonda, S. Kohli, P. Mccurdy, J.J. Rocca, C.S. Menoni, “Investigation of damage threshold of ion beam deposited oxide thin film optics for high-peak-power short-pulse lasers ,” The International Symposium on Optical Science and Technology, SPIE 49 th Annual Meeting, Denver, Colorado, August 2-6 2004; Advances in Thin film Coatings for Optical Applications, Proceedings of SPIE, Vol. 5527, p. 93-97, (2004).
  16. L.Juha, M. Bittner, D. Chostova, V. Letal, J. Krasa, Z. Otcenasek, M. Kozlova, J. Polan, A.R. Praeg, B. Rus, M. Stupka, J. Krzywinski, A. Andrejczuk, J.B. Pelka, R.H. Sobierajski, L.Ryc, J. Feldhaus, F.P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pina, M.E. Grisham, G.O. Vaschenko, C.S. Menoni, J.J. Rocca, “Short-wavelength ablation of solids: pulse duration and wavelength effects ,” The International Symposium on Optical Science and Technology, SPIE 49 th Annual Meeting, Denver, Colorado, August 2-6 2004; Fourth Generation X-Ray Sources and Optics II , Proceedings of SPIE, Vol. 5534, p.95-107, (2004).
  17. M. Bittner, L. Juha, D. Chostova, V. Letal, J. Krasa, Z. Otcenasek, M. Kozlova, J. Polan, A.R. Praeg, B. Rus, M. Stupka, J. Krzywinski, A. Andrejczuk, J.B. Pelka, R.H. Sobierajski, J. Feldhaus, F.P. Boody, M.E. Grisham, G.O. Vaschenko, C.S. Menoni, J.J. Rocca, “Comparing ablation induced by fs, ps, and ns XUV-laser pulses ,” The International Symposium on Optical Science and Technology, SPIE 49 th Annual Meeting, Denver, Colorado, August 2-6 2004; High-Power Laser Ablation, Proceedings of SPIE, Vol.5448, p.827-836, (2004).
  18. M.G. Capeluto, G.O. Vaschenko, M.E. Grisham, M.C. Marconi, C.S. Menoni, J.J. Rocca, S. Luduena, L. Pietrasanta, “Interferometric lithography at 46.9 nm ,” The International Symposium on Optical Science and Technology, SPIE 49 th Annual Meeting, Denver, Colorado, August 2-6 2004; 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, Proceedings of SPIE, Vol. 5622, p.735-738, (2004).
  19. X. Zhang, D. Raymondson, A. S. Sandhu, S. Backus, M. M. Murnane, H. C. Kapteyn, and A. R. Libertun, "High-resolution imaging system using a tabletop extreme ultraviolet source," Bellingham, WA, SPIE, 2004, Proceedings of the SPIE, Vol. 5534, p.47-52.
  20. A.L. Aquila, F. Salmassi, E.M. Gullikson, F. Eriksson, J. Birch, “Measurements of the Optical Constants of Scandium in the 50-1300eV Range ,” Proceedings of SPIE, Optical Constants of Materials for UV X-Ray Wavelength, Vol. 5538, p.64, (2004).
  21. E. A. Gibson, A. Paul, N. Wagner, S. Backus, M. M. Murnane, H. C. Kapteyn, and I. P. Christov, "High-order harmonic generation from argon ions up to 250 eV," Ultrafast Phenomena XIV, Proceedings of the 14 th International Conference, Niigata, Japan, July 25-30, 2004, Springer Series in Chemical Physics, Vol. 79, Paper ME29, (2005).
  22. E. A. Gibson, N. Wagner, S. Backus, M. M. Murnane, H. C. Kapteyn, and I. P. Christov, "Temporal self-compression of intense femtosecond pulses propagating in argon-filled hollow Waveguides," Ultrafast Phenomena XIV, Proceedings of the 14 th International Conference, Niigata, Japan, July 25-30, 2004, Springer Series in Chemical Physics, Vol. 79, Paper TuE6, (2005).
  23. E. A. Gibson, A. Paul, S. Backus, R. Tobey, M. M. Murnane, H. C. Kapteyn, and I. P. Christov, "Quasi-phase matching of high harmonic generation in the “water window” soft x-ray region," Ultrafast Phenomena XIV, Proceedings of the 14 th International Conference, Niigata, Japan, July 25-30, 2004, Springer Series in Chemical Physics, Vol. 79, Paper ThB1, (2005).
  24. R. I. Tobey, E. H. Gershgoren, M. E. Siemens, H. C. Kapteyn, M. M. Murnane, T. Feurer, and K. A. Nelson, "Probing of thermal acoustic transients in materials using EUV radiation," Ultrafast Phenomena XIV, Proceedings of the 14 th International Conference, Niigata, Japan, July 25-30, 2004, Springer Series in Chemical Physics, Vol. 79, Paper WC3, (2005).
  25. X. Zhang, A. R. Libertun, A. J. Paul, M. M. Murnane, H. Kapteyn, Y. Liu, and D. Attwood, "Coherent imaging of laser-plasma interactions using high-harmonic EUV light," Ultrafast Phenomena XIV, Proceedings of the 14 th International Conference, Niigata, Japan, July 25-30, 2004, Springer Series in Chemical Physics, Vol. 79, Paper MD4, (2005).
  26. J.J. Rocca, B.M. Luther, Y. Wang, M. Larotonda, D.A. Alessi, M.A. Berrill, C.S. Menoni, M.C. Marconi, V.N. Shlyaptsev, “Demonstration of saturated high-repetition-rate table-top soft x-ray lasers at wavelength down to 13.9 nm ,” SPIE conference on Soft X-Ray Lasers and Applications, San Diego, August 2005, Proceedings of SPIE 5919 , 1, (2005).
  27. F. Brizuela, G.O. Vaschenko, C. Brewer, M. Grisham, C.S. Menoni, H. Mancini, M.C. Marconi, J.J. Rocca , W. Chao, A. Liddle, E.H. Anderson, D. Attwood, A.V. Vinigradov, I.A. Artioukov, Y.P. Pershyn, V.V. Kondratenko, “Nanometer-scale imaging with a compact soft x-ray laser ,” SPIE conference on Soft X-ray lasers and Applications, San Diego, August 2005; Proceedings of SPIE 5919 , 179, (2005).
  28. S.C. Heinbuch, F. Dong, M. Grisham, E.R. Bernstein, J.J. Rocca, “Desk-top size high-repetition-rate 46.9-nm capillary discharge laser as photoionization source for photochemistry applications ,” SPIE conference on Soft X-ray lasers and Applications, San Diego, August 2005; Proceedings of SPIE 5919 , 53, (2005).
  29. G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C.S. Menoni, M. Marconi, J.J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A.V. Vinogradov, I.A. Artioukov, Yu.P. Pershyn, V.V. Kondratenko, “Nano-scale imaging with a compact EUV laser ,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JThG4, (2005).
  30. M.A. Larotonda, Y. Wang, B.M. Luther, D. Alessi, M. Berrill, M.C. Marconi, J.J. Rocca, V.N. Shlyaptsev, “Saturated high-repetition soft x-ray lasers at wavelength down to 13.9 nm in Ni-like ions ,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JThG3, (2005).
  31. S. Heinbuch, M. Grisham, D. Martz, and J.J. Rocca, “Demonstration of a desk-top size 46.9 nm laser at 12Hz repetition rate ,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JThG1, (2005).
  32. D. Alessi, B. M. Luther, Y. Wang, M. A. Larotonda, M.Berrill, F. Pedaci, J. J. Rocca, V. N. Shlyaptsev, “Gain saturated operation of table-top soft x-ray lasers in neon-like ions at 5 Hz repetition rate ,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JThE91, (2005).
  33. G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, Y. Wang, M.A. Larotonda, B.M. Luther, M. Marconi, C.S. Carmen, J.J. Rocca, W.L. Chao, J.A. Liddle, E.H. Anderson, D.T. Attwood, Y.P. Pershyn, V.V. Kondratenko, A. V. Vinogradov, I.A. Artioukov, “Nano-imaging with compact extreme ultraviolet laser sources ,” SPIE International Symposium on Microlithography, San Jose, California, February 27-March 4, 2005; Proceedings of SPIE 5752 , 375, (2005).
  34. I. Thomann, E. Gagnon, R. Jason Jones, A..S. Sandhu, A. Lytle, R. Anderson, M. Murnane, H. Kapteyn, “Characterization of carrier-envelope phase noise from grating-based stretcher/compressors for chirped-pulse amplification,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, CtuR3, (2005).
  35. X. Zhang, A. Lytle, T. Popminchev, A.l Paul, N. Wagner, O. Cohen, I. Christov, M. Murnane, H. Kapteyn, “Phase Matching, Quasi Phase Matching and Pulse Compression in a Single Waveguide for Enhanced High Harmonic Generation,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JTuD6, (2005).
  36. E. Gagnon, A. Sandhu, I. Thomann, A. Paul, A.L. Lytle, S. Backus, M. Murnane, H. Kapteyn, “Long Term Carrier-Envelope Phase Coherence in a Grating-based Chirped Pulse Amplifier System,” 89th Annual Meeting of the Optical Society of America, Frontiers in Optics/Laser Science XXI (OSA/ILS), Tucson, AZ, October 2005; FiO 2005/Laser Science XXI Technical Digest, ISBN 1-55752-797-0, (2005).
  37. J.J. Rocca, B.M. Luther, S. Heinbuch, M.A. Larotonda, Y. Wang, D. Alessi, M. Berrill, M.C. Marconi, C.S. Menoni, V.N. Shlyaptsev, “High repetition rate table-top soft x-ray lasers with capillary discharges and laser-created plasmas ,” 6 th International Conference on Dense Z-pinches, Oxford, Great Britain, July 24-28, 2005; AIP Conference Proceedings, 808 , 241, (2006).
  38. W. Chao, B. D. Harteneck, E. H. Anderson, D. Attwood and J. A. Liddle, "New Nanofabrication Technique Using Overlay for 15-nm Zone Plate," SPIE conference on Micromachining Technology for Micro-Optics and Nano-Optics IV, San Jose, California, January 23 2006; Proceedings of SPIE 6110 , 61100D, (2006).
  39. J.J. Rocca, “ Compact Soft X-ray Lasers: a Doorway to Coherent Soft X-ray Science on a Table-Top ,” 8 th International School and Symposium on Synchrotron Radiation in Natural Sciences, Zakopane, Poland, June 12-17, 2006, Bulletin of the Polish Synchrotron Radiation Society 5 , 16, (2006).
  40. S. Heinbuch, F. Dong, J. Rocca, and E. Bernstein, “Study of hydrogen-bonded and metal-oxide clusters using single photon ionization from a compact soft x-ray laser ,” 2006 CLEO meeting, Long Beach, CA, May 2006, CLEO Conference Proceedings, JFB4 , (2006).
  41. A. Sandhu, E. Gagnon, A. Paul, I. Thomann, A. Lytle, M. Murnane, H.Kapteyn, and I. Christov, “Sub-femtosecond XUV pulses via energy selective non-linear stabilization in a waveguide ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper JTuE4, (2006).
  42. B. Luther, Y. Wang, M. Larotonda, D. Alessi, M. Berrill, V. Shlyaptsev, and J.J. Rocca, “Saturated 13.2 nm high repetition rate laser in Nickel-like Cd and isoelectric scaling down to 10.9 nm ,” CLEO/QELS, Long Beach, California, May 21-26, 2006; Technical Digest, JThB5 , (2006).
  43. B. Reagan, D.M. Gaudiosi, T. Popmintchev, M. Grisham, O. Cohen, B.C. Walker, J.J. Rocca, M.M. Murnane, and H.C. Kapteyn, “High harmonic generation from ions in a capillary discharge ,” CLEO/QELS, Long Beach, California, May 21-26, 2006; Technical Digest, JThB4 , (2006).
  44. C. Brewer, G. Vaschenko, F. Brizuela, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca , C.S. Menoni, W. Chao, J.A. Liddle, Y. Liu, E.H. Anderson, and D.T. Attwood, “Sub-38 nm resolution microscopy with a tabletop 13 nm wavelength laser ,” CLEO/QELS, Long Beach, California, May 21-26, 2006;Technical Digest, CME4 , (2006).
  45. F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, “Study of Hydrogen-Bonded and Metal-Oxide clusters Using Single Photon Ionization from a Compact Soft X-ray Laser ,” CLEO/QELS, Long Beach, California, May 21-26, 2006; Technical Digest, JFB4 , (2006).
  46. O. Cohen, T. Popmintchev, M.M. Murnane, and H.C. Kapteyn, “Phase-matching in isotropic and homogeneous materials via Talbot effect ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper CThEE4, (2006).
  47. M. Siemens, R. Tobey, O. Cohen, M. Murnane, H. Kapteyn, and K. Nelson, “Transient 1D holographic detection of surface waves/displacement with extreme ultraviolet radiation ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper QMH6, (2006).
  48. E.A. Gibson, S. Kane, R. Huff, D. Gaudiosi, H.C. Kapteyn, C. Durfee, J. Squier, and R. Jimenez, “Grism based stretcher/compressor system for amplified, femtosecond kilohertz lasers ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper CThA3, (2006).
  49. D.M. Gaudiosi, B. Reagan, T. Popmintchev, M. Grisham, O. Cohen, B. Walker, J. Rocca, M. Murnane, and H. Kapteyn, “High harmonic generation from ions in a capillary discharge ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper JThB4, (2006).
  50. N. Wagner, A. Wüest, H. Kapteyn, and M. Murnane, “Observation of intra-molecular vibrational dynamics using high-harmonic generation as a probe ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper JFB2, (2006).
  51. A.L. Lytle, X. Zhang, A. Paul, H.C. Kapteyn, and M.M. Murnane, “Enhancement of extreme ultraviolet flux using quasi-phase matching ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper JThD3, (2006).
  52. L. Miaja, G. Saathoff, C. Lei, M. Murnane, H. Kapteyn, M. Aeschlimann, and J.L. Gland, “The laser-assisted photoelectric effect on surfaces ,” OSA Conference on Lasers and Electro-optics/ Quantum Electronics and Laser Science (CLEO/QELS), Long Beach, CA, May 2006. Paper QMH7, (2006).
  53. M.C. Marconi, P. Wachulak, C.S. Menoni, M.G. Capeluto, E. Anderson, “ Development of a table top nanopatterning tool with Extreme Ultraviolet Lasers ,” Proceedings of 2006 NSF Design, Service, and Manufacturing Grantees and Research Conference, St. Louis, Missouri 2006, Proceedings published to CD.
  54. M.G. Capeluto, P. Wachulak, M.C. Marconi , C.S. Menoni, J.J. Rocca, E.H. Anderson, W. Chao, D.T. Attwood. “ Development of a table top Nanopatterning tool with Extreme Ultraviolet laser illumination ,” Micro- and Nano- Engineering 2006 Conference Proceedings, Barcelona, Spain, 17-20 September, 2006, proceedings published to Microelectronic Engineering doi:10.1016/j.mee.2007.01.018.
  55. G. Vaschenko, F. Brizuela, C. Brewer, M.A. Larotonda, Y. Wang, B.M. Luther, M.C. Marconi, C.S. Menoni, J.J. Rocca , W. Chao, E.H. Anderson, Y. Liu, and D. Attwood, “EUV imaging with a 13 nm tabletop laser reaches sub-38 nm spatial resolution ,” Conference on Microlithography , San Jose, California, February 20-24 2006; Proceedings of SPIE 6151 , 61510X, (2006).
  56. R.L. Sandberg, A.L. Lytle, X. Zhang, O. Cohen, H.C. Kapteyn, M.M. Murnane, “Quasi Phase Matching and In-situ Probing of High Harmonic Generation in a Hollow Waveguide Using Counterpropagating Light,” 38th Annual Meeting of the American Physical Society Division of Atomic, Molecular, and Optical Physics (DAMOP), Paper N5.00009, Calgary, Alberta Canada, June, (2007).
  57. L. Miaja-Avila, G. Saathoff, M. Murnane, H. Kapteyn, M. Aeschlimann, “Laser-Assisted Photoemission from Surfaces,” 38th Annual Meeting of the American Physical Society Division of Atomic, Molecular, and Optical Physics (DAMOP), Paper N5.00012, Calgary, Alberta, Canada, June, (2007).
  58. A. Sandhu, E. Gagnon, A. Paul, M. Murnane, H. Kapteyn, P. Ranitovic, C.L. Cocke, “Direct time-resolved observation of molecular dynamics induced by extreme- ultraviolet photoionization,” 38th Annual Meeting of the American Physical Society Division of Atomic, Molecular, and Optical Physics (DAMOP), Paper J6.00002, Calgary, Alberta, Canada, June, (2007).
  59. R. Hooper, X. Zhou, W. Li, N. Wagner, H. Kapteyn, M. Murnane, “Intramolecular Dynamics Probed using High Harmonic Generation,” 38th Annual Meeting of the American Physical Society Division of Atomic, Molecular, and Optical Physics (DAMOP), Paper P5.00005, Calgary, Alberta, Canada, June, (2007).
  60. E. Gagnon, A.S. Sandhu, P. Ranitovic, C.L. Cocke, H.C. Kapteyn, M.M. Murnane, “Soft x-ray driven femtosecond dynamics of ionic Rydberg states in N 2 ,” 38th Annual Meeting of the American Physical Society Division of Atomic, Molecular, and Optical Physics (DAMOP), Paper R1.00141, Calgary, Alberta, Canada, June, (2007).
  61. J.J. Rocca, Y. Wang, B.M. Luther, E. Granados, M.A. Berrill, M.A. Larotonda, D.A. Alessi, D.H. Martz, D. Patel, F. Pedaci, C.S. Menoni , and V.N. Shlyaptsev, “High-brightness tabletop soft x-ray lasers at high repetition rate: injection-seeding of dense plasma amplifiers and other developments,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  62. E.R. Bernstein, F. Dong, S.C. Heinbuch, and J.J. Rocca, “Neutral nanocluster structure and chemistry studied by soft x-ray laser single-photon ionization,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  63. J.J. Rocca, S. Heinbuch, D. Martz, M. Grisham, B. Reagan, Y. Wang, B.M. Luther, M. Berrill, D. Alessi, M. Larotonda, D. Gaudiossi, T. Popmintchev, M.M. Murnane, H. Kapteyn, and V.N. Shlyaptsev, “Dense plasmas for the generation of coherent soft X-ray light,” XXVIII International Conference on Phenomena in Ionized Gases, Proc. ICOPIG 65, (2007).
  64. C.S. Menoni, F. Brizuela, C. Brewer, H. Bravo, B. Langdon, M. Berrill, D. Martz, G. Vaschenko, M.C. Marconi, J.J. Rocca, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn, V.V. Kondratenko, O. Hemberg, B. Frazer, and S. Bloom, “Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Technical Digest (Optical Society of America, Washington, DC, 2007), CThCC2, (2007).
  65. F. Brizuela, H. Bravo, M.A. Berrill, B. Langdon, G.O. Vaschenko, C.S. Menoni, J.J. Rocca, O.E. Hemberg, B.H. Frazer, W. Chao, E.H. Anderson, and D.T. Attwood, Jr., “ Nanoscale ablation with soft x-ray lasers,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  66. M.C. Marconi, P. Wachulak, D. Patel, M.G. Capeluto, C.S. Menoni, and J.J. Rocca, “Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  67. P. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “ Tabletop EUV holography with sub-200-nm spatial resolution,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol. 6702, (2007).
  68. C.A. Brewer, F. Brizuela, D.H. Martz, M.C. Marconi, J.J. Rocca, C.S. Menoni, W. Chao, E.H. Anderson, D. T. Attwood, Jr., A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn, and V. Kondratenko, “ Compact 70-nm spatial resolution microscope using a desktop-size soft x-ray laser,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol. 6702, (2007).
  69. D.L. Voronov, E.N. Zubarev, Y.P. Pershyn, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinogradov, I.A. Artioukov, Y.A. Uspenskiy, M.E. Grisham, G.O. Vaschenko, C.S. Menoni, and J.J. Rocca, “ Structural transformations in multilayers and bulk materials irradiated by EUV lasers,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  70. A.S. Sandhu, E. Gagnon, A. Paul, P. Ranitovic, C.L. Cocke, M.M. Murnane and H.C. Kapteyn, “Soft x-ray driven femtosecond molecular dynamics,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper QPDA5, Baltimore, MD, May, (2007).
  71. I. Thomann, E. Gregonis, M.M. Murnane, H.C. Kapteyn, “Temporal Characterization of energy-tunable EUV pulses in the sub-optical-cycle regime using FROG-CRAB,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper CPDB4, Baltimore, MD, May, (2007).
  72. O. Cohen, X. Zhang, A. Lytle, T. Popmintchev, M.M. Murnane, H.C. Kapteyn, “Grating-Assisted Phase Matching in Extreme Nonlinear Optics,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper CTuW1, Baltimore, MD, May, (2007).
  73. R. Sandberg, A. Paul, D. Raymondson, D. Gaudiosi, J. Holtsnider, M. Murnane, H. Kapteyn, C. Song, J. Miao, “Tabletop Lensless Imaging Using Coherent High Harmonic Beams,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper CTuW4, Baltimore, MD, May, (2007).
  74. A.L. Lytle, X. Zhang, M.M. Murnane, H.C. Kapteyn, O. Cohen, “In-situ Probing of Coherence in Hollow Waveguide High-Order Harmonic Generation,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper JTuD2, Baltimore, MD, May, (2007).
  75. O. Cohen, H.C. Kapteyn, M.M. Murnane, L.F. Chong, “Incoherent Solitons in Fast and Local Nonlinear Media,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper JWA65, Baltimore, MD, May, (2007).
  76. X. Zhang, A. Lytle, H. Kapteyn, M. Murnane, O. Cohen, “All-Optical Quasi-Phase Matching and Quantum Path Control by Counter Propagating Pulse Trains,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper JThA3, Baltimore, MD, May, (2007).
  77. L. Miaja-Avila, G. Saathoff, M.M. Murnane, H.C. Kapteyn, M. Aeschlimann, “Laser-Assisted Photoemission from Surfaces,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper QThD1, Baltimore, MD, May, (2007).
  78. E. Gagnon, M. Murnane, H. Kapteyn, A. Sandhu, “Using High-Order Harmonics with Momentum Imaging Techniques to Study Atomic and Molecular Dynamics,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper QThD4, Baltimore, MD, May, (2007).
  79. X. Zhou, W. Li, R. Hooper, N. Wagner, H. Kapteyn, M. Murnane, “Intra-Molecular Dynamics Probed Using High-Harmonic Generation,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , Paper JThD32, Baltimore, MD, May, (2007).
  80. T. Popmintchev, M.E. Grisham, D.M. Gaudiosi, B.A. Reagan, O. Cohen, M.A. Berrill, M.M. Murnane, H. Kapteyn, and J.J. Rocca, “Enhanced High Harmonic Generation in Xe, Kr and Ar Using a Capillary Discharge,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , JFA3, (2007).
  81. Y. Wang, E. Granados, M.A. Larotonda, M. Berrill, B.M. Luther, D. Patel, C.S. Menoni, and J.J. Rocca, “High brightness injection-seeded table-top soft x-ray laser using a dense plasma amplifier,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , JFA1, (2007).
  82. P.W. Wachulak, M.G. Capeluto, M.C. Marconi, C.S. Menoni, and J.J. Rocca, “Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO ‘07 Technical Digest , CThCC3, (2007).
  83. P.W. Wachulak, R.A. Bartels, M.C. Marconi, C.S. Menoni, and J.J. Rocca, “Table top extreme ultraviolet holography,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2007, Proc. CLEO '07 Technical Digest, CMX3, (2007).
  84. E. Granados, Y. Wang, M.A. Larotonda, M. Berrill, B.M. Luther, D. Patel, C.S. Menoni, and J.J. Rocca , “Demonstration of a high brightness injection-seeded soft x-ray laser amplifier using a dense plasma,” Proc. American Physical Society, BAPS.2007.MAR.B32.2, (2007).
  85. T. Popmintchev , D.M. Gaudiosi , O. Cohen , M.M. Murnane , H.C. Kapteyn, M. Grisham , B. Reagan , M. Berrill , J.J. Rocca, and B.C. Walker , “ High harmonic generation from ions in a capillary discharge ,” Proc. American Physical Society, BAPS.2007.MAR.B32.10, (2007).
  86. M. Marconi, P. Wachulak, D. Patel, M.G. Capeluto, C. Menoni, and J.J. Rocca , “ Sub-100 nm interferometric lithography realized with table top extreme ultraviolet lasers ,” Proc. American Physical Society, BAPS.2007.MAR.D43.10, (2007).
  87. F. Brizuela, C. Brewer, G. Vaschenko, Y. Wang, M. Larotonda, B. Luther, M. Marconi, J. Rocca, C. Menoni, W. Chao, Y. Liu, E. Anderson, D. Attwood, A. Vinogradov, I. Artioukov, Y. Pershyn, and V. Kondratenko, “ Nano-scale resolution full-field microscopy using tabletop extreme ultraviolet lasers ,” Proc. American Physical Society, BAPS.2007.MAR.D38.10, (2007).
  88. J.J. Rocca, Y. Wang, B. Luther, M. Berrill, M. Larotonda, D. Alessi, V.N. Shlyaptsev, E. Granados, and C.S. Menoni, “ Compact high repetition rate soft x-ray lasers: a doorway to high intensity coherent soft x-ray science on a table-top” Atomic Processes in Plasmas, J.D. Gillaspy, W.L. Wiese, eds., Proc. AIP 926 , 135, (2007).
  89. X. Zhang, A.L. Lytle, O. Cohen, D.M. Gaudiosi, T. Popmintchev, A. Paul, M.M. Murnane, H.C. Kapteyn, B. Reagan, M. Grisham, and J.J. Rocca, “ Attosecond Nonlinear Optics in Plasmas for Coherent X-ray Generation ” Atomic Processes in Plasmas, J.D. Gillaspy, J.J. Curry, W.L. Wiese, eds., Proc. AIP 926 , 145, (2007).
  90. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “Table Top Extreme Ultraviolet Holography. Present and future capabilities,” Proc. American Physical Society, baps.2007.mar.r1.120 (2007).
  91. F. Dong, S. Heinbuch, J.J. Rocca, E.R. Bernstein, “Formation and distribution of neutral transition metal oxide cluster: single photon ionization at 26.5 eV,” Proc. American Physical Society, baps.2007.mar.v18.14, (2007).
  92. M. Berrill, D. Alessi, and J.J. Rocca, “Modeling of a Seeded Table-Top Soft X-Ray Laser Amplifier,” Proc. American Physical Society, baps.2007.mar.k1.264, (2007).
  93. S. Heinbuch, F. Dong, J.J. Rocca, and E. Bernstein, “Single photon ionization of hydrogen bonded clusters with a desk-top size soft x-ray laser: (HCOOH)x and (HCOOH)y(H2O)z,” Proc. American Physical Society, baps.2007.mar.v18.13, (2007).
  94. H. Bravo, F. Brizuela, G. Vaschenko, C.S. Menoni, J.J. Rocca, O. Hemberg, B. Frazer, S. Bloom, W. Chao, E.H. Anderson, and D.T. Attwood, “Sub-100 nm scale ablation by direct focusing of an extreme ultraviolet laser,” Proc. American Physical Society, baps.2007.mar.r1.157, (2007).
  95. M. Siemens, O. Cohen, Q. Li, M. Murnane, H. Kapteyn, R. Tobey, and K. Nelson, “Ultrafast Extreme Ultraviolet Holography: Dynamic Measurement of Surface Deformation,” 2007 March Meeting of the American Physical Society, Talk U23.00004, Denver, CO, March 8, (2007).
  96. L. Miaja-Avila, G. Saathoff, C. Lei, M. Murnane, H. Kapteyn, M. Aeschlimann, and J. Gland, “The Laser-Assisted Photoelectric Effect on Surfaces,” 2007 March Meeting of the American Physical Society, Talk V19.00004, Denver, CO, March 8, (2007).
  97. N. Wagner, X. Zhou, W. Li, R. Hooper, M. Murnane and H. Kapteyn, “Observation of Intra-molecular Dynamics using High-Harmonic Generation as a Probe,” 2007 March Meeting of the American Physical Society, Talk W19.00004, Denver, CO, March 8, (2007).
  98. A. Sandhu, E. Gagnon, A. Paul, M. Murnane, and H. Kapteyn, “Using high-order harmonics with momentum imaging techniques to study atomic and molecular dynamics,” 2007 March Meeting of the American Physical Society, Talk W19.00009, Denver, CO, March 8, (2007).
  99. A. Lytle, X. Zhang, M. Murnane, H. Kapteyn, O. Cohen, “In-situ probe of ionization and coherent buildup for high-order harmonic generation in hollow waveguides using counterpropagating light,” 2007 March Meeting of the American Physical Society, Talk B32.00009, Denver, CO, March 5, (2007).
  100. X. Zhang, A. Lytle, O. Cohen, H. Kapteyn, and M. Murnane, “Quasi Phase Matching and Quantum Path Control of High Harmonic Generation using Counterpropagating Light,” 2007 March Meeting of the American Physical Society, Talk B32.00004, Denver, CO, March 5, (2007).
  101. D. Patel, Y. Wang, M. Larotonda, J. Lovewell, J. Jensen, K.J. Hsiao, E. Krous, J.J. Rocca, C.S. Menoni, F. Tomasel, S. Kholi, and P. McCurdy, “Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition,” Laser-Induced Damage in Optical Materials: 2006, G.J. Exarhos, A.H. Guenther, K.L. Lewis, D. Ristau, M.J. Soileau, C.J. Stolz, eds., Proc. SPIE 6403 , 640314, (2007).
  102. T. Popmintchev, B. Reagan, D.M. Gaudiosi, M. Grisham, M. Berrill, O. Cohen, B.C. Walker, M.M. Murnane, H.C. Kapteyn, and J.J. Rocca, “Enhanced high harmonic generation from ions using a capillary discharge,” 15 th International Conference on Ultrafast Phenomena, P. Corkum, D.M. Jonas, R.J. Dwayne, M. Weiner, and A.M. Weiner, eds., Proc. Ultrafast Phenomena XV, 88 , 15, (2007).
  103. A.S. Sandhu, E. Gagnon, P. Ranitovic, X.M. Tong, C.L. Cocke, M.M. Murnane, and H.C. Kapteyn, “Direct time resolved observation of molecular dynamics induced by soft-x-ray photoionization,” Journal of Physics: Conference Series, 012037, (2007).
  104. X. Zhang, A.L. Lytle, D. Gaudiosi, T. Popmintchev, H.C. Kapteyn, M.M. Murnane, and O. Cohen, “Nonlinear optics for high-order frequency conversion: applied attosecond science,” in Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications VI. Proceedings of the SPIE Volume 6455 (SPIE, Bellingham, WA, 2007), p. 64550F.
  105. F. Brizuela, C. Brewer, D. Martz, M.C. Marconi, J.J. Rocca, C.S. Menoni, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artyukov, A.G. Ponomareko, and V.V. Kondratenko, “Single-shot extreme ultraviolet microscopy with 54 nm resolution using a desktop-size capillary discharge laser,” 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 , IEEE vol., no., pp.362-363, 9-13 Nov. 2008. TuAA5, (2008).
  106. M.C. Marconi, P.W. Wachulak, F. Brizuela, C.A. Brewer, R. Bartels, C.S. Menoni, and J.J. Rocca, “Spatial resolution and feature size determination in extreme ultraviolet microscope images,” 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 , IEEE vol., no., pp.828-829, 9-13 Nov. 2008. ThR2, (2008).
  107. H.C. Kapteyn, and M.M. Murnane, “The technology and application of coherent X-rays — attosecond science meets NLO,” 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008, IEEE , vol., no., pp.563-564, 9-13 Nov. 2008. WR3, Invited, (2008).
  108. M. Berrill, F. Brizuela, B. Langdon, H. Bravo, C. Menoni, and J.J. Rocca, “Photoionized Plasmas Created by Soft X-Ray Laser Irradiation of Solid Targets,” 50 th Annual Meeting of the Division of Plasma Physics, Dallas, Texas, November 17-21, (2008), Bulletin of the American Physical Society, Vol. 25, Number 14, UO4.00011, (2008).
  109. M. Marconi, P. Wachulak, C. Brewer, F. Brizuela, R. Bartels, C.S. Menoni, J. Rocca, E. Anderson, and W. Chao, “Analysis of Resolution and Feature Size in Extreme Ultraviolet Microscopy Images,” 21 st IEEE Lasers and Electro-Optics Society Annual Meeting, Newport Beach, CA, Oct. 9-13, (2008). DOI: 10.1109/LEOS.2008.4688877.
  110. M. Murnane and H. Kapteyn, “Ultrafast Coherent X-Rays as probes of Molecular and Material Dynamics,” 3rd EPS-QEOD Europhoton Conference—Solid State and Fiber Coherent Light Sources, Paris, France, September 2008, WEoA.1, (2008).
  111. M. Murnane and H. Kapteyn , “Ultrafast Molecular and Materials Dynamics probed by Coherent X-Rays,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, TUE1.1, (2008).
  112. W. Li, X. Zhou, R. Lock, H. Kapteyn, M. Murnane, S. Patchkovskii, and A. Stolow, “Large Amplitude Modulation of High-Order Harmonic Generation from Vibrationally Excited Molecules,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, TUE1.2, (2008).
  113. I. Thomann, R. Lock, C. La-O-Vorakiat, E. Gagnon, A. Sandhu, H.C. Kapteyn, M.M. Murnane, and W. Li, “Direct measurement of the angular-dependence of molecular ionization cross-sections by time-resolved extreme-ultraviolet spectroscopy,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, TUE3.3, (2008).
  114. X. Zhou, R. Lock, H.C. Kapteyn, and M.M. Murnane, “Observation of Elliptically Polarized High Harmonic Emission from Molecules Driven by Linearly Polarized Light,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, PD2.2, (2008).
  115. O. Cohen, T. Popmintchev, A. Lytle, H. Kapteyn, and M. Murnane, “Optically-induced phase structures and quasi-phase matching of high harmonic generation at keV energies,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, FRI2.4, (2008).
  116. R.L. Sandberg, C. Song, P.W. Wachulak, D.A. Raymondson, A. Paul, A.E. Sakdinawat, C. La-O-Vorakiat, W.F. Schlotter, M.C. Marconi, C.S. Menoni, M.M. Murnane, J.J. Rocca, H.C. Kapteyn, and J. Miao, “Lensless Imaging at 70nm Resolution using Tabletop Coherent Soft X-rays,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, MONIa.3, (2008).
  117. A. Lytle, X. Zhang, P. Arpin, O. Cohen, M. Murnane, and H. Kapteyn, “All-Optical Quasi-Phase Matching and Electron Trajectory Control of High-Order Harmonic Generation at 140 eV,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, MONIc.12, (2008).
  118. X. Zhou, R. Lock, N. Wagner, W. Li, H. Kapteyn, and M. Murnane, “Molecular Recollision Interferometry in High Harmonic Generation,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, MONId.27, (2008).
  119. M. Siemens, Q. Li, M. Murnane, H. Kapteyn, R. Yang, and K. Nelson, “Nanoscale Heat Transport Probed with Ultrafast Soft X-Rays,” 16th International Conference on Ultrafast Phenomena, Stresa, Italy, June 2008, TUEIId.6, (2008).
  120. A. Sandhu, E. Gagnon, V. Sharma, W. Li, M. Murnane, H. Kapteyn, P. Ranitovic, L. Cocke, A. Czasch, T. Jahnke, X.-M. Tong, and R. Santra, “Using high-harmonics for probing real-time dynamics of highly excited molecules,” 39th Annual Meeting of the APS Division of Atomic, Molecular, and Optical Physics (DAMOP), State College, PA, May 2008, Q1.00002, (2008).
  121. X. Zhou, R. Lock, N. Wagner, W. Li, M. Murnane, and H. Kapteyn, “Molecular Recollision Interferometry in High Harmonic Generation,” 39th Annual Meeting of the APS Division of Atomic, Molecular, and Optical Physics (DAMOP), State College, PA, May 2008, J6.00008, (2008).
  122. P. Ranitovic, B. Gramkow, D. Ray, M. Magrakvelidze, I. Bocharova, S. De, H. Mashiko, I. Litvinyuk, C.L. Cocke, H. Kapteyn, M. Murnane, A. Lytle, E. Gagnon, A. Paul, A. Sandhu, G.G. Paulus, X.M. Tong, and A. Alnaser, “EUV-Driven Attosecond Processes,” 39th Annual Meeting of the APS Division of Atomic, Molecular, and Optical Physics (DAMOP), State College, PA, May 2008, J6.00011, (2008).
  123. J. Yin, L. Miaja-Avila, G. Saathoff, C. La-o-Vorakiat, M. Murnane, H. Kapteyn, S. Mathias, M. Aeschlimann, and M. Bauer, “Direct measurement of core-level relaxation dynamics on a surface- adsorbate system,” 39th Annual Meeting of the APS Division of Atomic, Molecular, and Optical Physics (DAMOP), State College, PA, May 2008, B6.00010, (2008).
  124. H.C. Kapteyn and M. Murnane, “Lensless Diffractive Microscopy Using Tabletop Extreme Ultraviolet (EUV) Sources,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, May 2008. Presented as part of short course SC247, “Ultrafast Optics: Nanoscale Microscopy, Metrology and Patterning Using Compact and Large Scale Soft X-Ray Sources,” (2008).
  125. D.A. Raymondson, R.L. Sandberg, C. La-o-vorakiat, A. Paul, M.M. Murnane, H.C. Kapteyn, and W.F. Schlotter, “Multiple Reference Fourier Transform Holography Using Coherent High-Harmonic Soft-X-Rays,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMCC4, (2008).
  126. M. Siemens, Q. Li, M. Murnane, H. Kapteyn, R. Yang, and K. Nelson, “Nanoscale Heat Transport Probed with Soft-X-Rays,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CWA6, (2008).
  127. D.A. Raymondson, S. Backus, D. Mueller, E. Gagnon, M.-C. Chen, P. Arpin, M.M. Murnane, and H.C. Kapteyn, “Carrier-Envelope Stabilization of High-Average-Power Ultrafast Laser Amplifier Systems,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CThU1, (2008).
  128. O. Cohen, A.L. Lytle, T. Popmintchev, H. Kapteyn, and M.M. Murnane, “All-Optical Quasi-Phase Matching Techniques in High-Harmonic Generation,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CThX1, (2008).
  129. A.L. Lytle, X. Zhang, P. Arpin, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “All-Optical Quasi-Phase Matching and Quantum Path Selection of High-Order Harmonic Generation at 140 eV Using Counter propagating Light,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JFD2, (2008).
  130. I. Thomann, R. Lock, E. Gagnon, A. Sandhu, H.C. Kapteyn, M.M. Murnane, and W. Li, “Angular-Dependence of Molecular Photoionization Cross-Sections Studied by Time-Resolved EUV Spectroscopy,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JFF1, (2008).
  131. R. Lock, X. Zhou, N. Wagner, W. Li, H.C. Kapteyn, and M.M. Murnane, “Molecular Recollision Interferometry in High Harmonic Generation,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JFH4, (2008).
  132. W. Li, X. Zhou, R. Lock, N.L. Wagner, H.C. Kapteyn, M.M. Murnane, S. Patchkovskii, and A.A. Stolow, “Large Amplitude Modulation of High Order Harmonic Generation from Vibrationally Excited Molecules,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JFH5, (2008).
  133. L. Miaja-Avila, G. Saathoff, S. Mathias, J. Yin, C. La-o-vorakiat, M. Bauer, M. Aeschlimann, M. Murnane, and H. Kapteyn, “Direct Measurement of Core-Level Relaxation Dynamics on a Surface-Adsorbate System Using Ultrafast X-Rays,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, QFN1, (2008).
  134. T. Popmintchev, M.C. Chen, O. Cohen, M.E. Grisham, J.J. Rocca, M.M. Murnane, and H.C. Kapteyn, “ Extended Phase-Matching of High-Order Harmonics Driven by Mid-Infrared Light,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CPDA9 , (2008).
  135. D. Attwood, J.J. Rocca, M. Murnane, and H. Kapteyn, “Ultrafast Optics: Nanoscale Microscopy, Metrology and Patterning Using Compact and Large Scale Soft X-Ray Sources,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, SC247 , (2008).
  136. M.M. Murnane, J.J. Rocca, J. Miao, R. Yang, K. Nelson, E. Anderson, M. Aeschlimann, C. Menoni, M. Marconi, and H.C. Kapteyn, “Harnessing Attosecond Science for Visualizing the Nanoworld,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, QMF1, (2008).
  137. P.W. Wachulak, M.C. Marconi, W. Rockward, D. Hill, E.H. Anderson, C.S. Menoni, and J.J. Rocca, “Extreme Ultraviolet Interferometric Lithog­raphy with a Desk-Top System,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMX5 , (2008).
  138. P.W. Wachulak, M.C. Marconi, R. Bartels, C.S. Menoni, and J.J. Rocca, “Extreme Ultraviolet Holography with Wave­length Resolution,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMCC3 , (2008).
  139. R.L. Sandberg, C. Song, P.W. Wachulak, D.A. Raymondson, A. Paul, B. Amirbekian, A.E. Sakdinawat, E. Lee, C. La-O-Vorakiat, M.C. Marconi, C.S. Menoni, M.M. Murnane, J.J. Rocca, H.C. Kapteyn, and J. Miao, “ 70 nm Lensless Diffractive Microscopy Using Ta­bletop Soft X-Ray Sources,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMCC5 , (2008).
  140. Y. Wang, F. Pedaci, M. Berrill, B. Luther, E. Granados, D. Alessi, and J.J. Rocca, “ Phase Coherent, Injection-Seeded Table-Top Soft X-Ray Lasers at Wavelengths down to 13.9 nm,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMCC6 , (2008).
  141. F. Brizuela, C.A. Brewer, D. Martz, M.C. Marconi, J.J. Rocca, C.S. Menoni, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artioukov, A.G. Ponomareko, and V.V. Kondratenko, “ Near-Wavelength Resolution Extreme Ul­traviolet Imaging with a Desktop-Size Laser,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, CMCC7 , (2008).
  142. S.C. Heinbuch, F. Dong, J.J. Rocca, and E. Bernstein, “ Gas Phase Study of the Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact EUV Laser,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JTUA13 , (2008).
  143. M.C. Marconi, P.W. Wachulak, C.A. Brewer, F. Brizuela, R. Bartels, C.S. Menoni, J.J. Rocca, E.H. Anderson, and W. Chao, “ Analysis of Resolution and Feature Size in Ex­treme Ultraviolet Microscopy Images,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JWA80 , (2008).
  144. M. Berrill, F. Brizuela, B. Langdon, H. Bravo, C. Menoni, and J.J. Rocca, “ Photoionized Plasmas Created by Soft X-Ray Laser Irradiation of Solid Targets,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2008, Technical Digest (Optical Society of America, Washington, DC, 2008), San Jose, CA, JWB5 , (2008).
  145. J. Yin, L. Miaja-Avila, G. Saathoff, C. La-o-Vorakiat, M. Murnane, H. Kapteyn, S. Mathias, M. Aeschlimann, and M. Bauer, “Direct measurement of core-level relaxation dynamics on a surface- adsorbate system,” 2008 APS March Meeting, March 2008, New Orleans, Louisiana, J20.00015, (2008).
  146. P. Langston, D. Patel, A. Markosyan, E.M. Krous, B. Langdon, R. Route, M. Fejer and C.S. Menoni, “SiO 2 /HfO 2 multilayers: impact of process parameters and stack geometry on the optical and structural properties ,” in Frontiers in Optics , OSA Technical Digest (CD) Optical Society of America, JSuA27, (2008).
  147. F. Dong, S.C. Heinbuch, E.R. Bernstein, and J.J. Rocca, “ Gas study phase of the reactivity of optical coating materials with hydrocarbons using a desktop size EUV laser,” SPIE Advanced Lithography, Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., Proc. SPIE 6921, 69213F , (2008).
  148. D.N. Nguyen, L.A. Emmert, M. Mero, W. Rudolph, D. Patel, E. Krous, and C.S. Menoni, “The effect of annealing on the subpicosecond breakdown behavior of hafnia films,” SPIE Boulder Damage Symposium, G.J. Exarhos; D. Ristau; M.J. Soileau; C.J. Stolz, eds., Proc. Laser-Induced Damage in Optical Materials 7132 , 71320N, (2008).
  149. B. Langdon, D. Patel, E. Krous, P. Langston, C.S. Menoni, and M. Shinn, “Electron spin resonance and x-ray photo electron spectroscopy investigation of ion beam sputtered HfO 2 and SiO 2 thin films,” SPIE Boulder Damage Symposium, SPIE Boulder Damage Symposium, G.J. Exarhos; D. Ristau; M.J. Soileau; C.J. Stolz, eds., Proc. Laser-Induced Damage in Optical Materials 7132 , 71320M, (2008).
  150. D. Patel, P. Langston, A. Markosyan, E.M. Krous, B. Langdon, F. Furch, B. Reagan, R. Route, M.M. Fejer, J.J. Rocca, and C.S. Menoni, “SiO 2 /HfO 2 multilayers: impact of process parameters and stack geometry on the optical and structural properties,” SPIE Boulder Damage Symposium, SPIE Boulder Damage Symposium, G.J. Exarhos; D. Ristau; M.J. Soileau; C.J. Stolz, eds., Proc. Laser-Induced Damage in Optical Materials 7132 , 71320L, (2008).
  151. C.N. Anderson, and P. Naulleau, “A high-throughput contact-hole resolution metric for photoresists: full-process sensitivity study,” Advances in Resist Materials and Processing Technology XXV, Clifford L. Henderson, eds., SPIE, 6923 , 69230Z, (2008).
  152. H.-S. Han, W. Cho, K. A. Goldberg, A. Barty, C. Jeon, and S. Wurm, “Determining the critical size of EUV mask substrate defects,” Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds, SPIE, 6921 , 69211Y, (2008).
  153. K.A. Goldberg, S.B. Rekawa, C, D. Kemp, A. Barty, E. Anderson, P. Kearney, and H. Han, “EUV mask reflectivity measurements with micron-scale spatial resolution,” Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., SPIE, 6921 , 69213U, (2008).
  154. F. Salmassi, C.N. Anderson, P.P. Naulleau, and E.M. Gullikson, “Spin-on-glass smoothing of diamond turned optics for use in the extreme ultraviolet regime,” Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, eds., SPIE, 6883 , 68830F, (2008).
  155. W. Chao, E.H. Anderson, P. Fischer, and D.-H. Kim, “Towards sub-10 nm resolution zone plates using the overlay nanofabrication processes,” Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, eds., SPIE, 6883 , 688309, (2008).
  156. P.P. Naulleau, C.N. Anderson, K. Dean, P. Denham, K.A. Goldberg, B. Hoef, B. La Fontaine, D. Niakoula, and T. Wallow, “Advanced extreme ultraviolet resist testing using the SEMATECH Berkeley 0.3-NA microfield exposure tool,” Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., SPIE, 6921 , 69213N, (2008).
  157. S. Mathias, M. Wiesenmayer, F. Deicke, A. Ruffing, L. Miaja-Avila, M.M. Murnane, H.C. Kapteyn, M. Bauer, and M. Aeschlimann, “Time and angle resolved photoemission spectroscopy using femtosecond visible and high-harmonic light,” Proceedings of the Yamada Conference LXIII: 3rd International Conference on Photo-Induced Phase Transitions, Osaka Japan, Nov 2008. Journal of Physics: Conference Series 48 , 012042 (2009).
  158. R.L. Sandberg, D.A. Raymondson, W.F. Schlotter, K. Raines, C. La-O-Vorakiat, A. Paul, M.M. Murnane, H.C. Kapteyn, and J. Miao, “Near diffraction limited coherent diffractive imaging with tabletop soft x-ray sources,” 9 th International Conference on X-Ray Microscopy - XRM2008, Zürich, Switzerland, July 21 - 25, (2008), Journal of Physics: Conference Series 186 , 012058 (2009).
  159. F. Brizuela, C.A. Brewer, S. Fernandez, D. Martz, M. Marconi, W. Chao, E.H. Anderson, A.V. Vinogradov, I.A. Artyukov, A.G. Ponomareko, V.V. Kondrantenko, D.T. Attwood, K.A. Bertness, N.A. Sanford, J.J. Rocca , C.S. Menoni, “High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers,” 9 th International Conference on X-Ray Microscopy - XRM2008, Zürich, Switzerland, July 21 - 25, (2008), Journal of Physics: Conference Series 186 , 012026 (2009).
  160. J.J. Rocca, Y. Wang, F. Pedaci, B. Luther, M. Berrill, D. Alessi, E. Granados, M. Man Shakya, S. Gilbertson, Z. Chang, “High Coherence Injection-Seeded Table-Top Soft X-Ray Lasers at Wavelengths Down to 13.2 nm,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 125 (2009).
  161. C.S. Menoni, F. Brizuela, C. Brewer, D. Martz, P. Wachulak, S.F. Jimenez, C. Marconi, J.J. Rocca, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, A. Artioukov, Y.P. Pershyn, V.V. Kondratenko, “Advances in Nanoscale resolution soft x-ray laser microscopy,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 341 (2009).
  162. P.W. Wachulak, M.C. Marconi, R. Bartels, C.S. Menoni, and J.J. Rocca, “Soft X ray Holography with wavelength resolution,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 357 (2009).
  163. M. Berrill, F. Brizuela, B. Langdon, H. Bravo, C.S. Menoni, and J.J. Rocca, “Warm Photoionized Plasmas Created by Soft X-Ray Laser Irradiation of Solid Targets,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 381 (2009).
  164. M.C. Marconi, P.W. Wachulak, C. Brewer, F. Brizuela, R. Bartels, C.S. Menoni, J.J. Rocca, E. Anderson, and W. Chao, “Resolution and Feature Size Assessments in Soft X ray Microscopy Images,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 483 (2009).
  165. S. Heinbuch, F. Dong, E.R. Bernstein, and J.J. Rocca, “Gas Phase Study of The Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact Soft X-Ray Laser,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 439 (2009).
  166. S. Heinbuch, F. Dong, E.R. Bernstein, and J.J. Rocca, “Gas Phase Studies of Catalytic Processes Involving Vmon Clusters and their Reaction with Alcohols, Alkenes, Nox, and Nh3 Using a Desk-Top Size Soft X-Ray Laser,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 441 (2009).
  167. R.L. Sandberg, P.W. Wachulak, D.A. Raymondson, A. Paul, A.E. Sakdinawat, B. Amirbekian, E. Lee, Y. Liu, C. La-O-Vorakiat, C. Song, M.C. Marconi, C.S. Menoni, M.M. Murnane, J.J. Rocca, H.C. Kapteyn, and J. Miao, “Lensless Imaging Using Table-Top Soft X-Ray Lasers and High Harmonics Sources Reaching 70 nm Resolution,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 433 (2009).
  168. P.W. Wachulak, M.C. Marconi, W. Rockward, D. Hill, E.H. Anderson, C.S. Menoni, and J.J. Rocca, “Interferometric Lithography with a Desk Top size Soft X ray laser,” X-Ray Lasers 2008, Belfast, UK, Proceedings of the 11th International Conference on X-Ray Lasers, August 2008, Springer Netherlands 130 , 495 (2009).
  169. V. Sharma, E. Gagnon, A.S. Sandhu, R. Santra, W. Li, P. Ho, P. Ranitovic, C.L. Cocke, M.M. Murnane, and H.C. Kapteyn, “Electronic feshbach resonances created in soft x-ray-induced 02 dissociation,” Proceedings of the XXVI International Conference on Photonic, Electronic and Atomic Collisions (ICPEAC), Kalamazoo MI, July 2009. Journal of Physics: Conference Series 194 , 022071 (2009).
  170. P. Ranitovic, X.-M. Tong, B. Gramkow, S. De, B. DePaola, K.P. Singh, W. Cao, M. Magrakvelidze, D. Raymondson, I. Bocharova, H. Mashiko, E. Gagnon, A. Sandhu, M.M. Murnane, H.C. Kapteyn, I. Litvinyuk, and C.L. Cocke, “IR-assisted ionization of He by attosecond XUV radiation,” Proceedings of the XXVI International Conference on Photonic, Electronic and Atomic Collisions (ICPEAC), Kalamazoo MI, July 2009. Journal of Physics: Conference Series 194 , 032036 (2009).
  171. E. Gagnon, V. Sharma, W. Li, R. Santra, P. Ho, P. Ranitovic, C.L. Cocke, M.M. Murnane, H.C. Kapteyn, and A.S. Sandhu, “Autoionization dynamics and Feshbach resonances: Femtosecond EUV study of O 2 excitation and dissociation,” Proceedings of the XXVI International Conference on Photonic, Electronic and Atomic Collisions (ICPEAC), Kalamazoo MI, July 2009. Journal of Physics: Conference Series 194 , 012014 (2009).
  172. T. Popmintchev, M.-C. Chen, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “Phase Matching and Quasi-Phase Matching of Extreme High-Order Harmonic Generation,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 12 (2009).
  173. X. Zhou, R. Lock, H.C. Kapteyn, and M.M. Murnane, “Observation of Elliptically Polarized High Harmonic Emission from Molecules Driven by Linearly Polarized Light,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 21 (2009).
  174. M. Siemens, Q. Li, M. Murnane, H. Kapteyn, R. Yang, and K. Nelson, “Nanoscale Heat Transport Probed with Ultrafast Soft X-Rays,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 149 (2009).
  175. A. Thomann, R. Lock, C. La-O-Vorakiat, E. Gagnon, A. Sandhu, H.C. Kapteyn, M.M. Murnane, W. Li, “Direct measurement of the angular-dependence of molecular ionization cross-sections by time-resolved extreme-ultraviolet spectroscopy,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 72 (2009).
  176. W. Li, X. B. Zhou, R. Lock, S. Patchkovskii, O. Smirnova, A. Stolow, M. Murnane, and H. Kapteyn, “Probing Dynamics in Polyatomic Molecules Using High Harmonic Generation: the Role of Ionization Continua,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 63 (2009).
  177. M.M. Murnane and H.C. Kapteyn, “Ultrafast Molecular and Materials Dynamics probed by Coherent X-Rays,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 39 (2009).
  178. X. Zhou, R. Lock, N. Wagner, W. Li, H.C. Kapteyn, and M.M. Murnane, “Molecular Recollision Interferometry in High Harmonic Generation,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 87 (2009).
  179. L. Lytle, X. Zhang, P. Arpin, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “All-Optical Quasi-Phase Matching and Electron Trajectory Control of High-Order Harmonic Generation at 140 eV,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 36 (2009).
  180. D.A. Raymondson, R.L. Sandberg, W.F. Schlotter, K. Raines, C. La-O-Vorakiat, A. Paul, A.E. Sakdinawat, M.M. Murnane, H.C. Kapteyn, and J. Miao, “Lensless Microscopy and Holography with 60 nm Resolution using Tabletop Coherent Soft X-Rays,” Ultrafast Phenomena XVI: Proceedings of the 16th International Conference on Ultrafast Phenomena, Stresa Italy, June 2008. P. Corkum, S. Silvestri, K.A. Nelson, E. Riedle, R.W. Schoenlein Eds., Springer Series in Chemical Physics 92 , 146 (2009).
  181. D. Raymondson, R.L. Sandberg, W.F. Schlotter, K.S. Raines, C. La-o-Vorakiat, E. Townsend, A. Sakdinawat, A. Paul, J. Miao, M.M. Murnane, and H.C. Kapteyn, “Tabletop coherent diffractive microscopy with extreme ultraviolet light from high harmonic generation,” Metrology, Inspection, and Process Control for Microlithography XXIII: SPIE Advanced Lithography, San Jose CA, February 2009, SPIE Proc. 7272 , 72720F (2009).
  182. J.J. Rocca, F.J. Furch, B.A. Reagan, Y. Wang, D. Alessi, D. Martz, B. Luther, M. Berrill, S. Domingue, D. Kemp, F. Pedacci, V.N. Shlyaptsev, M. Marconi, and C.S. Menoni, “Progress in the development of compact high-repetition-rate soft x-ray lasers: gain saturation at 10.9 nm and first demonstration of an all-diode-pumped soft x-ray laser,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics, San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. SPIE 7451 , 745106 (2009).
  183. C.S. Menoni, F. Brizuela, Y. Wang, C.A. Brewer, B.M. Luther, F. Pedacci, P.W. Wachulak, M.C. Marconi , J.J. Rocca, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, D.T. Attwood, Jr., A.V. Vinogradov, I.A. Artyukov, Y.P. Pershyn, V. Kondratenko, “ Advances in full field microscopy with table-top soft x-ray lasers ,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics, San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. SPIE 7451 , 74510I (2009).
  184. F. Dong, S. Heinbuch, J.J. Rocca, E.R. Bernstein, “Studies of Neutral Al m C n Clusters Employing a Table-Top Soft X-Ray Laser,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics, San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. SPIE 7451 , 74510Q (2009).
  185. V.N. Shlyaptsev, J.J. Rocca, M. Grisham, G. Avaria, F. Tomasel, A. Noy, “ Prospective schemes for next generation X-ray lasers ,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics, San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. SPIE 7451 , 745103, (2009).
  186. M.C. Marconi, P.W. Wachulak, L. Urbanski, A. Isoyan, F. Jiang, Y.C. Cheng, J.J. Rocca, C.S. Menoni, and F. Cerrina, “Tabletop soft x-ray lithography ,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics, San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. SPIE 7451 , 74510J (2009).
  187. A. Isoyan, F. Jiang, Y. Cheng, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, M. Marconi, and F. Cerrina, “Extreme ultraviolet holographic lithography with a table-top laser,” Alternative Lithographic Technologies, F.M. Schellenberg and B.M.L. Fontaine, eds., SPIE Proc. 7271 , 72713° (2009).
  188. F. Brizuela, Y. Wang, C.A. Brewer, F. Pedacci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P.P. Naulleau, P.W. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, and C.S. Menoni, “Inspection 13.2-nm table-top full-field microscope,” Alternative Lithographic Technologies, San Jose, CA, USA: SPIE Proc. 7271 , 72713F-7 (2009).
  189. L. Vysin, T. Burian, J. Chalupsky, M. Grisham, V. Hajkova, S. Heinbuch, K. Jakubczak, D. Martz, T. Mocek, P. Pira, J. Polan, J.J. Rocca, B. Rus, J. Sobota, and L. Juha, “Characterization of focused beam of desktop 10-Hz capillary-discharge 46.9-nm laser,” P roc. SPIE 7361 , 73610O (2009).
  190. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “Sub-50nm extreme ultraviolet holographic imaging ,” Proc. SPIE 7358 , 735806 (2009).
  191. T. Popmintchev, M.-C. Chen, A. Bahabad, M. Gerrity, P. Arpin, P. Sidorenko, O. Cohen, M. Seaberg, R. Sandberg, S. Backus, X. Zhang, G. Taft, I.P. Christov, M.M. Murnane, and H.C. Kapteyn, “Phase Matching of High Harmonic Generation in the Soft and Hard X-ray Regions of the Spectrum,” OSA Conference on Nonlinear Optics, in Nonlinear Optics: Materials, Fundamentals and Applications , OSA Optical Society of America, Honolulu, HI, NThC3 (2009).
  192. H. Bravo, B. Szapiro, P. Wachulak, M.C. Marconi, W. Chao, E. Anderson, D.T. Attwood, C.S. Menoni, and J.J. Rocca, “ Nanometer-Scale Machining by Laser Ablation with a Focused Extreme Ultraviolet Laser Beam,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JTuD40 (2009) .
  193. M. Murnane, D. Attwood, and J.J. Rocca, “ Ultrafast Optics: Nanoscale Microscopy, Metrology and Patterning Using Compact and Large Scale Soft X-Ray Sources,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, SC247 (2009).
  194. Y. Wang, M. Berrill, F. Pedacci, M.M. Shakya, S. Gilbertson, Z. Chang, E. Granados, B. Luther, M. Larotonda, D. Alessi, and J. Rocca, “ Generation of a 1 Picosecond Soft X-Ray Laser Pulses from an Injection-Seeded Plasma Amplifier,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JWD5 (2009).
  195. F. Brizuela, Y. Wang, C.A. Brewer, F. Pedacci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P. Naulleau, P. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, and C.S. Menoni, “ 13.2 nm Table-Top Inspection Microscope for Extreme Ultraviolet Lithography Mask Defect Characterization,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JFA5 (2009).
  196. A. Isoyan, F. Jian, Y.-C. Cheng, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, M.C. Marconi, and F. Cerrina, “ Coherent Imaging Nano-Patterning with Extreme Ultraviolet Laser Illumination,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JFA7 (2009).
  197. C. La-O-Vorakiat, M. Siemens, J. Shaw, H. Nembach, S. Matthias, R. Adam, C.M. Schneider, M. Aeschlimann, T. Silva, M. Murnane, and H. Kapteyn, “Magneto-Optical Kerr Effect Probed Using Ultrafast High-Order Harmonic EUV Light,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, CPDA5 (2009).
  198. M. Siemens, Q. Li, M. Murnane, H. Kapteyn, R. Yang, E. Anderson, K. Nelson, “EUV Detection of High-Frequency Surface Acoustic Waves,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, CFN5 (2009).
  199. P. Sidorenko, A. Bahabad, T. Popmintchev, M. Murnane, H. Kapteyn, and O. Cohen, “Sawtooth grating-assisted-phase-matching,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, CThS1 (2009).
  200. D.A. Raymondson, R.L. Sandberg, E. Townsend, M. Seaberg, C. La-o-vorakiat, M.M. Murnane, H.C. Kapteyn, K. Raines, J. Miao, W. F. Schlotter, “Tabletop Coherent Diffractive Microscopy with Soft X-rays from High Harmonic Generation at 13.5 nm,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, CME5 (2009).
  201. J. Yin, L. Miaja-Avila, S. Backus, G. Saathoff, M. Aeschlimann, M. Murnane, and H. Kapteyn, “Wavelength dependence of the Laser-Assisted Photoelectric Effect on surfaces,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, CMQ5 (2009).
  202. E. Gagnon, A.S. Sandhu, V. Sharma, R. Santra, W. Li, P. Ho, P. Ranitovic, C.L. Cocke, M.M. Murnane, H.C. Kapteyn, “The Creation of Super-Excited Electronic Feshbach Resonances by EUV-induced Dissociation of O 2 ,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThD2 (2009).
  203. X. Zhou, R. Lock, N. Wagner, W. Li, H. Kapteyn, M. Murnane, “Elliptically Polarized High Harmonic Emission from Molecules Driven by Linearly Polarized Light,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThD6 (2009).
  204. P. Arpin, T. Popmintchev, N. Wagner, A. Lytle, O. Cohen, H.C. Kapteyn, M.M. Murnane, “High Harmonic Generation from Multiply Ionized Argon Extending Beyond 500 eV,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThG5 (2009).
  205. M.-C. Chen, M.R. Gerrity, T. Popmintchev, S. Backus, X. Zhang, M.M. Murnane, H.C. Kapteyn, “Spatially Coherent, Phase Matched, High-Order Harmonic Beams at 50 kHz,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThH2 (2009).
  206. A. Thomann, A. Bahabad, R. Trebino, M.M. Murnane, and H.C. Kapteyn, “Characterizing Isolated Attosecond Pulses from a Hollow-Core Waveguide Using Multi-Cycle Driving Pulses,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThB4 (2009).
  207. A. Bahabad, O. Cohen, M. Murnane, H. Kapteyn, “Application of Quasiperiodic and Random Quasi-Phase-Matching to High-Harmonic-Generation,” Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies 2009, Technical Digest (Optical Society of America, Washington, DC, 2009), Baltimore, MD, JThH3 (2009).
  208. D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, M. Berrill, D. Kemp, D. Patel, C. S. Menoni and J. J. Rocca, “Table-top Soft X-ray Laser Operating at 13.9 nm with Increased Average Power,” 23rd IEEE Photonics Society Annual Meeting, Denver, CO, Nov. 7-11, (2010).
  209. A. Sakdinawat, E. H. Anderson, K. A. Goldberg, D. Attwood, and B. La Fontaine, “Laser Based Aerial Microscope for At-Wavelength Characterization of Extreme Ultraviolet Lithography Masks,” 23rd IEEE Photonics Society Annual Meeting, Denver, CO, Nov. 7-11, (2010).
  210. C. S. Menoni; E. M. Krous; D. Patel; P. Langston; J. Tollerud; D. N. Nguyen; L. A. Emmert; A. Markosyan; R. Route; M. Fejer; W. Rudolph, “Advances in ion beam sputtered Sc2O3 for optical interference coatings,” Proceedings SPIE Vol. 7842, Laser-Induced Damage in Optical Materials: 2010, Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editors, 784202, (2010).
  211. F. Brizuela, S. Carbajo, D. Alessi, Y. Wang, D. Martz, A. Sakdinawat, K. Goldberg, D. Attwood, M. Marconi, J. Rocca, and C.S. Menoni, “Full-field microscope for EUVL mask characterization”, International X-Ray Microscopy Conference, Chicago, IL, Aug. 16-20, (2010).
  212. S. Carbajo, F. Brizuela, O. Buccafusca, E.H. Anderson, W. Chao, D.T. Attwood, J.J. Rocca, and C.S. Menoni, “Stop-action extreme ultraviolet imaging” International X-Ray Microscopy Conference, Chicago, IL, Aug. 16-20, (2010). Won 1 of 3 awards for best student paper.
  213. D. H. Martz, H. T. Nguyen, D. Patel, J. A. Britten, D. Alessi, E. Krous, Y. Wang, M. A. Larotonda, J. George, B. Knollenberg, B. M. Luther, J. J. Rocca, and C. S. Menoni, “Large Area High Efficiency Multilayer Dielectric Gratings for High Energy Laser Pulse Compression,” Ultrashort Pulse Laser Workshop, Directed Energy Professional Society, Broomfield, CO, June 15-18, (2010).
  214. L. Urbanski, P. Wachulak, F. Cerrina, A. Isoyan, F. Jiang, Y. C. Cheng, C.S. Menoni, J.J. Rocca, and M.C. Marconi, “Nanopatterning using Coherent Imaging Techniques,” 12th International Conference on X-Ray Lasers, Gwengju, South Korea, May 31-June 4th, (2010).
  215. F. Brizuela, S. Carbajo, D. Martz, D. Alessi, Y. Wang, B. Luther, A. Sakdinawat, W. Chao, E. H. Anderson,Y. Liu, K. A. Goldberg, D. T. Attwood, B. LaFontaine, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks”, 54th International Conference on Electron, Ion and Photon Beam Technologies and Nanofabrication, EIPBN, June 1-4, Anchorage, Alaska, US. C.S. Menoni, “Movies of nanoscale dynamics by extreme ultraviolet microscopy,” Progress in Quantum Electronics Conference, Snowbird, UT, Jan., (2011).
  216. M. C. Marconi, P. Wachulak, L. Urbanski, C. S. Menoni, J. J. Rocca, A. Isoyan, F. Jiang, Y.-C. Cheng and F. Cerrina, “Extreme Ultraviolet Lasers Demonstrate New Nano-Patterning Schemes,” 23rd IEEE Photonics Society Annual Meeting, Denver, CO, Nov. 7, (2010).
  217. C.S. Menoni, “Nanoscale Microscopy with Table-Top Extreme Ultraviolet Lasers”, presented at 19th International Workshop "Laser Physics", Iguazu Falls, Brazil, July, (2010). Invited.
  218. C.S. Menoni, F. Brizuela, S. Carbajo, Y. Wang, D. Alessi, B. M. Luther, A. Sakdinawat, K. Goldberg, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, M.C. Marconi, J.J. Rocca, “Reflection microscope for actinic mask inspection and other progress in soft x-ray laser nano-imaging,” 12th International Conference on X-Ray Lasers, Gwengju, South Korea, May-June, (2010).
  219. D.A. Alessi, D.H. Martz, B.M. Luther, Y. Wang, M.A. Berrill, D.J. Kemp, D. Patel, C.S. Menoni and J.J. Rocca, "High energy 13.9 nm table-top soft x-ray laser operating at 2.5 hz repetition rate," Conference on Lasers and Electro-Optics, Optical Society of America (2010)
  220. F. Brizuela, S. Carbajo, A. Sakdinawat, Y. Wang, D. Alessi, D. Martz, B. Luther, K.A. Goldberg, D.T. Attwood, B.L. Fontaine, J. Rocca and C. Menoni, "Table-top extreme ultraviolet laser aerial imaging of lithographic masks,” Conference on Laser Electro-Optics, Optical Society of America (2010)
  221. S. Carbajo, F. Brizuela, A. Sakdinawat, Y. Liu, W. Chao, E.H. Anderson, A.V. Vinogradov, I.A. Artioukov, D.T. Attwood, M.C. Marconi, J.J. Rocca and C.S. Menoni, “Movies at the nanoscale using extreme ultraviolet laser light,” Frontiers in Optics, Optical Society of America (2010)
  222. D.H. Martz, H.T. Nguyen, D. Patel, J.A. Britten, D. Alessi, E. Krous, Y. Wang, M. Larotonda, J. George, B. Knollenberg, B.M. Luther, J.J. Rocca and C.S. Menoni, "Large area high efficiency broad bandwidth 800 nm dielectric gratings for high energy laser pulse compression", Conference on Lasers and Electro-Optics, Optical Society of America (2010)
  223. B.A. Reagan, F.J. Furch, B.M. Luther, A.H. Curtis, S.P. Meehan and J.J. Rocca, “Demonstration of a 1 j diode-pumped yb:Yag chirped pulse amplification laser system,” Conference on Advanced Solid-State Photonics, Optical Society of America (2010)
  224. B.A. Reagan, F.J. Furch, B.M. Luther, A.H. Curtis, S.P. Meehan and J.J. Rocca, “Soft x-ray laser pumped by a joule-class, all-diode-pumped laser system,” Conference on Lasers and Electro-Optics, Optical Society of America (2010)
  225. J.J. Rocca, F.J. Furch, B.A. Reagan, Y. Wang, D. Alessi, D. Martz, B.M. Luther, A.H. Curtis, S.P. Meehan, S. Domingue and D. Kemp, “Recent advances of table-top soft x-ray lasers,” Conference on Advanced Solid-State Photonics, Optical Society of America (2010)
  226. Y. Wang, D. Alessi, D. Martz, M. Berrill, B. Luther and J. Rocca, “1 hz operation of a gain-saturated 10.9 nm table-top laser,” Quantum Electronics and Laser Science Conference, Optical Society of America (2010)
  227. J.J. Rocca, D. Alessi, D.H. Martz, Y. Wang, B. Reagan, B.M. Luther, F. Furch, A. Curtis, K. Wernsing, M. Berrill, “Advances in compact high brightness soft x-ray lasers: sub-10 nm wavelengths and smaller size,” 41st Progress in Quantum Electronics Symposium, Snowbird, UT, Jan. 2-6, (2011). Plenary Talk, Invited.
  228. J.J. Rocca, B.A. Reagan, F.J. Furch, Y. Wang, D. Alessi, D.H. Martz, B.M. Luther, M. Berrill and A.H. Curtis, “Advances in Compact High Repetition Rate Soft X-Ray Lasers,” The 23rd Annual Meeting of the IEEE Photonics Society, Denver, CO, November 7 – 11, (2010). Invited.
  229. M. Berrill, B.M. Luther, J.J. Rocca, Y. Wang, D. Alessi and D.H. Martz, “Demonstration of 10.9 nm Table-Top Soft X-Ray Laser at 1 Hz Repetition Rate,” The 23rd Annual Meeting of the IEEE Photonics Society, Denver, CO, November 7 – 11, (2010). Invited.
  230. J.J. Rocca, F. Furch, B. Reagan , D. Alessi , Y. Wang, D.H. Martz , M. Berrill, A.H. Curtis, D. Kemp, S. Domingue, V.N. Shlyaptsev, and B.M. Luther, “Demonstration of an All-Diode-Pumped Soft X-Ray laser and Other Advances in Table-top Soft X-Ray Laser Development,” 12th International Conference on X-Ray Lasers, Gwangju, Korea, May 30 – June 4, (2010). Invited.
  231. A. Klisnick, O. Guilbaud, J.P. Goddet, J. Habib, F. Tissandier, L.M. Meng, S. Domingue, L. Urbanski, J. Gautier, B. Zielbauer, S. de Rossi, Y. Wang, D. Alessi, B. Luther, S. Kazamias, D. Ros, D. Phalippou, G. Maynard, D. Benredjem, A. Calisti, S. Sebban, J.J. Rocca, M. Marconi, D. Joyeux, and P. Zeitoun, “Temporal coherence and spectral width of seeded and ASE XUV lasers,” 12th International Conference on X-Ray Lasers, Gwangju, Korea, May 30 – June 4, (2010). Invited.
  232. J.J. Rocca, F.J. Furch, B.A. Reagan, Y. Wang, D. Alessi, D. Martz, B.M. Luther, A.H. Curtis, S.P. Meehan, S. Domingue, D. Kemp, “New advances in high repetition rate table-top soft x-ray lasers,” SPIE Photonics Europe, Brussels, Belgium, April 12 – 16, (2010). Invited.
  233. J.J. Rocca, F.J. Furch, B.A. Reagan, Y. Wang, D. Alessi, D. Martz, B.M. Luther, A.H. Curtis, S.P. Meehan, S. Domingue, and D. Kemp, “Recent Advances of Table-Top Soft X-ray Lasers,” Advanced Solid-State Photonics (ASSP), San diego, CA, Jan. 31–Feb. 3, (2010). Invited.
  234. J.J. Rocca, D. Alessi, Y. Wang, D.H. Martz, F. Furch, B. Reagan, M. Berrill, and B.M. Luther, “Table-top soft x-ray lasers with shorter wavelengths and smaller size,” 40th Progress in Quantum Electronics Symposium, Snowbird, UT, Jan. 3-6, (2010). Invited.
  235. J. Grava, D.P. Ryan, M.A. Purvis, J. Filevich, V.N. Shlyaptsev, S.J. Moon, J. Dunn, and J.J. Rocca, “Soft X-Ray Laser Interferometry Study of Dense Plasma Jet Collimation,” The 23rd Annual Meeting of the IEEE Photonics Society Denver, CO, November 7 – 11, (2010).
  236. D. Alessi, M. Berrill, Y. Wang, S. Domingue, D.H. Martz, B.M. Luther, M. Limin, O. Guilbaud, A. Klisnick, and J.J. Rocca, “Beam Characteristics of an Injection-Seeded Solid-Target Plasma Soft X-Ray Laser,” The 23rd Annual Meeting of the IEEE Photonics Society Denver, CO, November 7 – 11, (2010).
  237. Y. Wang, D. Alessi, D.H. Martz, M. Berrill, B. M. Luther, J.J. Rocca, “Demonstration of 10.9 nm table-top soft x-ray laser at 1 Hz repetition rate,” The 23rd Annual Meeting of the IEEE Photonics-Society Denver, CO, November 7 – 11, (2010).
  238. AH Curtis, BA Reagan, FJ Furch, BM Luther, KA Wernsing, SP Meehan, JJ Rocca “Demonstration of Soft X-ray Laser Driven by an All Diode Pumped CPA Laser System,” The 23rd Annual Meeting of the IEEE Photonics-Society Denver, CO, November 7 – 11, (2010).
  239. L.M. Meng, O. Guilbaud, Y. Wang, D. Alessi, S. Domingue, B. Luther, J.J. Rocca and A. Klisnick, “Measurement of the temporal coherence of a seeded GRIP transient Mo soft X-ray laser,” 12th International Conference on X-Ray Lasers, Gwangju, Korea, May 30 – June 4, (2010).
  240. F. Dong, E.R. Bernstein, and J.J. Rocca, “Single-Photon Ionization Soft X-Ray Laser Mass Spectrometry of Potential Hydrogen Storage Materials,” 12th International Conference on X-Ray Lasers, Gwangju, Korea, May 30 – June 4, (2010).
  241. J. Grava, M.A. Purvis, J. Filevich, D.P. Ryan, S.J. Moon, J. Dunn, V.N. Shlyaptsev, and J.J. Rocca, “Soft x-ray laser interferometry of dense plasma jets collimated by radiation cooling,” 12th International Conference on X-Ray Lasers, Gwangju, Korea, May 30 – June 4, (2010).
  242. J.J. Rocca, “Extreme Ultraviolet Lasers,” EUV ERC Research Symposium, SEMATECH, Albany NY, February 2010.
  243. T. Popmintchev, M.-C. Chen, M. Gerrity, P. Arpin, A. Bahabad, D. Popmintchev, H. Kapteyn, M. Murnane, M. Grisham, J. Rocca, I. Christov, E. Gullikson, F. Salmassi, Y. Liu, O. Cohen, “Coherent Ultrafast EUV Beams from FS Lasers,” EUV ERC Research Symposium, SEMATECH, Albany NY, February 2010.
  244. B.A. Reagan, F. J. Furch, B.M. Luther, A.H. Curtis, S.P. Meehan, J.J. Rocca, “Demonstration of a 1 J Diode-Pumped Yb:YAG Chirped Pulse Amplification Laser System,” Advanced Solid-State Photonics (ASSP), San Diego, CA, Jan. 31–Feb. 3, (2010).
  245. D. Ryan, J. Grava, M. Purvis, J. Filevich, V. Shlyaptsev, and J. Rocca, “Soft x-ray laser interferometry of dense plasma jets collimated by radiation cooling,” Annual Meeting of the Four Corners Section of the APS, Ogden, Utah, Oct. 15 – 16, (2010). Bulletin of the American Physical Society Volume 55, Number 9.
  246. L. Urbanski, M. Marconi, J. Rocca, L. Meng, and A. Klisnick, “Linewidth measurement of table-top EUV laser,” Annual Meeting of the Four Corners Section of the APS, Ogden, Utah, Oct. 15 – 16, (2010). Bulletin of the American Physical Society Volume 55, Number 9.
  247. M.G. Capeluto, M.C. Marconi and C. Iemmi “Design of a phase shifting interferometer in the EUV for high precision metrology,” Journal Of Physics: Conference Series 274, (2011), 012026.
  248. P. W. Wachulak, M. C. Marconi, A. Isoyan, L. Urbanski, C. S. Menoni, J.J. Rocca, A. Bartnik, H. Fiedorowicz, “Nanometer scale imaging with table top extreme ultraviolet sources”, X-ray and XUV Plasma sources and applications, Czech Technical University in Prague, FNSPE – Dept. of Physical Electronics, Prague, Czech Republic, 24 November, (2010).
  249. P. W. Wachulak, R. Sandberg, A. Isoyan, F. Brizuela, L. Urbanski, A. Bartnik, M.C. Marconi, R. Bartels, C. S. Menoni, J. J. Rocca and H. Fiedorowicz, “Nanometer scale imaging with table top extreme ultraviolet sources,” 17th Slovak-Czech-Polish Optical Conference, Wave and Quantum Aspects of Contemporary Optics, SOREA Máj Hotel, Liptovský Ján, Slovakia, 6-10 September (2010).
  250. P. W. Wachulak, A. Bartnik, H. Fiedorowicz, R. Sobierajski, J. Pelka, M. C. Marconi, R. A. Bartels, C. S. Menoni, J. J. Rocca, “Holographic nanoimaging using coherent EUV radiation,” European XFEL Users' Meeting 2010 - HASYLAB Users' Meeting 2010, DESY, Hamburg, Germany (2010).
  251. W. Li, Agnieszka A. Jaron-Becker, C. W. Hogle, V. Sharma, X. Zhou, A. Becker, H. C. Kapteyn and M. M. Murnane, “Visualizing Electron Rearrangement in Space and Time during the Transition from a Molecule to Atoms,” Proceedings of the National Academy of Sciences of the United States of America Volume: 107 Issue: 47 Pages: 20219 -20222
  252. J. J. Rocca, Y. Wang, D. Alessi, B. Reagan , B. M. Luther, M. A. Curtis , K. Wernsing , F. Furch, , M. Woolston, D. H. Martz, V.N. Shlyaptsev , M. Berrill, “Advances in High Repetition Rate Table-Top Soft X-Ray Lasers”, SPIE Optics and Photonics Meeting, San Diego CA, August 2011.
  253. I.D. Howlett, F. Brizuela, S. Carbajo, D. Peterson, M. C. Marconi, J. J. Rocca, C. S. Menoni; A. Sakdinawat, Y. Lui, D. T. Attwood, “Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes,” Proc. SPIE Vol. 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX, James Dunn; Annie Klisnick, Editors, 81400W. DOI: 10.1117/12.892927, (2011)
  254. L. Urbanski; P. Wachulak; A. Isoyan; C. S. Menoni; J.J. Rocca; M. Marconi, “Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser,” Procc. SPIE Vol. 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX, James Dunn; Annie Klisnick, Editors, 81400T, DOI: 10.1117/12.892855, (2011).
  255. T. Popmintchev, M. Chen, D. Popmintchev, S. Alisauskas, G. Andriukaitis, T. Balciunas, A. Pugzlys, A. Baltuska, M. Murnane, and H. Kapteyn, “Bright Coherent Attosecond-to-Zeptosecond Kiloelectronvolt X-ray Supercontinua,” Conference on Lasers and Electro-optics (CLEO), Baltimore, MD, May 2011. Paper PDPC12.
  256. M. D. Seaberg, D. E. Adams, W. F. Schlotter, Y. Liu, C. Menoni, M. Murnane, H. C. Kapteyn, “Sub-30nm Spatial Resolution Imaging Using a Tabletop 13nm High Harmonic Source,” Conference on Lasers and Electro-optics (CLEO), Baltimore, MD, May 2011. Paper CTuH3. Invited Talk.
  257. Q. Li, K. Hoogeboom-Pot, M. Siemens, M. M. Murnane, H. C. Kapteyn, R. Yang, E. H. Anderson, O. Hellwig, B. Gurney, K. A. Nelson, “Generation and Detection of Very Short-Wavelength Surface Acoustic Waves at Nano-interfaces,” Conference on Lasers and Electro-optics (CLEO), Baltimore, MD, May 2011. Paper QTuN4.
  258. G. Andriukaitis, T. Balciunas, A. Pugzlys, A. Baltuska, T. Popmintchev, M. C. Chen, M.M. Murnane, and H.C. Kapteyn, “Phase-Matched Harmonic Generation beyond the Water Window with a Mid-IR Parametric Amplifier,” Conference on Lasers and Electro-optics (CLEO Europe), Munich, Germany, May 2011. Paper CG5.4.
  259. S. Carbajo, F. Brizuela, A. Sakdinawat, Y. Liu, W. Chao, W. Chao, E. H. Anderson, A. Vinogradov, I. Artioukov, D. T. Attwood, M. C. Marconi, J.J Rocca, K. Buchanan, and C.S. Menoni, "Single-Shot Imaging of Nanoscale Dynamics by Extreme Ultraviolet Microscopy, " in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA121, (2011)
  260. L. Urbanski, P. Wachulak, A. Isoyan, A. Stein, C.S. Menoni, J.J. Rocca, and M. C. Marconi , "Talbot Effect: A Venerable Idea with New Applications in Nanofabrication," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CMEE4.
  261. M. Seaberg, D. Adams, W. Schlotter, Y. Liu , C.S. Menoni, M. Murnane, and H. Kapteyn, "Sub-30nm Spatial Resolution Imaging Using a Tabletop 13nm High Harmonic Source," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CTuH3.
  262. M. D. Seaberg, D. E. Adams, C.-C. Chen, J. Miao, W. F. Schlotter, Y. Liu, C. Menoni, M.Murnane, H. C. Kapteyn,” Ultrahigh Resolution EUV imaging using a Tabletop High Harmonic Light Source, OSA Conference on Nonlinear Optics (NLO), Kauai, Hawaii, July 2011. Paper NThA4.
  263. S. Carbajo, F. Brizuela, A. Sakdinawat, Y. Liu, W. Chao, W. Chao, E. H. Anderson, A. Vinogradov, I. Artioukov, D. T. Attwood, M. C. Marconi, J. Rocca, K. Buchanan, and C.S. Menoni, "Single-Shot Imaging of Nanoscale Dynamics by Extreme Ultraviolet Microscopy," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA121
  264. L. Urbanski, P. Wachulak, A. Isoyan, A. Stein, C.S. Menoni, J. Rocca, and M. C. Marconi , "Talbot Effect: A Venerable Idea with New Applications in Nanofabrication," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, May 1-6, 2011), paper CMEE4.
  265. D. N. Nguyen, L. Emmert, W. Rudolph, D. Patel, and C.S. Menoni, " The reduction of laser damage resistance of optical coatings to subpicosecond pulse trains under vacuum," in CLEO:2011 - Laser Applications to Photonic Applications , OSA Technical Digest (CD) (Optical Society of America, 2011), paper CTuE3.
  266. M. Seaberg, D. Adams, W. Schlotter, Y. Liu, C.S. Menoni, M. Murnane, and H. Kapteyn, "Sub-30nm Spatial Resolution Imaging Using a Tabletop 13nm High Harmonic Source," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CTuH3.
  267. M. Gerrity, S. Brown, T. Popmintchev, M. Chen, S. Witte, M. M. Murnane, and H. C. Kapteyn, S. Backus, “High power, 60MHz, cryogenically cooled, mode-locked, Yb:YAG oscillator,” Conference on Lasers and Electro-optics (CLEO), Baltimore, MD, May 2011. Paper CThAA4.
  268. C. Clifford, T. Chan, A. Neureuther, K. A. Goldberg, I. Mochi, T. Liang, “Investigation of buried EUV mask defect printability using actinic inspection and fast simulation”, Proc. SPIE, 7488 , 74882H (2011). Invited.
  269. L. Xu, D. Patel, C. S. Menoni, J.-Y. Yeh, L. J. Mawst, N. Tansu, “ Investigation of the Carrier Escape and Capture Processes in InGaAsN Quantum Well Lasers, ” IEEE Photonics Annual Meeting, Washington DC, Oct. 2011.
  270. E. Malm, J. J. Rocca, C. S. Menoni and M. C. Marconi, “Extreme Ultraviolet Fourier Holography, IEEE Photonics Annual Meeting, Washington DC, October 2011.
  271. S. Carbajo, I. Howlett, M. C. Marconi, J. J. Rocca and C. S. Menoni, “Movies of Nanoscale Dynamics by Soft X-Ray Microscopy,” IEEE Photonics Annual Meeting, Washington DC, Oct. (2011).
  272. L. Urbanski, P. Wachulak, A. Isoyan, A. Stein, C. S. Menoni, J. J. Rocca and M. C. Marconi, “Scalable Talbot Lithography with an Extreme Ultraviolet Table Top Laser,” IEEE Photonics Annual Meeting, Washington DC, Oct. 2011.

 

Publications that result from Center Support
In Trade Journals:

  1. W. Chao, E. Anderson, G. Denbeaux, B. Harteneck, J.A. Liddle, A. Pearson, D. Olynick, F. Salmassi, CY Song, D. Attwood, "Photon-based Microscopy with 20-nm Spatial Resolution," Optics and Photonic News, 14 , 12 (2003).
  2. Y. Wang, M.A. Larotonda, B.M. Luther, D. Alessi, M. Berrill, M.C. Marconi, V.N. Shlyaptsev, J.J. Rocca, “High Repetition Rate Tabletop Soft X-ray Lasers with Saturated Output at Wavelengths down to 13.2 nm ,” Optics & Photonics News, “Optics in 2005” 16 , No 12, p. 26, (2005).
  3. G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, C.S. Menoni, M.C. Marconi, J.J. Rocca, W. Chao, J.A. Liddle, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Persyn, V.V. Kondratenko, “Nano-Imaging with Compact Extreme Ultraviolet Lasers ,” Optics & Photonics News, “Optics in 2005” 16 , No 12, p. 25, (2005).
  4. F. Brizuela, H. Bravo, M. Berrill, G. Vaschenko, B. Longhon, E.H. Anderson, W. Chao, D.T. Attwood, O. Hamberg, S. Bloom, J.J. Rocca, and C.S. Menoni, “Ablation of Sub-100-nm Features with a Tabletop Soft X-ray Laser,” Optics and Photonics News, “Optics in 2007,” 18 , 45, (2007).
  5. P.W. Wachulak, M.C. Marconi, R.A. Bartels, C.S. Menoni, and J.J. Rocca, “Numerical Optical Sectioning for 3D Holographic Images with EUV Lasers,” Optics and Photonics News, “Optics in 2007,” 18 , 22, (2007).
  6. S. Kane, J. Squier, R. Jimenez, L. Kuznetsova, F. Wise, H. Kapteyn, and B. Touzet, “Reflection grisms compensate dispersion in ultrafast systems,” Laser Focus World 43 (5), 95, (2007).
  7. H.C. Kapteyn, O. Cohen, X.S. Zhang, A. Lytle, and M.M. Murnane, “Attosecond nonlinear optics open the door to coherent x-rays,” Laser Focus World 43 (5), 89, (2007).
  8. A.L. Lytle, X. Zhang, O. Cohen, M.M. Murnane, and H.C. Kapteyn, “All-Optical Quasi-Phase Matching in Extreme Nonlinear Optics,” Opt. Photon. News 18 (12), 32, (2007).
  9. Y. Wang, M. Berrill, F. Pedacci, M.M. Shakya, S. Gilbertson, Z. Chang, E. Granados, B.M. Luther, M.A. Larotonda and J.J. Rocca, “Picosecond Soft X-Ray Laser Pulses from an Injection-Seeded Plasma Amplifier,” Optics & Photonics News, “Optics in 2009,” 20 , 4 (2009).

 

Publications that result from Associated Projects
In Peer-Reviewed Technical Journal:

  1. Emily A. Gibson, Ariel Paul, Nicholas Wagner, Ra'anan Tobey, Ivan P. Christov, David T. Attwood, Eric Gullikson, Andy Aquila, Margaret M. Murnane, and Henry C. Kapteyn, “Generation of coherent soft x-rays in the water window using quasi phase-matched harmonic generation ,” Science 302 , 95 (2003). (funded by NSF JILA Group Grant and DOE)
  2. E.C. Hammarsten, B. Szapiro, E. Jankowska, J. Filevich, M.C. Marconi, and J.J. Rocca, “Soft X-Ray Laser Diagnostics of Exploding Aluminum Wire Plasmas ,” Applied Phys. B 78 , 933-937 (2004)
  3. Emily A. Gibson, Ariel Paul, Nicholas Wagner, Ra'anan Tobey, Ivan P. Christov, Margaret M. Murnane, and Henry C. Kapteyn, “Very High Order Harmonic Generation in Highly Ionized Argon ,” Physical Review Letters 92 , 033001 (2004). (funded by DOE and NSF JILA Group Grant)
  4. A. Rahman, J.J. Rocca , and J.F. Wyart, “Classification of the Nickel-like Silver Spectrum from a Fast Capillary Discharge ,” Physica Scripta, 70 , 21, (2004).
  5. P. Zeitoun, P. Balcou, S. Bucourt, F. Delmotte, G. Dovillaire, D. Douillet, J. Dunn, G. Faivre, M. Fajardo, K.A. Goldberg, S. Hubert, J.R. Hunter, M. Idir, S. Jacquemot, S. Kazamias, S. Le Pape, X. Levecq, C.L.S. Lewis, R. Marmoret, P. Mercere, A.S. Morlens, P.P. Naulleau, M.F. Ravet, C. Remond, J.J. Rocca, R.F. Smoth, P. Troussel, C. Valentin, L. Vanbostal, “Recent Developments in X-UV optics and X-UV diagnostics ,” Applied Phys. B 78, 983, (2004).
  6. J. Filevich, J.J. Rocca, M.C. Marconi, R.F. Smith, J. Dunn, R. Keenan, J.R. Hunter, S.J. Moon, J. Nilsen, A. Ng, V.N. Shlyaptsev, “Picosecond resolution soft x-ray laser plasma interferometry ,” Applied Optics, 43, 19, 3938, (2004).
  7. P.P. Naulleau, K.A. Goldberg, E.Anderson, J.P. Chain, P.Denham, K.Jackson, A.Morlens, S.Rekawa, F.Salmassi “Extreme ultraviolet microexposures at the Advanced Light Source using the 0.3 numerical aperture micro-exposure tool optic ,” J. Vac. Sci. Technol., B 22(6), 2962, (2004).
  8. P.P. Naulleau, J. Alexander Liddle, F.Salmassi, E.H. Anderson, E.M. Gullikson, “Design, fabrication, and characterization of high-efficiency extreme-ultraviolet diffusers ,” Applied Optics 43 , No28, 5323, (2004).
  9. J. Filevich, J.J. Rocca, M.C. Marconi, S.J. Moon, J. Nilsen, J.H. Scofield, J. Dunn, R.F. Smith, R. Keenan, J.R. Hunter, V.N. Shlyaptsev, “Observation of a multiply ionized plasma with index of refraction greater than one ,” Physical Review Letters 94 , 035005, (2005).
  10. R.F. Smith, J. Dunn, J. Filevich, S. Moon, J. Nilsen, R. Keenan, V.N. Shlyaptsev, J.J. Rocca, J.R. Hunter, M.C. Marconi, “Plasma conditions for improved energy coupling into the gain region of the Ni-like Pd transient collisional x-ray laser ,” Physical Review E 72 , 036404, (2005).
  11. J. Dunn, J. Filevich, R.F. Smith, S.J. Moon, J.J. Rocca, R. Keenan, J. Nilsen, V.N. Shlyaptsev, J.R. Hunter, A. NG, M.C. Marconi, “Picosecond 14.7 nm interferometry of high intensity laser-produced plasmas ,” Laser and Particle Beams 23 , 9, (2005).
  12. P. Naulleau, “Effect of mask-roughness on printed contact-size variation in extreme-ultraviolet lithography,” Applied Optics , 44 , 183, (2005).
  13. P. Naulleau, P. Denham, S. Rekawa, “Design and implementation of a vacuum compatible laser-based subnanometer resolution absolute distance measurement system,” Optical Engineering , 44 , 013605, (2005).
  14. P. Naulleau, J.P. Cain, E. Anderson, K. Dean, P. Denham, K.A. Goldberg, B. Hoef, K. Jackson, “Characterization of the Synchrotron-based 0.3-NA EUV Microexposure Tool at the ALS,” Journal of Vacuum Science and Technology B 23 , 2840, (2005).
  15. H. Takenaka, S. Ichimaru, E.M. Gullikson, “EUV beam splitter for use in the wavelength region around 6 nm,” Journal of Electron Spectroscopy and Related Phenomena 144 , 1043, (2005).
  16. H. Takenaka, S. Ichimaru, K. Nagai, T. Ohchi, H. Ito, E.M. Gullikson, “Multilayer mirrors for mu -XPS using a Schwarzschild objective,” Wiley Surface & Interface Analysis 37 , 181, (2005).
  17. H. Takenaka, S. Ichimaru, T. Ohchi, E.M. Gullikson. “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” Journal of Electron Spectroscopy and Related Phenomena 144 , 1047, (2005).
  18. J. Filevich, J.J. Rocca, M.C. Marconi, S.J. Moon, J. Nilsen, J.H. Scofield, J. Dunn, R.F. Smith, R. Keenan, J.R. Hunter, V.N. Shlyaptsev, “Observation of Multipply ionized plasmas with dominant bound electron contribution to the index of refraction ,” Journal of Quantitative Spectroscopy and Radiative Transfer, 99 , 165, (2006).
  19. J.J. Rocca, H. Kapteyn, D. Attwood, M. Murnane, C.S. Menoni, and E. Anderson, “Tabletop Lasers in the Extreme Ultraviolet ,” Optics & Photonics News, 17 , 11, 30, (2006).
  20. Y. Wang, E. Granados, M.A. Larotonda, M. Berrill, B.M. Luther, D. Patel, C.S. Menoni, and J.J. Rocca, “High Brightness Soft X-ray Laser by Injection Seeding of a Dense Plasma Amplifier ,” Optics & Photonics News, “Optics in 2006 ,” 17 , 12, 46, (2006).
  21. D. Gaudiosi, B. Reagan, T. Popmintchev, M. Grisham, M. Berrill, O. Cohen, B.C. Walker, M.M. Murnane, H.C. Kapteyn, and J.J. Rocca, “High Harmonic Generation from Ions in a Capillary Discharge Plasma Waveguide ,” Optics & Photonics News, “Optics in 2006 ,” 17 , 12, 44, (2006).
  22. C. Brewer, F. Brizuela, G. Vaschenko, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca, C.S. Menoni, E.H. Anderson, W. Chao, Y. Liu, and D.T. Attwood, “Light-Based Microscopy Reaches Sub-38nm Resolution with Extreme UV Laser ,” Optics & Photonics News, “Optics in 2006 ,” 17 , 12, 45, (2006).
  23. N.L. Wagner, A. Wüest, I.P. Chrsitov, T. Popmintchev, X. Zhou, M.M. Murnane, and H.C. Kapteyn, “High-Order X-Ray Raman Scattering Using Coherent Electrons from High Harmonic Generation ,” Optics & Photonics News, “Optics in 2006 ,” 17 , 12, 43, (2006). Also featured on cover.
  24. L. Miaja-Avila, G. Saathoff, C. Lei, M. Aeschlimann, J.L. Gland, M.M. Murnane, H.C. Kapteyn, “The Laser Assisted Photoelectric Effect from Solids ,” Optics & Photonics News, “Optics in 2006 ,” 17 , 12, 47, (2006).
  25. J. Filevich, J. Grava, M. Purvis, M.C. Marconi, J.J. Rocca, J. Nilsen, J. Dunn, and W.R. Johnson, “Prediction and observation of tin and silver plasmas with index of refraction greater than one in the soft x-ray range ,” Physical Review E 74 , 016404, (2006).
  26. K.A. Goldberg, A. Barty, Y. Liu, P. Kearney, Y. Tezuka, T. Terasawa, J. S. Taylor, H.-S., Han, and O.R. Wood, “Actinic inspection of EUV programmed multilayer defects and cross-comparison measurements” J. Vac. Sci. & Technol. B24 , (2006).
  27. P. Naulleau, J. Cain, E. Anderson, K. Dean, P. Denham, K. Goldberg, B. Hoef , and K. Jackson, “Extreme ultraviolet lithography capabilities at the advanced light source using a 0.3-NA optic” IEEE JQE 42 , 44, (2006).
  28. J. Cain, P. Naulleau, E. Gullikson, C. Spanos, “Lithographic characterization of the flare in the Berkeley 0.3-numerical aperture extreme ultraviolet microfield optic ,” J. Vac. Sci. & Technol. B24 , (2006).
  29. E.H Anderson, “Specialized electron beam nanolithography for EUV and X-ray diffractive optics ,” IEEE Journal of Quantum Electronics 42 , 1-2, 27, (2006).
  30. P. Naulleau, J. Cain, and K. Goldberg, “Lithographic characterization of the spherical error in an EUV optic using a programmable pupil fill illuminator ,” Appl. Opt. 45 , 1957, (2006).
  31. J. Cain, P. Naulleau, and C. Spanos, “Resist-based measurement of the contrast transfer function in a 0.3-numerical aperture extreme ultraviolet microfield optic ,” J. Vac. Sci. & Technol. B24 , 326, (2006).
  32. F. Salmassi, P.P. Naulleau, E.M. Gullikson., D.L. Olynick, and J.A. Liddle, “EUV binary phase gratings: Fabrication and application of diffractive optics” J. Vac. Sci. Technol. B., (2006)
  33. F. Salmassi, P.P. Naulleau, and E.M. Gullikson, “Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region ,” Appl. Opt. 45 , 2404, (2006).
  34. J. Fassbender, L. Bischoff, R. Mattheis, and P. Fischer, “Magnetic domains and magnetization reversal of ion-induced magnetically patterned Ruderman-Kittel-Kasuya-Yoshida-coupled Ni81Fe19/Ru/Co90Fe10 films ,” J. Appl. Phys. 99 , 08G301, (2006).
  35. M. Bolte, R. Eiselt, G. Meier, D.-H. Kim, and P. Fischer, “Real space observation of dipolar interaction in arrays of Fe microelements ,” Phys. Rev. B 73 , 214429, (2006).
  36. L.J. Heyderman, S. Czekaj, F. Nolting, E. Müller, P. Fischer, Ph. Gasser, and L. López-Díaz, “Photoemission electron microscopy study of remnant magnetic domain states in ferromagnetic wedge films deposited on substrates with micrometer-sized square plateaus ,” J. Appl. Phys, 99 , 063904, (2006).
  37. J. Filevich, J. Grava, M. Purvis, M.C. Marconi, J.J. Rocca, J. Nilsen, J. Dunn, and W.R. Johnson, “Multiply ionized carbon plasmas with index of refraction greater than one ,” Laser Particle Beams, 25 , 1, (2007).
  38. M. Purvis, J. Grava, J. Filevich, M.C. Marconi, J. Dunn, S.J. Moon, V.N. Shlyaptsev, E. Jankowska, and J.J. Rocca, “Dynamics of converging laser-created plasmas in semi-cylindrical cavities studied using soft x-ray laser interferometry,” Physical Review E, 76 , 046402, (2007).
  39. P.P. Naulleau, J.P. Cain, “ Experimental and model-based study of the robustness of line-edge roughness metric extraction in the presence of noise,” J. Vac. Sci. Technol. B 25 , 1647, (2007).
  40. R. Soufli, R.M. Hudyma, E. Spiller, E.M. Gullikson, M.A. Schmidt, J.C. Robinson, S.L. Baker, C.C. Walton, J.S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt. 46 , 3736, (2007).
  41. P. Naulleau, F. Salmassi, E. Gullikson, J. Liddle, “Design and fabrication of a high-efficiency extreme ultraviolet binary phase-only computer-generated hologram,” Appl. Opt. 46 , 2581, (2007).
  42. P. Fischer, “Towards a deeper insight into strongly correlated electron systems – the symbiosis between experiment and theory,” J. Phys. Condensed Matter 19 , 181002, (2007).
  43. S. Bajt, H.N. Chapman, E. Spiller, S. Hau-Riege, J. Alameda, A.J. Nelson, C.C. Walton, B. Kjornrattanawanich, A. Aquila, F. Dollar, E. Gullikson, C. Tarrio, S. Grantham, “Multilayers for next generation x-ray sources,” SPIE 6586 , 18, (2007).
  44. I. Guhr, S. van Dijken, G. Malinowski, P. Fischer, F. Springer, O. Hellwig, M. Albrecht, “Investigation of Magnetization Reversal in Exchange Biased Nanocap Arrays,” J. Phys. D: Appl. Phys. 40 , 3005, (2007).
  45. G. Meier, M. Bolte, R. Eiselt, B. Kruger, D.-H. Kim, P. Fischer, “Direct imaging of current driven stochastic domain-wall motion and deformation,” Phys. Rev. Lett. 98 , 187202, (2007). Also selected for Physical Review Focus.
  46. M.S. Pierce, C.R. Buechler, L.B. Sorensen, S.D. Kevan, E.A. Jagla, J.M. Deutsch, T. Mai, O. Narayan, J.E. Davies, K. Liu, G.T. Zimanyi, H.G. Katzgraber, O. Hellwig, E.E. Fullerton, P. Fischer, J.B. Kortright, “Disorder-induced magnetic memory: Experiments and theories,” Phys. Rev. B 75 , 144406, (2007).
  47. K.A. Goldberg, K. Takase, P.P. Naulleau, H. Han, A. Barty, H. Kinoshita, K. Hamamoto, “Evaluating EUV mask pattern imaging with two EUV microscopes,” Proc. SPIE 6921, (2008)
  48. J. Nation, P. Naulleau, “Model-based pupil-fill optimization for the SEMATECH Berkeley EUV microfield exposure tool,” SPIE, 6151 , (2008).
  49. A. Sakdinawat, Y. Liu “Phase contrast soft x-ray microscopy using Zernike zone plates,” Opt. Express, 16 , 1559, (2008).
  50. M. Purvis, J. Grava, J. Filevich, M.C. Marconi, J. Dunn, S.J. Moon, V.N. Shlyaptsev, E. Jankowska, and J.J. Rocca, “Soft x-ray laser interferometry of colliding laser-created plasmas in semi-cylindrical cavities,” IEEE Transactions on Plasma Sciences 36 , 4, 1134, (2008).
  51. J. Grava, M.A. Purvis, J. Filevich, M.C. Marconi, J. Dunn, S.J. Moon, V.N. Shlyaptsev, and J.J. Rocca, “Soft X-Ray Laser Interferometry of a Dense Plasma Jet ,” IEEE Transactions on Plasma Sciences 36 , 4, 1286, (2008).
  52. J. Grava, M.A. Purvis, J. Filevich, M.C. Marconi, J.J. Rocca, J. Dunn, S.J. Moon, and V.N. Shlyaptsev, “Dynamics of a dense laboratory plasma jet investigated using soft x-ray laser interferometry,” Physical Review E 78 , 016403, (2008).
  53. J. Nilsen, J.I. Castor, C.A. Iglesias, K.T. Cheng, J. Dunn, W.R. Johnson, J. Filevich, M.A. Purvis, J. Grava, and J.J. Rocca, “Understanding the anomalous dispersion of doubly-ionized carbon plasmas near 47 nm,” High Energy Density Physics, 4 , 107, (2008).
  54. P. Naulleau, and G. Gallatin, “Spatial scaling metrics of mask-induced line-edge roughness ,” Journal of Vacuum Science and Technology B, 26 , 1903, (2008).
  55. M. Goldstein, R. Hudyma, P. Naulleau, and S. Wurm, “EUV micro-exposure tool at 0.5 NA for sub-16 nm lithography,” Optics Letters, 33 , 2995, (2008).
  56. P. Naulleau, E.M. Gullikson, A. Aquila, S. George, and D. Niakoula, “Absolute sensitivity calibration of extreme ultraviolet photoresists,” Optics Express, 16 , 11519, (2008).
  57. P.P. Naulleau, D. Niakoula, and G. Zhang, “System-level line-edge roughness limits in extreme ultraviolet lithography,” Journal of Vacuum Science and Technology B, 26 , 1289, (2008).
  58. J. Filevich, M. Purvis, J. Grava, D.P. Ryan, J. Dunn, S.J. Moon, V.N. Shlyaptsev, and J.J. Rocca, “Bow shocks formed by plasma collisions in laser irradiated semi-cylindrical cavities,” High Energy Density Physics 5 , 276 (2009 ).
  59. P. Naulleau, C.N. Anderson, L. M.Baclea-an, P. Denham, S. George, K.A. Goldberg, M. Goldstein, B. Hoef, G. Jones, C. Koh, B. La Fontaine, W. Montgomery, and T. Wallow, “Pushing EUV lithography development beyond 22-nm half pitch,” J. Vac. Sci. Technol. B 27 , 2911 (2009).
  60. R. Miyakawa, P. Naulleau, and A. Zakhor, “Iterative procedure for in-situ EUV optical testing with an incoherent source,” J. Vac. Sci. Technol. B 27 , 2927 (2009).
  61. M.A. Purvis, J. Grava, J. Filevich, D.P. Ryan, S.J. Moon, J. Dunn, V.N. Shlyaptsev, and J.J. Rocca, “ Collimation of dense plasma jets created by low energy laser pulses and studied with soft x-ray interferometry,” Phys. Rev. E 81 , 036408 (2010).
  62. S. Kohli, P.R. McCurdy, C.D. Rithner, P.K. Dorhout, A.M. Dummer, and C.S. Menoni, “Effect of Annealing on the Interfacial and Structural Properties of Amorphous Silicon-Hafnia Films,” Metallurgical and Materials Transactions a-Physical Metallurgy and Materials Science. 42A (1) 71 (2011).
  63. D.N. Nguyen, L.A. Emmert, D. Patel, C.S. Menoni and W. Rudolph “Transient phenomena in the dielectric breakdown of hfo2 optical films probed by ultrafast laser pulse pairs,” Applied Physics Letters 97 (2010)
  64. D.N. Nguyen, L.A. Emmert, P. Schwoebel, D. Patel, C.S. Menoni, M. Shinn and W. Rudolph “Femtosecond pulse damage thresholds of dielectric coatings in vacuum,” Opt. Express 19 , 5690 (2011)
  65. W. Li, A.A. Jaron-Becker, C.W. Hogle, V. Sharma, X.B. Zhou, A. Becker, H.C. Kapteyn, and M.M. Murnane, “Visualizing electron rearrangement in space and time during the transition from a molecule to atoms,” Proceedings Of The National Academy Of Sciences Of The United States Of America 107 , 20219 (2010).
  66. S . George, P. Naulleau, U. Okoroanyanwu, K. Dittmar, C. Holfeld and A. Wuest, “Lithographic performance evaluation of a contaminated extreme ultraviolet mask after cleaning,” Journal of Vacuum Science & Technology B 28, 841 (2010)
  67. S.A. George, L.M. Baclea-an, P.P. Naulleau, R.J. Chen and T. Liang, “Extreme ultraviolet mask surface cleaning effects on lithography process performance,” Journal of Vacuum Science & Technology B 28, C6E31 (2010)
  68. S.A. George, P.P. Naulleau, I. Mochi, F. Salmassi, E.M. Gullikson, K.A. Goldberg and E.H. Anderson, “Extreme ultraviolet mask substrate surface roughness effects on lithographic patterning” Journal of Vacuum Science & Technology B 28, C6E23 (2010)
  69. P.P. Naulleau and G.M. Gallatin, “Effect of resist on the transfer of line-edge roughness spatial metrics from mask to wafer,” Journal of Vacuum Science & Technology B 28, 1259 (2010)
  70. I. A. Vartanyants, A. Singer, A. P. Mancuso, O. Yefanov, A. Sakdinawat, Y. Liu, G. Williams, G. Cadenazzi, B. Abbey, H. Sinn, A. Scherz, J. Turner, W. Schlotter, D. Attwood, K. A. Nugent, E. Weckert, et. al. "Coherence properties of the single femtosecond pulses of an X-ray free-electron laser," Journal of Physics B-atomic Molecular and Optical Physics 43 , 19, 194016 (2011).
  71. A. Bhattacharya, Y. Q. Guo, and E. R. Bernstein, "A Comparison of the Decomposition of Electronically Excited Nitro-Containing Molecules with Energetic Moieties C-NO2, N-NO2, and O-NO2," J. Chem. Phys.  136 , 024321 (2012) 
  72. Z. Yu and E. R. Bernstein, "Decomposition of Pentaerythritol Tetranitrate following Electronic Excitation," J. Chem. Phys. 135, 154305 (2011)
  73. A. Bhattacharya and E. R. Bernstein, "Influence of Turn (or Fold) and Local Charge in the Fragmentation of Peptide Analogue Molecule, NH2-Gly-COCH3 Following Single Photon Ionization at 10.5 eV," J. Phys. Chem. A 115, 10679 (2011)
  74. Y. Xie, F. Dong, and E. R. Bernstein, "Experimental and Theory Studies of the Oxidation Reaction of Neutral Gold Carbonyl Clusters in the Gas Phase," Catal. Today 177, 64 (2011)
  75. S. Yin, Y. Xie, and E. R. Bernstein, "Hydrogenation Reactions of Ethylene on Neutral Vanadium Sulfide Clusters: Experimental and Theoretical Studies," J. Phys. Chem. A 115, 10266 (2011)
  76. F. Dong, Y. Xie, and E. R. Bernstein, "Experimental and Theoretical Studies of Neutral MgmCnHx and BemCnHx Clusters," J. Phys. Chem. A 135, 054307 (2011)
  77. Y. Q. Guo, A. Bhattacharya, and E. R. Bernstein, "Ultrafast S1 to S0 Internal Conversion Dynamics for Dimethylnitramine through a Conical Intersection," J. Phys. Chem. A 115, 9349 (2011)
  78. A. Bhattacharya and E. R. Bernstein, "Nonadiabatic Decomposition of Gas-Phase RDX through Conical Intersections: An ONIOM-CASSCF Study," J. Phys. Chem. A 115, 4135 (2011)
  79. Y. Q. Guo, A. Bhattacharya, and E. R. Bernstein, "Decomposition of Excited Electronic State s-Tetrazine and its Energetic Derivatives," J. Chem. Phys. 134, 024318 (2011)
  80. A.S. Markosyan, R. Route, M.M. Fejer, D.Patel, C.S. Menoni, “Spontaneous and Induced Absorption in Amorphous Ta2O5 Dielectric Thin Films,” Proceedings Vol. 8190 Laser-Induced Damage in Optical Materials: Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editors, 81900F. DOI: 10.1117/12.899217 (2011)
  81. R. A. Weber; C. Rodriguez; D. N. Nguyen; L. A. Emmert; W. Rudolph; D. Patel; C. S. Menoni, “Third harmonic microscopy for optical material characterization,” Proceedings Vol. 8190 Laser-Induced Damage in Optical Materials: Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editors, 81900V. DOI: 10.1117/12.899265 (2011)
  82. L. K. Takahashi, J. Zhou, O. Kostko, A. Golan, S. R. Leone, and M. Ahmed, "Vacuum-ultraviolet photoionization and mass spectrometric characterization of lignin monomers coniferyl and sinapyl alcohols," J. Phys. Chem. A 115 , 3279 (2011)
  83. A. A. Cordones, T. J. Bixby, and S. R. Leone, "Evidence for multiple trapping mechanisms in single CdSe/ZnS quantum dots from fluorescence intermittency measurements over a wide range of excitation intensities," J. Phys. Chem. C 115 , 6341 (2011)
  84. C.-L. Liu, J. D. Smith, D. L. Che, M. Ahmed, S. R. Leone, and K. R. Wilson, "The direct observation of secondary radical chain chemistry in the heterogeneous reaction of chlorine atoms with submicron squalane droplets," Phys. Chem. Chem. Phys. 13 , 8993 (2011)
  85. P. Naulleau, Chris Anderson, and Simi George , “EUV Resists: Illuminating the challenges,” J. Photopolym. Sci. Technol. 24 (6), 637-642 (2011)
  86. K. A. Goldberg, I. Mochi, T. Liang, “Actinic Characterization of EUV Bump-Type Phase Defects”, J. Vac. Sci. Technol. B, 29 (6), Nov/Dec (2011)
  87. P. Naulleau, B. McClinton, K. Goldberg, I. Mochi, and A. Rastegar, “Mask roughness challenges in extreme ultraviolet mask development,” J. Vac. Sci. & Technol. B, 29 , 06F501 (2011)
  88. P. Naulleau, I. Mochi, and K. Goldberg, “Optical modeling of Fresnel zoneplate microscopes,” Appl. Opt., 50 , 3678 (2011)
  89. P. Naulleau and S. George, “Validity of the thin mask approximation in extreme ultraviolet mask roughness simulations,” Appl. Opt., 50 , 3346 (2011)

 

Publications that result from Associated Projects
In Peer-Reviewed Conference Proceedings:

  1. P.P. Naulleau, J. Alexander Liddle, F. Salmassi, E.H. Anderson, E.M. Gullikson, “Design and fabrication of advanced EUV diffractive elements ,” Micromachining Technology for Micro-Optics and Nano-Optics II, Proceedings of SPIE, Vol. 5347 , p.9, (2003).
  2. J. Filevich, J.J. Rocca, M.C. Marconi, R.F. Smith, J.Dunn, R. Keenan, J.R. Hunter, S.J. Moon, J. Nilsen, J. Scofield, A. Ng, V.N. Shlyaptsev, “ Evidence of bound electron contribution to soft x-ray laser interferograms of dense plasmas ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  3. R.F. Smith, J. Dunn, J. Filevich, S. Moon, J. Nilsen, R. Keenan, V.N. Shlyaptsev, J.J. Rocca, J.R. Hunter, R. Shepherd, R. Booth, M.C. Marconi, “Two-dimensional Interferometric, Nera-field and Temporal characterization of the Transient Collisional X-ray Laser ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  4. A. Rahman, J.J. Rocca , and J.-F. Wyart, “ Classification of the Nickel-like Silver Spectrum from a Fast High Power Capillary Discharge Plasma ,” The 9 th International Conference on X-Ray Lasers, Beijing, China, May 24-28, 2004, submitted
  5. K.A. Goldberg, P.Naulleau, P.Denham, S.B. Rekawa, K.Jackson, J. Alexander Liddle, E.H. Anderson, “EUV interferometric testing and alignment of the 0.3 NA MET optic ,” Emerging Lithographic Technologies VIII, Proceedings of SPIE, Vol. 5374, p.64, (2004).
  6. J. Filevich, J. Grava, M. Purvis, M.C. Marconi, J.J. Rocca, J. Dunn, J. Nilsen, J. Scofield, S.J. Moon, R.F. Smith, R. Keenan, J.R. Humter, V.N. Shlyapsev, “Soft x-ray laser interferometry unveils plasmas with index of refraction greater than one ,” SPIE conference on Soft X-ray lasers and Applications, San Diego, August 2005; Proceedings of SPIE 5919 , 186, (2005).
  7. J. Grava, M. Purvis, J. Filevich, M.C. Marconi, J.J. Rocca, J. Dunn, S.J. Moon, R.F. Smith, R. Keenan, J. Nilsen, V.N. Shlyaptsev, “Soft x-ray interferometry of colliding plasmas ,” SPIE conference on Soft X-ray lasers and Applications, San Diego, August 2005; Proceedings of SPIE 5919 , 132, (2005).
  8. N. Wagner, A. Wuest, M. Murnane, H. Kapteyn, “Molecular Structure Effects on High Harmonic Generation in CO2,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, JThH2, (2005).
  9. R. Tobey, M. Siemens, M. Murnane, H. Kapteyn, K. Nelson, “Detection of Ultrahigh Frequency Acoustic Transients using Coherent EUV Light,” CLEO/QELS Conference, Baltimore, May 22-27, 2005; Technical Digest, QFC5, (2005).
  10. D. Gaudiosi, N. Wagner, A. Wüest, M.M. Murnane, H.C. Kapteyn, B. Reagan, M.Grisham, and J. Rocca, “High-order harmonics from molecules and ions,” 89th Annual Meeting of the Optical Society of America, Frontiers in Optics/Laser Science XXI (OSA/ILS), Tucson, AZ, October 2005; FiO 2005/Laser Science XXI Technical Digest, ISBN 1-55752-797-0, (2005).
  11. S. Bajt, Z. Dai, E.J. Nelson, J.B. Alameda, N.Q. Nguyen, S.L. Baker, J.C. Robinson, J.S. Taylor, W.M. Clift, A.L. Aquila, E.M. Gullikson, S. Wurm, O.R. Wood II, N.G. Edwards, “Oxidation resistance of Ru-capped EUV multilayers,” Proceedings of SPIE 5751 , 118, (2005).
  12. A. Barty, Y. Liu, E. Gullikson, J.S. Taylor, O.R. Wood II, “Actinic inspection of multilayer defects on EUV masks,” Proceedings of SPIE 5751 , 651, (2005)
  13. E. Gullikson, E. Tejnil, K.-Y. Tsai, A.R. Stivers, H. Kusunose, “Modeling the defect inspection sensitivity of a confocal microscope,” Proceedings of SPIE 5751 , 1223, (2005).
  14. T. Koehler, R. Brainard, P. Naulleau, D. van Steenwinckel, J. Lammers, K. Goldberg, J. Mackevich, P. Trefonas, “Performance of EUV photoresists on the ALS micro exposure tool,” Proceedings of SPIE 5753 , 754, (2005).
  15. Y. Liu, A. Barty, E. Gullikson, J.S. Taylor, J.A. Liddle, O.R. Wood II, “A dual-mode actinic EUV mask inspection tool,” Proceedings of SPIE 5751 , 660, (2005).
  16. P.P. Naulleau, K.A. Goldberg, E.H. Anderson, J.P. Cain, P. Denham, B. Hoef, K. Jackson, A.-S. Morlens, S. Rekawa, K. Dean, “EUV microexposures at the ALS using the 0.3-NA MET projection optics,” Proceedings of SPIE 5751 , 56, (2005).
  17. R. Soufli, S.L. Baker, S. Ratti, J.C. Robinson, S. Bajt, J. Alameda, E. Spiller, J.S. Taylor, E.M. Gullikson, F.J. Dollar, A.L. Aquila, R.L. Bristol, “Substrate smoothing for high-temperature condenser operation in EUVL source environments,” Proceedings of SPIE 5751 , 140, (2005).
  18. R. Soufli, D.L. Windt, J.C. Robinson, S.L. Baker, E.Spiller, F.J. Dollar, A.L. Aquila, E.M. Gullikson, B. Kjornrattanawanich, J.F. Seely, L. Golub, “Development and testing of EUV multilayer coatings for the atmosferic imaging assembly instrument aboard the Solar Dynamics Observatory ,” Proceedings of SPIE 5901 , 59010M, (2005).
  19. J. Filevich, J. Grava, M. Purvis, M.C. Marconi, J.J. Rocca, J. Nilsen, J. Scofield, S.J. Moon, J. Dunn, R.F. Smith, R. Keenan, J.R. Hunter, W.R. Johnson, and V.N. Shlyaptsev, “Multiply ionized plasmas with index of refraction greater than one ,” XXIX ECLIM-29 th European Conference on Laser Interaction with Matter, Madrid, Spain, June 11-16, 2006, 29 th SCLIM, 364 , (2006).
  20. B. La Fontaine, A.R. Pawloski, O. Wood, Y. Deng, H.J. Levinson, P. Naulleau, P.E. Denham, E. Gullikson, B. Hoef, C. Holfeld, C. Chovino, and F. Letzkus, “Demonstration of phase-shift masks for extreme-ultraviolet lithography ,” SPIE 6151 , 69, (2006).
  21. P. Naulleau, C. Rammeloo, J.P. Cain, K. Dean, P. Denham, K.A. Goldberg, B. Hoef, B. La Fontaine, A.R. Pawloski, C. Larson, and G. Wallraff, “Investigation of the current resolution limits of advanced extreme ultraviolet (EUV) resists ,” SPIE 6151 , 289, (2006).
  22. M.A. Purvis, J. Grava, J. Filevich, M.C. Marconi, J.J. Rocca, J. Dunn, S.J. Moon, J. Nilsen, V.N. Shlyaptsev, and E. Jankowska, “Plasma interactions in laser irradiated cavities studied with soft x-ray: interferometry using a capillary discharge laser,” Conference on Soft X-Ray Lasers and Applications VII, SPIE, Vol.6702, (2007).
  23. J. Grava, M. Purvis, J. Filevich, M. Marconi, J.J. Rocca, J. Dunn, S. Moon, V. Shlyaptsev, and E. Jankowska , “ Dynamics of dense converging plasmas studied with soft x-ray laser interferometry ,” Proc. American Physical Society, BAPS.2007.MAR.K1.167, (2007).
  24. M. Purvis, J. Grava, J. Filevich, J.J. Rocca, J. Dunn, S. Moon, and V. Shlyaptsev, “Collimation of laboratory plasma jets studied with soft x-ray laser interferometry,” 50 th Annual Meeting of the Division of Plasma Physics, Dallas, Texas, November 17-21, (2008), Bulletin of the American Physical Society, 25 , Number 14, BO4.00011, (2008).
  25. J.S. Nation, and P.P. Naulleau, “Model-based pupil-fill optimization for the SEMATECH Berkeley EUV microfield exposure tool,” Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., SPIE, 6921 , 69213J, (2008).
  26. P. Fischer, “Soft x-ray microscopy – a powerful analytical tool to image magnetism down to fundamental length and time scales,” (invited review for AAPPS Bulletin) “Celebrating 20 Years of CMR – Past, Present, and Future (II),” C.-R. Chang and B. Terris, eds., Association of Asia Pacific Physical Societies Bulletin, 18 , 12 (2008).
  27. A. Ma, J.-O. Park, K. Dean, S. Wurm, and P. Naulleau, “Benchmarking commercial EUVL resists at SEMATECH,” SPIE Advanced Lithography, Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., Proc. 6921 , 69213O, (2008).
  28. G. Gallatin, P. Naulleau, R. Brainard, D. Niakoula, and K. Dean, “Resolution, LER and sensitivity limitations of photoresists,” Emerging Lithographic Technologies XII, Frank M. Schellenberg, eds., SPIE, 6921 , 62911E, (2008).
  29. K.A. Goldberg, P. Naulleau, I. Mochi, E.H. Anderson, S.B. Rekawa, C.D. Kemp, R.F. Gunion, H.-S. Han, and S. Huh, “Benchmarking EUV mask inspection beyond 0.25 NA,” Photomask Technology 2008, Hiroichi Kawahira; Larry S. Zurbrick, eds., SPIE, 7122 , 71222E, (2008).
  30. M. Purvis, J. Grava, J. Filevich, D.P. Ryan, S.J. Moon, J. Dunn, V.N. Shlyaptsev , and J.J. Rocca , “ Elucidating the collimation of laboratory plasma jets using soft x-ray interferometry,” Soft X-Ray Lasers and Applications VIII SPIE Optics and Photonics , San Diego, CA, Aug. 4-9, J. Dunn and G.J. Tallents, eds., Proc. 7451 , 74510L (2009). Invited
  31. P. Naulleau, C.N. Anderson, L. Baclea-an, P. Denham, S. Geroge, K.A. Goldberg, M. Goldstein, B. Hoef, R. Hudyma, G. Jones, C. Koh, B.L. Fontaine, B. McClinton, R. Miyakawa, W. Montgomery, J. Roller, T. Wallow, and S. Wurm, “The SEMATECH Berkeley microfield exposure tool: learning at the 22-nm node and beyond,” Alternative Lithographic Technologies, San Jose, CA, USA: SPIE Proc. 7271 , 727101 (2009) .
  32. C.N. Anderson, P. Naulleau, “MOSAIC: a new wavefront metrology,” Alternative Lithographic Technologies, San Jose, CA, USA: SPIE Proc. 7272 , 72720B (2009) .
  33. L.A. Emmert, D.N. Nguyen, M. Mero, W. Rudolph, D. Ristau, K. Starke, M. Jupe, C.S. Menoni, D. Patel, and E. Krous, “Fundamental processes controlling the single and multiple femtosecond pulse damage behavior of dielectric oxide films,” Laser-Induced Damage in Optical Materials: 2009, G.J. Exarhos, V.E. Gruzdev, D. Ristau, M.J. Soileau, and C.J. Stolz, eds., SPIE Proc. 7504 , 75040P (2009).
  34. E.M. Krous, D. Patel, A. Markosyan, D.N. Nguyen, L.A. Emmert, P. Langston, R. Route, M. Fejer, W. Rudolph, M. Shinn, and C.S. Menoni, “Optimization of scandia thin films for high power laser coating applications,” Laser-Induced Damage in Optical Materials: 2009, G.J. Exarhos, V.E. Gruzdev, D. Ristau, M.J. Soileau, and C.J. Stolz, eds., SPIE Proc. 7504 , 750407 (2009).
  35. S. Mathias, M. Bauer, M. Aeschlimann, L. Miaja-Avila, H.C. Kapteyn, and M.M. Murnane, “Time-resolved photoelectron spectroscopy at surfaces using femtosecond XUV-pulses,” Dynamics at Solid State Surfaces and Interfaces Vol. 1: Current Developments, U. Bovensiepen, et al, eds., Wiley-VCH Verlag, 501 (2010)
  36. C-W. Koh, J. H. Georger, L. Ren, F. Goodwin, S. Wurm, D. Ashworth, W. Montgomery, B. Pierson, J-O. Park, P. P. Naulleau, “Characterization of promising resist platforms for sub-30-nm HP manufacturability and EUV-CAR extendibility study,” Proc. SPIE 7636 , 763604-1 (2010).
  37. S. A. George, P. P. Naulleau, B. Z. Y. Wu, J. T. Kennedy, S-Y. Xie, Kyle Y. Flanigan, T. I. Wallow, “Characterization of line-edge roughness (LER) propagation from resist: underlayer interfaces in ultra-thin resist films,” Proc. SPIE 7636 , 763605-1 (2010).
  38. Y-J. Fan, L. Yankulin, A. O. Antohe, R. Garg, P. Thomas, C. Mbanaso, A. F. Wüest, F. Goodwin, S. Huh, P. P. Naulleau, K. A. Goldberg, I. Mochi, G. P. Denbeaux, “Carbon contamination topography analysis of EUV masks,” Proc. SPIE 7636 , 76360G-1 (2010).
  39. J. J. Biafore, M. D. Smith, T. I. Wallow, P. P. Naulleau, Y. Deng, “Resist pattern prediction at EUV,” Proc. SPIE 7636 , 76360R-1 (2010).
  40. C. G. Morgan, R. Vane, P. P. Naulleau, S. B. Rekawa, P. E. Denham, B. H. Hoef, M. S. Jones, “Removal and prevention of surface contamination from EUV mirrors using low-power downstream plasma cleaning,” Proc. SPIE 7636 , 76361Q-1 (2010).
  41. S. A. George, P. P. Naulleau, S. B. Rekawa, C. D. Kemp, “Assessing out-of-band flare effects at the wafer level for EUV lithography,” Proc. SPIE 7636 , 763626-1 (2010).
  42. B. M. McClinton, P. P. Naulleau, “Investigation of a 'rule-of-thumb' mask roughness induced LER model,” Proc. SPIE 7636 , 76362G-1 (2010).
  43. P. P. Naulleau, S. A. George, B. M. McClinton, “Mask roughness and its implications for LER at the 22- and 16-nm nodes,” Proc. SPIE 7636 , 76362H-1 (2010).
  44. P. P. Naulleau, C. N. Anderson, L-M. Baclea-an, S. A. George, K. A. Goldberg, B. H. Hoef, M. S. Jones, C-W. Koh, B. M. La Fontaine, W. Montgomery, T. I. Wallow, “The SEMATECH Berkeley MET pushing EUV development beyond 22-nm half pitch,” Proc. SPIE 7636 , 76361J-1 (2010).
  45. R. H. Miyakawa, P. P. Naulleau, A. Zakhor, K. A. Goldberg, “Iterative procedure for in-situ optical testing with an incoherent source,” Proc. SPIE 7636 , 76361K-1 (2010).
  46. C. N. Anderson, J. W. Daggett, P. P. Naulleau, “Corner rounding in EUV photoresists: tuning through development time, PEB temperature, and platform constituents,” Proc. SPIE 7636 , 763617-1 (2010).
  47. D. N. Nguyen, L. A. Emmert, W. Rudolph, D. Patel, C. S. Menoni, “The vacuum effect of femtosecond LIDT measurements on dielectric films”, Proceedings SPIE Vol. 7842, Laser-Induced Damage in Optical Materials: 2010, Gregory J. Exarhos, Vitaly E. Gruzdev, Joseph A. Menapace, Detlev Ristau, M. J. Soileau, Editors , (2010).
  48. L. A. Emmert; M. Mero, D. N. Nguyen, W. Rudolph, D. Patel, E. Krous, C. S. Menoni, “Femtosecond pulses on 1 LIDT in dielectric materials: comparison of experiment and theory,” Proceedings SPIE Vol. 7842, Laser-Induced Damage in Optical Materials: 2010, Gregory J. Exarhos, Vitaly E. Gruzdev, Joseph A. Menapace, Detlev Ristau, M. J. Soileau, Editors, (2010).
  49. C.S. Menoni, J. Filevich, I. Kuznetzov, D. Fang, J.J. Rocca, E.R. Bernstein, M.R. McNeil, and D.C. Crick, “Extreme Ultraviolet Laser Ablation Spectrometry (EUV-LAMS): an enabling tool for probing composition at the sub-cell level,” RMRCE National Annual Meeting, Las Vegas, NV, Apr. 8-10, (2010).
  50. J. Filevich, I. Kuznetsov, F. Dong, B. Schroeder, E. Bernstein, M. McNeil, D.C. Crick, J.J. Rocca, and C.S. Menoni, “Extreme Ultraviolet Laser Ablation Mass Spectrometry,” RMRCE Meeting, Estes Park, CO, Sep. 26-28, (2010).
  51. C.S. Menoni, “Advances in ion beam sputtered optical interference coatings”, SPIE Laser Damage Symposium, Sep, Boulder, CO, (2010). Invited.
  52. L.A. Emmert, D.N. Nguyen, M. Mero, W. Rudolph, E. Krous, D. Patel and C.S. Menoni, "Fundamental processes controlling the multiple subpicosecond laser pulse damage behavior of dielectric optical coatings", Conference on Optical Interference Coatings, Optical Society of America (2010)
  53. E. Krous, D. Patel, P. Langston, C. Menoni, A. Markosyan, R. Route, M. Fejer, D. Nguyen, L. Emmert and W. Rudolph, “Scandium oxide thin films deposited by dual ion beam sputtering for high-power laser applications,” Conference on Optical Interference Coatings, Optical Society of America (2010)
  54. P. Langston, D. Patel, A. Markosyan, E.M. Krous, D. Nguyen, L.A. Emmert, W. Rudolph, R. Route, M. Fejer and C.S. Menoni, “Effect of annealing on the optical properties of hfo2,” Conference on Optical Interference Coatings, Optical Society of America (2010)
  55. D.N. Nguyen, L.A. Emmert, W.A. Rudolph, E. Krous, D. Patel, C.S. Menoni and M. Shinn, “Multiple subpicosecond pulse laser damage behavior of optical coatings in a vacuum environment,” Conference on Optical Interference Coatings, Optical Society of America (2010)
  56. G. Gallatin and P. Naulleau, “Modeling the transfer of line-edge roughness from an EUV mask to wafer,” Proc. SPIE 7969 , 796903 (2011). Invited.
  57. P. Naulleau, “Critical challenges for EUV resist materials,” Proc. SPIE 7972 , 797202 (2011). Invited.
  58. P. Naulleau, C. Anderson, L. Baclea-an, P. Denham, S. George, K. Goldberg, G. Jones, B. McClinton, R. Miyakawa, I. Mochi, W. Montgomery, S. Rekawa, and T. Wallow, “Using synchrotron light to accelerate EUV resist and mask materials learning,” Proc. SPIE 7985 , 798509 (2011). Invited.
  59. P. Naulleau, K. Goldberg, E. Gullikson, I. Mochi, B. McClinton, A. Rastegar, “Accelerating EUV learning with synchrotron light: Mask roughness challenges ahead,” Proc. SPIE 8166 , 81660F, (2011). Invited.
  60. P. Naulleau, “LER Metrology: can we trust the numbers?”, 2011 International Workshop on EUV Lithography (2011) Invited.
  61. K. A. Goldberg, I. Mochi, S. B. Rekawa, N. S. Smith, J. B. Macdougall, P. Naulleau, “An EUV Fresnel zoneplate mask-imaging microscope for lithography generations reaching 8 nm," Proc. SPIE, 7969 , 79691O (2011). Invited.
  62. K. A. Goldberg, I. Mochi, E. Gullikson, E. H. Anderson, P. Naulleau, H.-J. Kwon, D. Chang, “Advancing EUV mask microscopy with ultra-high resolution and the capacity for shorter EUV wavelengths”, Proc. SPIE Photomask Technology, 8166 , (Sept. 2011). Invited.
  63. S. George, P. Naulleau, “Out of band radiation effects on resist patterning,” Proc. SPIE 7969 , 796914 (2011).
  64. R. Miyakawa, P. Naulleau, “Lateral shearing interferometry for high-resolution EUV optical testing,” Proc. SPIE 7969 , 796939 (2011).
  65. C. Anderson, P. Naulleau, “Low speckle holographic beam shaping of high-coherence EUV sources,” Proc. SPIE 7969 ,79690X (2011).
  66. B. McClinton, P. Naulleau, T. Wallow “Absorber height effects on SWA restrictions and shadow LER,” Proc. SPIE 7969 , 796920 (2011).
  67. B. McClinton, P. Naulleau, “Mask roughness induced LER control and mitigation: aberrations sensitivity study and alternate illumination scheme,” Proc. SPIE 7969 , 79691Z (2011).
  68. B. McClinton, P. Naulleau, “Mask roughness induced LER: geometric model at long correlation lengths,” Proc. SPIE 7969 , 79691Y (2011).
  69. S. George, L. Baclea-an, R. Chen, and P. Naulleau, “22X mask cleaning effects on EUV lithography process and lifetime,” Proc. SPIE 7969 , 79691W (2011).
  70. J. Stowers, A. Telecky, D. Keszler, A. Grenville, P. Naulleau, C. Anderson, “Directly patterned inorganic hardmask for EUV lithography,” Proc. SPIE 7969 , 796915 (2011).
  71. C. Anderson, P. Naulleau, L. Baclea-an, P. Denham, S. George, K. Goldberg, G. Jones, B. McClinton, W. Montgomery, N. Smith, T. Wallow, “The SEMATECH Berkeley MET: extending EUV learning down to 16-nm half pitch,” Proc. SPIE 7969 , 79690R (2011).
  72. S. George, P. Naulleau, I. Mochi, F. Salmassi, E. Gullikson, K. Goldberg, E. Anderson, “Replicated mask surface roughness effects on EUV lithographic patterning and line-edge roughness,” Proc. SPIE 7969 , 79690E (2011).
The foundation for the EUV ERC was provided by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310717. Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not reflect those of the National Science Foundation.
Last updated: 05/17/12