Engineering Research Center
for Extreme Ultraviolet (EUV) Science and Technology

Strategic Research Plan


Strategic Plan Diagram

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The strategic plan for the ERC research is designed to realize its vision: to make EUV light sources widely accessible and useful for solving challenging scientific and technological problems. To accomplish this, a major coordinated effort in three areas is being pursued:

Thrust 1: Engineered EUV Sources: the development of compact, cost-effective, coherent EUV light sources that provide unique capabilities.
Thrust 2: Imaging, Patterning and Metrology: applications of EUV light sources.
Thrust 3: Novel Linear and Non-Linear Spectroscopies: contributions to fundamental knowledge in laser and EUV science and technology, optics, and plasma physics.

Research at the ERC is structured around two major testbed systems: A1) EUV Light Sources, and A2) Application Testbeds. The strategic plan for research of the EUV ERC combines the expertise in EUV lasers and EUV HHG sources of the CSU and CU groups, with the expertise in EUV optics and synchrotron sources of the UC Berkeley group. Sources and testbeds involving EUV lasers are developed at CSU, while sources and testbeds involving HHG sources are developed at CU. Often the development of a specific type of source has contributions from all three groups and from members of the partner institutions.

Deliverables resulting from the center’s research work will include:

  1. Integrated EUV systems that will demonstrate EUV technology can provide unique solutions to challenging problems in science and in nanotechnology;
  2. Small-scale EUV source systems that overcome the size/cost source barriers that currently limit the widespread use of EUV radiation;
  3. Valuable fundamental knowledge in areas that include optics, laser science and plasma physics.

The successful realizations of the main goals of the research plan will result in enabling EUV practical tools and techniques that could revolutionize numerous aspects of science and technology and spawn new industries.

The foundation for the EUV ERC was provided by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310717. Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not reflect those of the National Science Foundation.
Last updated: 10/14/14