NSF EUV ERC

NSF Engineering Research Center
for Extreme Ultraviolet (EUV) Science and Technology

Faculty by Research Thrust

Thrust 1 – Engineered EUV Source

Thrust Leaders

Jorge Rocca Electrical and Computer Engineering, Physics, CSU
Henry Kapteyn Electrical and Computer Engineering, Physics, JILA CU

Senior Investigators

Margaret Murnane, Electrical and Computer Engineering, Physics, JILA, CU
Carmen Menoni, Electrical and Computer Engineering, CSU
Mario Marconi, Electrical and COmputer Engineering, CSU
Bradley Luther, Electrical and Computer Engineering CSU
Oren Cohen, JILA, CU
Arvinder Sandhu, JILA, CU
Barry Walker, Physics, Delaware
Ivan Christov, Physics, CU and U of Sofia
Vyacheslav Shlyaptsev, Applied Physics, UC - Davis

Thrust 2 – Imaging, Patterning, and Metrology

Thrust Leaders

Erik Anderson, CXRO, LBNL
David Attwood, Electrical Engineering and Computer Science, UC - Berkeley
Mario Marconi, Electrical and Computer Engineering, CSU

Senior Investigators


Yanwei Liu, Electrical and Computer Engineering, UC - Berkeley
Weilun Chao, Electrical and Computer Engineering, UC - Berkeley
Alexander Liddle, CXRO, LBNL
Margaret Murnane, Electrical and Computer Engineering, Physics, JILA, CU
Henry Kapteyn, Electrical and Computer Engineering, Physics, JILA, CU
Carmen Menoni, Electrical and Computer Engineering, CSU
Randy Bartels, Electrical and Computer Engineering CSU

Thrust 3 – Novel Linear and Non-Linear Spectroscopies

Thrust Leaders

Margaret Murnane, Electrical and Computer Engineering, Physics, JILA , CU
Steve Leone, Chemistry, UC

Senior Investigators

Henry Kapteyn, Electrical and Computer Engineering, Physics, JILA, CU
Daniel Dessau, Physics, CU
Keith Nelson, Chemistry, MIT
Carmen Menoni, Electrical and Computer Engineering, CSU
Jorge Rocca, Electrical and Computer Engineering, Physics, CSU
Elliot Bernstein, Chemistry, CSU
John Gland, Chemistry, U. Michigan
Martin Aeschlimann, Physics, U. Kaiserslautern
Ronggui Yang, Mechanical Engineering, CU
Steve George, Chemical Engineering, Chemistry, CU

This work is supported primarily by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310717. Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not reflect those of the National Science Foundation.
Last updated: 08/19/10