NSF EUV ERC

NSF Engineering Research Center
for Extreme Ultraviolet (EUV) Science and Technology

EUV degree programs and courses

The interdisciplinary flavor of the EUV ERC the participating students to have the flexibility to design their course of studies. All three campuses offer the opportunity to realize a tailored study program with emphasis in Extreme Ultraviolet Science and Technology through certificate degree programs:

Certificate Programs
Applied Physics Certificate Program, University of Colorado
This program enables physics Ph.D. students to take courses in Engineering, Chemistry, Materials Science and Biology while still pursuing a Ph.D. degree in Physics.

Certificate at Colorado State University
This program is open to graduate students in any of the STEM disciplines who wish to acquire an expertise in EUV Science and Technology

Degree Program
Applied Science and Technology, University of California, Berkeley
This program focuses on studies involving the application of physical and mathematical techniques to fundamental investigations and emerging areas within the physical and life sciences. Major areas of emphasis are in applied physics, engineering sciences, and mathematical sciences. This is primarily a PhD. program.

Courses
To support the new educational programs , the EUV ERC is offering courses addressing the foundations and applications of optical and EUV science, including EUV source development, optical system implementation, and measurement techniques. These courses provide the pathway for integrating the latest advances in EUV science and technology developed by the Center’s researchers.
Courses presently offered are listed in the table below.


Courses specific to EUV

Course Title

Institution

Instructors

Delivery Method

Soft x-ray and extreme

 ultraviolet science and technology

AST 210 & EECS 213
FALL 2005 Course

(UC Berkeley)

D. T. Attwood

In class, Webcast-live, Archived for later viewing.

Course Syllabus
www.coe.berkeley.edu/AST/sxreuv

ECE 681 (CSU) and PHYS 7810 (CU)

H. C. Kapteyn,

J.J. Rocca

Webcast-live

Electron Beam Lithography and Nano-Fabrication Technology

EECS 290

(UC Berkeley)

E.H. Anderson

J.A. Liddle

In class lectures + laboratory

Webcast of lectures possible

Nanoscience and Nanotechnology

New - To be taught at CSU –

C.S. Menoni

In class

Webcast possible

EUV instrumentation & Methods

New - To be taught jointly

CU & CSU 

Murnane, Kapteyn

Rocca, Marconi, Menoni

Laboratory

modules

Supporting Courses

X-Ray Lasers

EE 774 (CSU)

J.J. Rocca

In class/ Webcast-live possible

Lasers         

PHYS 5160 (CU) EE546 (CSU)

Murnane, Kapteyn

Rocca

In class

Ultrafast Optics

PHYS 7810 (CU)

EE 580 (CSU)

Various

Bartels

Lecture + Labs

Webcast-live between CU and CSU next year

Physical Optics

ECEN 5156  (CU)

Various

In class lectures

Nonlinear optics

ECEN 6006  (CU), EE 680 (CSU)

Various, Bartels

In class lectures

Fourier Optics

EE 457 (CSU)

Bartels

In class lectures

 

This work is supported primarily by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310717. Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not reflect those of the National Science Foundation.
Last updated: 05/03/05